Specs for Mercury Probe CV-IV System.docx

Specifications for Mercury Probe CV/IV System

1. The Naval Research Laboratory (NRL) has a requirement for a mercury probe CV/IV system.

a. The primary requirement is for a mercury (Hg) probe capacitance-voltage/current-voltage (CV/IV) system for solid-state materials and devices. The Hg-probe CV/IV system allows for the non-destructive electrical interrogation of semiconductor device structures for the purposes of investigating such properties as carrier profile/density in a semiconductor or the permittivity of a dielectric material. The Hg-probe CV/IV system must be a standard commercial product with demonstrated field use.

b. The Hg-probe system must accommodate 150 mm wafers. The Hg must be delivered using a fail- safe system and the configuration must allow for front-front and front-back measurement configurations. Minimum sample size is to be at least 1.8 cm. The system must come with a dark box for light sensitivity.

c. CV measurements must be performed using a precision LCR meter with a frequency range of 100 Hz to 1 MHz and bias of +/- 100 V using an external source. IV measurements must provide a voltage range of +/- 100 V with 10 mV resolution and a current range of +/- 100 mA with 1 pA resolution. CV and IV measurements must be able to be performed without modifying cabling.

d. The CV and IV measurements should be fully run via an intuitive graphical user interface (GUI) on a Windows operating system. The GUI should allow the user to specify all test parameters, plot data, save/export data, and provide analysis for standard CV and IV test programs for semiconductor and metal-oxide-semiconductor materials including, but not limited to, junction doping profiles, dielectric constant extraction, multifrequency CV, and dielectric IV.

e. The system must include standard accessories such as silicon calibration wafers with known resistivity and oxide thickness, spare Hg vials and o-rings, and a Hg spill kit.

2. Warranty and Support: The contractor shall offer the Government at least the same warranty terms, including offers of extended warranties, offered to the general public in customary commercial practice.