SOWv2.docx

Statement of Work BMF SiCl4 and HBr Gas Cabinet and PLC Upgrade

NB6871000-20-XXXXX

1. Background Information:

a. NIST-Boulder has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is equipment that uses the process gasses Silicon Tetrachloride (SiCl4) and Hydrogen Bromide (HBr). These are toxic gasses and need to be stored in and delivered to tools through a specialized gas cabinet. Recently, the BMF had a failure in a gasket that cause an HBr leak that destroyed its existing cabinet used for SiCl4 and HBr. The Government requires a new cabinet that is drop-in compatible with existing life safety equipment, such as the toxic gas monitoring system, to continue to use SiCl4 and HBr as process gasses. Additionally, the Government has 7 additional gas cabinets with Programmable Logic Controller (PLC) systems that have become end of life and need to be replaced.

2. Scope of Work:

a. Objectives:

i. The goal of this contract is to provide and commission a SiCl4 and HBr gas cabinet that is drop-in compatible with the Government’s existing cabinet and upgrade the Programmable Logic Controller (PLC) systems of the Government’s existing gas cabinets.

b. General:

i. The contractor shall:

1. Provide personnel that pass required government background checks to be issued badges for work on site.

2. Provide a bid proposal which details all planned materials, consumables, travel, labor, equipment, and expenses.

ii. Specifications for the Work:

1. All staff from selected vendor must be badged by NIST Security. No one may enter the site without a badge.

2. The work shall be scheduled with the TPOC prior to arrival to do the work.

c. Specific Requirements:

i. The contractor shall provide the Government with a toxic gas cabinet that is drop-in compatible with the Governments existing SDC CiphercoNTM 1500 Gas Cabinet:

1. Model Number 103182A

2. Serial Number SO3359-02

ii. System Requirements:

1. The new cabinet shall:

a. Be able to be incorporated into the Government’s existing toxic gas monitoring system without reprograming the system.

b. Include the most recent PLC system.

c. Be able to be repaired using spare parts from the Government’s existing stock of spare parts for a SDC CiphercoNTM 1500 cabinet.

d. Be constructed of materials that are compatible for use with SiCl4 and HBr.

e. Meet all applicable code for delivering SiCl4 and HBr such as SEMI S2 and/or CE safety standards.

f. Be able to deliver Ultra High Purity (UHP) SiCl4 and HBr to process tools in a manner that is consistent with semiconductor industry standards.

g. Have an automated two independent delivery systems with a shared external purge.

i. The first independent delivery system shall be able to deliver SiCl4

ii. The second independent delivery system shall be able to deliver HBr.

iii. Both delivery systems shall have:

1. A vent trickle purge

2. Outlet Filter

3. A cylinder Shelf

h. Have a Z-purge system.

i. Be able to deliver both SiCl4 and HBr independently to the same specifications as the Government’s existing SDC CiphercoNTM 1500 Gas Cabinet, Model Number 103182A, Serial Number SO3359-02.

j. The nitrogen purge cylinder shall not be incorporated into the interior of the gas cabinet and will be installed by the government outside the gas cabinet.

iii. PLC Upgrade:

1. The contractor shall provide an updated PLC for the Governments existing gas cabinets to bring them up to the most recent OEM standards. The Government’s existing cabinets have the following serial numbers:

a. Cl2/BCl3 SN:SO3359-01

b. SiH2Cl2 SN:SO3594-03

c. NH3 SN:SO3594-02

d. H2 SN:SO3595-01 / SN:SO3595-01 UV/IR

e. 10 % SiH4 in Ar SN: SO3594-01

f. Unused H2 SN:SO3595-02

g. Unused NH3 SN:SO3595-03

2. The PLC upgrade service shall include all items required to perform the upgrade including, but not limited to parts, labor, and travel.

iv. Delivery and Installation:

1. The contractor shall be responsible for delivering the gas cabinet to the Government. After the cabinet is delivered, the Government will then be able to facilitize the system for a period between system delivery and site commissioning. This time period shall be at least 1 month and will not exceed 3 months, and the actual time period will be agreed upon between the Government and the contractor. If facilitization occurs faster than the agreed upon time period, then the contractor may start the commissioning on a date that is mutually agreeable between the Government and the contractor.

v. Commissioning and acceptance:

1. After the cabinet is facilitized, the contractor shall commission the cabinet using a standard site acceptance test. The system will be accepted by the Government after the system passes the site acceptance test.

2. The contractor shall be responsible for upgrading the PLC systems of the Government’s existing gas cabinets. After the upgrades, the Government’s existing gas cabinets shall perform to OEM specifications or better.

3. The contractor shall be responsible for all travel expenses.

vi. Training:

1. After acceptance of the new gas cabinet, the contractor shall provide up to 4 hours of on-site training for the new gas cabinets.

2. After acceptance of the new PLC systems, the contractor shall provide training on the new PLC systems.

vii. Deliverables:

1. After award of contract, the contractor shall supply a schedule for when the required work will be performed. The contractor shall provide status updates to the Government on a mutually agreed upon time schedule.

2. Supply the initial installation manual, utility requirements, and a diagram showing the tool footprint and measurements along with bid.

3. The contractor shall supply the final installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of system shipment.

4. Within one week of the completion of the work, the contractor shall provide the COR a report of:

a. the work done,

b. the results of the acceptance test,

c. any issues identified.

viii. Warranty:

1. The contractor shall supply a one-year warranty on all parts and labor.

3. Period of Performance:

a. One year ARO.

4. Place of Performance:

a. All work shall be performed at the 325 Broadway, Boulder, Colorado location.

b. Access to Building 81 shall be granted to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel will be the sole responsibility of the contractor.

5. Government Furnished Property:

a. N/A

6. Deliverables

a. Within one week of each service visit, the contractor shall provide a report detailing all of the services that are performed.

7. Attachments:

a. N/A

8. Performance Requirement Summary

Indicators

Level Surveillance Method

9. Travel:

a. The contractor shall cover all travel expenses.

10. Contractor Supplied Materials

a. The contractor shall supply the Government with a SiCl4 and HBr cabinet and PLC upgrades that meets the requirements in section 2.

11. Contractor’s Minimum Qualifications

a. The contractor shall:

i. Provide personnel that pass required government background checks to be issued badges for work on site.

12. Confidentiality:

a. The information developed under this contract is the property of the U.S. Government and shall be kept in strict confidence.

Contracting Officer’s Representative: Peter Lowell