SOW updated 3.202352.docx

Statement of Work for Vacuum Pump Rebuild Services IDIQ

BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST) proposes to acquire vacuum pump rebuild services for a collection of vacuum pumps that serve a variety of nanofabrication equipment in support of nanofabrication research and development in the Boulder Microfabrication Facility (BMF) and the Nanofabrication facility on the NIST Gaithersburg, MD campus. The Boulder and Gaithersburg facilities have periodic vacuum pump failures that render the vacuum pump unable to support the connected equipment. In most cases, the failure can be repaired. Both facilities seek contractors that can provide competitive vacuum pump rebuild services.

REQUIREMENTS

NIST has a variety of vacuum pumps that need to be repaired as described in Attachment 1. Table 1 has the part number and serial number of each pump that is required to be repaired.

1. The Government will ship their vacuum pumps to the contractor for repair.

2. The contractor shall perform their standard vacuum pump rebuild which includes all parts and labor for each listed vacuum pump. NIST’s expectation of a standard vacuum pump rebuild shall return the pumps to proper working order and shall include, but is not limited to, the items listed below for each pump type:

Turbo Pump Standard rebuild with parts and labor including full disassembly, cleaning, replacement of all consumable parts such as seals, o-rings, bearings, etc., refill oil, balance, test, and leak check.

Dry Pump Standard rebuild with parts and labor including full disassembly, cleaning, replacement of all consumable parts such as gaskets, o-rings, bearings, springs, etc., test and leak check.

Scroll Pump Standard rebuild with parts and labor including full disassembly, cleaning, replacement of all consumable parts such as tip seals, pump seals, bearings, etc., test and leak check.

Cryo Pump Standard rebuild with parts and labor including full disassembly, cleaning, replacement of all consumable parts such as o-rings, seals, valves, bearings, 15K array, 80K array, etc., test and leak check.

Equipment must be repaired in a way that returns them to proper working order and must be accomplished using OEM parts.

3. Following repair, the vacuum pumps shall be tested, and the repair documented. Through testing and documentation, the contractor shall demonstrate that the rebuilt pumps meet or exceed OEM specifications.

4. All repairs and testing shall be completed within the standard repair lead time of 90 days after receipt of a task order.

5. The vacuum pumps shall be returned to NIST with the testing and repair report attached to the pumps. Delivery to NIST can be made by common carrier or in-person.

6. If the contractor will use sub-contractors to perform all or part of the requirements of this contract, they shall identify each sub-contractor.

DELIVERY

For each vacuum pump the contractor is responsible for the following deliverables:

1. Make repairs included in a standard vacuum pump repair and perform testing within the standard repair lead time of 90 days ARO.

2. Provide test and repair report with each vacuum pump.

3. If enclosed in a crate or other packaging, clearly label the outside of the packaging to identify which pump is enclosed.

4. Return vacuum pump(s) to the NIST Boulder and NIST Gaithersburg. Each item to be repaired will indicate whether its return shipping location is Boulder, CO or Gaithersburg, MD

WARRANTY: All pumps shall have a minimum warranty of at least one year.

Table 1 PARTS INFORMATION

Attachment 1 Pumps to Repair The contractor shall repair the following vacuum pumps Boulder, CO Location:

1. CTI 8 Cryopump

a. Part Number: 8116289G002

b. Serial Number: 1710CHE11636

2. CTI 8 Cryopump

a. Part Number: 8033083

b. Serial Number: 1710CHE11546

3. CTI 8 Cryopump

a. Part Number: 8033083

b. Serial Number: I05379318

4. CTI 8200 Compressor required for CTI OnBoard 8 Cryopump

a. Part Number: 8032550G002

b. Serial Number: 1711MON10044

5. Adixen ACP 28

a. Part Number: AC654214

b. Serial Number: EMD08111853

6. Edwards iH80

a. Part Number: A590-00-945

b. Serial Number: 139340676

7. Edwards iH80

a. Part Number: A533-81-945

b. Serial Number: 006422371

8. Edwards nXDS 10i (newer model of Edwards XDS 10)

a. Part Number: A73601983

b. Serial Number: 180556585

9. Edwards XDS 10

a. Part Number: A726-01-903

b. Serial Number: 086380752

10. Edwards XDS 10

a. Part Number: A726-01-906

b. Serial Number: 139493681

11. Edwards XDS 10

a. Part Number: A726-01-906

b. Serial Number: 119485780

12. Adixen ATP 80 turbo controller (ACT 200 T)

a. Part Number: ACT 200 T

b. Serial Number: 96426B

The contractor shall repair the following vacuum pumps Gaithersburg, MD Location:

1. Edwards iH1000 MK5

a. Part Number: iH1000

b. Serial Number:170124892 , 170123544

2. Edwards iH600

a. Part Number:

b. Serial Number:139336973

3. Edwards iH80 MK5

a. Part Number:

b. Serial Number:139341260

4. Adixen ACP28G

a. Part Number:

b. Serial Number:AC668356

5. Edwards nXDS6i

a. Part Number:

b. Serial Number:180574894, 149587763

6. Scrollvac SC30D

a. Part Number:

b. Serial Number:KL623C