SOW for 4 inch Verifire.docx

PR # ZYGO 4in VeriFire MST with DynaPhase for 24in Beam Expander

Statement for Work for a Zygo 4 inch VeriFire interferometer to replace the existing 4 inch VeriFire that has failed.

This Verifire 4 inch interferometer is a direct replacement unit for our current VeriFire interferometer that is no longer working, and is no longer supported by Zygo. It is no longer supported due to out dated software and hardware internal to the machine. We have made numerous attempt to replace with other manufacturer’s interferometers, but we have never been able to get the 24 inch beam expander to align to those systems. Zygo’s VeriFire has been the only one capable of achieving the alignment needed to expand the beam to 24 inches. This interferometer is vital for our optical work. This set up give us the data required to verify the specifications of the wavefront of each optic up to 24inches in diameter as specified on the drawings. This 24 inch system is used for all projects and in house fabrication of optics up to 24 inches.

Specification for the 4-inch VeriFire MST+ Interferometer System.

4-inch VeriFire MST+ Interferometer System For the simultaneous measurement of multiple surfaces on the same sample, including flatness (both sides), optical thickness, wedge, and homogeneity Operating Modes:

FTPSI

Wavelength Shifting PSI Wavelength Shifting QPSI Advanced Technology Coherent Noise Reduction System (RoF) Wavelength shifting Red Diode Laser, 632.8 nm Wavelength monitor and feedback circuit Phase measuring through wavelength shifting Camera and special optics for high slope resolution 1.2K X 1.2K digital CCD Discreet Zoom turret with 1X, 1.7X and 3X zoom tubes.

Aperture focus: -800 mm to +1200 mm, ENCODED ZYGO QFAS Fringe Acquisition System CAN control electronics, hand-held remote control 1-year warranty on parts and labor Latest DELL OptiPlex PC MX software running in Windows 10 64-bit Table mounting kit, enables mounting of interferometer to optical tables.

1 9000-2001-02 DynaPhase dynamic acquisition option for Verifire, Verifire HD, Verifire HDX and IR systems (1.053um, 1.064um, 1.55um, 3.39um).

1 Service One day of installation and certification 1 Training One day of training