Specs-DryAbatementScrubber CO Edit.pdf

SPECIFICATIONS:

DRY ABATEMENT SCRUBBER

Background:

The National Institute of Standards and Technology (NIST)/Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development from discovery to production. The Nanofabrication Operations Group of the CNST has the mission of advancing measurement science by developing novel nanofabrication and nanomanufacturing techniques. NIST’s CNST NanoFab operates low pressure chemical vapor deposition (LPCVD) furnaces in the class 100 multi-user CNST NanoFab cleanroom facility. The clean room facility is located at the NIST Gaithersburg, MD site and is used as a shared resource that is accessible to researchers from industry, academia, NIST, and other government agencies. The CNST NanoFab operates LPCVD furnaces for the deposition silicon nitride thin films. These LPCVD silicon nitride furnaces require process abatement to remove residual ammonia and dichlorosilane from the process exhaust.

NIST’s CNST NanoFab seeks to acquire a dry abatement scrubber to support the operation of four LPCVD silicon nitride furnaces. This scrubber system will remove the residual ammonia and dichlorosilane from the process exhaust. These LPCVD furnaces are used to deposit thin dielectric films to support a variety of NIST mission critical nanophotonics programs, including NIST-on-a-chip photonic thermometry and quantum measurement standards that underpin the semiconductor industry. The CNST NanoFab has numerous NIST mission critical and external projects, including the NIST on a chip nanophotonic efforts, that utilize thick dielectric cladding layers over their nanoscale fabricated photonic structures. The scrubber is necessary for the operation of the LPCVD silicon nitride furnaces and the overall performance and the success of the numerous existing and future NIST mission critical projects carried out in the CNST NanoFab will depend critically on the performance of the LPCVD silicon nitride furnace system which relies on the scrubber.

Minimum Requirements:

The system shall meet or exceed the following technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The contractor shall provide one dry abatement scrubber system that meets the following minimum specifications:

The dry abatement scrubber system:

1. The dry abatement scrubber system shall be of the passive type that uses dry absorber media in canisters and requires no water, no additional fuel, or added electrical heating for the abatement of hazardous chemicals from the process exhaust.

2. The dry abatement scrubber system shall be constructed such that any surface which is contacted by process chemicals shall be constructed of a material which is resistant to those chemicals.

3. The dry abatement scrubber system shall contain the absorber canisters in an exhausted enclosure.

4. The dry abatement scrubber system exhaust cabinet shall have gas detection for target chemicals

(NH3, HCl).

5. The dry abatement scrubber system shall have exhaust gas detection to detect breakthrough of target chemicals (NH3, HCl) in the process exhaust.

6. The dry abatement scrubber system shall be capable of abating ammonia and dichlorosilane from the process exhaust gas flow with sub-TLV (threshold limit value) removal efficiency.

7. The dry abatement scrubber system shall be a dual canister design configured with auto-changeover capability such that one canister is used until target chemical break through is detected then the system automatically switches to use the second canister.

8. The dry abatement scrubber system shall be capable of processing 250 standard liters per minute of total process exhaust gas flow.

9. The dry abatement scrubber system shall use a control system that:

a. monitors all critical system parameters including but not limited to system pressures, canister temperature, and hazardous gas detection levels for the scrubber cabinet and the process exhaust

b. provides automated cycle purge routines

c. provides interlock output related to scrubber status (online vs offline)

d. provides data logging of system parameters including but not limited to system pressures, canister temperature, and gas detection levels for both scrubber cabinet and process exhaust

10. The footprint of the dry abatement scrubber system shall not exceed 48 inches wide by 30 inches deep by 68 inches tall.

11. The dry abatement scrubber system shall include all appropriate interlocks to ensure safe operation.

12. The electrical utility requirement of the dry abatement scrubber system shall accommodate standard 110 VAC supply.

13. The seller shall provide evidence of supplying, installing, and training on at least 10 systems, in the US market, of the same model dry abatement scrubber system being offered with similar requirements to those in this statement of work. Evidence of this criterion shall be demonstrated with appropriate documentation.

14. Vendor shall provide list of included parts in recommended spares kit. If vendor offers different levels of recommended spares kits, provide information and pricing about all of them.

Delivery:

The dry abatement scrubber system shall be received within 6 months after award of the contract. The CNST NanoFab will require 60 days from delivery to site the system and connect facilities. Vendor is responsible for tool startup, demonstration of specifications, and training including travel, labor, or any other expense. During tool startup, vendor is responsible for working with NIST engineers and technicians, to demonstrate process capability.

Delivery shall be FOB Destination and shall occur not later than (NLT) 6 months ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 220 Gaithersburg, MD 20899-1640

Inspection/Acceptance:

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

The dry abatement scrubber system shall meet or exceed the minimum specifications described above.

Following vendor installation and startup, the dry abatement scrubber system will be tested on-site for verification of full functionality and to demonstrate:

1. Alarm conditions including but not limited to hazardous gas detection in cabinet, hazardous gas detection in process exhaust post-abatement canister, and canister over temperature trigger prescribed responses correctly

2. Interlock scenarios function correctly

3. Cycle purge routines function properly

4. Data logging capability, file format, and accessibility

An extended inspection/acceptance period of fourteen (14) days shall be required.

Training:

The contractor shall conduct a training session of at least 2 days for up to 4 users at NIST. The training shall provide a thorough demonstration of all system functions, maintenance, data administration, basic troubleshooting, and repair procedures. The training may be completed at NIST immediately after installation and start-up but shall be completed no later than 14 days after installation.

Warranty:

The contractor shall warrant the entire dry abatement scrubber system for a period of a minimum of one year after the date of government acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. The vendor shall repair or replace at its cost, any defective items without any additional cost to the government including travel, labor, parts, or any other expense.