SOW_rev2023-12-12_UV PL system v2.docx

STATEMENT OF WORK

[Ultraviolet spectroscopic microscope for photoluminescence imaging] [Requesting Lab/Division: Engineering Laboratory Div 732]

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

Investigating how defects are formed and propagated in semiconductor materials is important to understanding their properties and the failure mechanisms in vital semiconductor components such as transistors and diodes. Photoluminescence (PL) spectroscopy is a powerful technique for studying defects and impurities in semiconductor materials. In addition to spectral information, spatial information with high resolution can provide valuable information about the distribution of defects throughout the active material structure. The system sought here is a PL imaging system that provides both spectral and spatial information across the semiconductor sample. Furthermore, since the primary focus of this work is on wide bandgap semiconductors, light excitation, and detection both in the ultraviolet (UV) regime is required. Therefore, the requested system is a UV spectroscopic microscope that offers a high spatial resolution and has a scanning stage to map the PL response over a given area and construct an image of the PL response from the investigated material. The requested system is a tabletop equipment and does not require any facilities-related work in the laboratory.

II. SCOPE

The goal of this contract is to procure an ultraviolet spectroscopic microscope for photoluminescence imaging in the Heat Transfer and Alternative Energy Systems Group in Division 732.

The Contractor shall deliver a quantity of (1) UV spectroscopic microscope for photoluminescence imaging system inclusive of FOB Destination delivery, installation, warranty and training.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: The Contractor shall provide a quantity of one (1) UV spectroscopic microscope for photoluminescence imaging meeting the following minimum specifications:

Quantity: 1 A. Technical Specifications

1. A microscope system that is optically configured for photoluminescence scanning measurements using two UV laser excitation sources as outlined in (2) and (3) and a spectrometer as described in (4).

2. The above microscope shall come with one laser source with emission wavelength longer than 340 nm but shorter than 355 nm AND with at least 15 mW of power and necessary optics for photoluminescence measurements. A 349-nm laser source is desired for this requirement.

3. The above microscope shall come with one 266 nm laser source with at least 5 mW of power and necessary optics for photoluminescence measurements.

4. The above microscope shall be equipped with one spectrometer configured for spectral measurements in the range 200-750 nm or wider, with a spectral resolution of 2 nm or lower.

5. The microscope shall be supplied with one (1) high magnification objective such as a 50x objective and one (1) low magnification objective such as a 15x objective.

6. The system shall be supplied with a XY sample scanning stage with at least a 10 mm travel range and repeatability of 50 nm or lower.

7. The system shall come with an objective Z scanner with an autofocus to ensure that the laser spot shall remain in focus during the sample xy scan.

8. Major functions of the system such as xy sample scanning and spectrum acquisition shall be computer-controlled and automated and a computer shall be provided with the system.

9. An analysis software shall be included with the system, capable of processing and plotting image files, performing peak-fitting, plotting spectral data from various sample locations and other data manipulation capabilities.

10. The electrical power requirements shall allow for use of the system with electrical outlets that provide 120 V/60 Hz.

11. The contractor shall offer the technical staff member onsite installation and training for a period of at least one day.

IV. DELIVERABLES

V. PLACE OF PERFORMANCE

The requested system will be built and tested at the Contractor’s facility. Then, the system will be shipped to: NIST, 100 Bureau Drive, Gaithersburg, MD 20899. Building 226-room B313 and will be installed and tested for the final performance evaluation.

VI. PERIOD OF PERFORMANCE/LEAD TIME

The period of performance will take approximately 12 weeks ARO.

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: Behrang Hamadani, Building 226, Room B106 Gaithersburg, MD 20899

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***

VIII. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 5 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 226.) All installation requirements are identified below:

IX. TRAINING

The contractor shall conduct training session for up to two users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8 am to 5 pm immediately after installation and demonstration of specifications and must be completed no later than 3 days after installation.

X. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

The installed system shall demonstrate the following at the minimum:

1. Photoluminescence spectra from several regions of an unfinished gallium nitride (GaN) or silicon carbide (SiC) wafer or device stack, showing the luminescence emission peaks in the spectra range 360 nm to 750 nm with satisfactory signal to noise ratios.

2. XY scanning performed on the aforementioned sample and constructing an image of the measured luminescence signal.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within five (5) working days of the receipt and installation of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XI. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

· Repair or replacement of broken parts due to no fault of the end user.

· Technical support with hardware or software reinstallations after the repair has been completed.

XII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIII. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XIV. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XV. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, (revise as applicable 8:00 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

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