SOW.pdf

STATEMENT OF WORK

Title: Photonic probe station

Lab: PML/CHIPS

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.ௗ

The CHIPS Metrology Program at NIST advances metrology for accelerating R&D and for developing breakthroughs that support the development of the next-generation microelectronics and ensure the competitiveness and leadership of the United States.

The Microsystems and Nanotechnology Division develops micro-/nano-fabrication technologies, devices and novel measurement methods enabled by integrated microsystems.

II. PURPOSE

The National Institute of Standards and Technology (NIST) CHIPS metrology program has a requirement for a photonic probe station to develop advanced measurement methods and test structures for integrated photonics manufacturing. The need is for automated and flexible electro-optic probing of multiple photonic test structures at die level in a research laboratory environment. Custom photonic measurements will include swept wavelength spectroscopy and measuring time and frequency domain response to modulated optical and electrical stimuli.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Photonic probe station for die level integrated photonic and optoelectronic device testing.

Quantity: 1 Technical Specifications:

1. Physical

1.1. Die mounting

1.1.1. Reconfigurable for any die sizes at between 3 mm x 3 mm or smaller and at least

20 mm x 20 mm or larger, held by vacuum ports

1.1.2. Tip, tilt and z rotation over at least +/- 5 degrees; Z rotation motorized

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1.1.3. At least one linear translation of at least +/- 6 mm

1.1.4. Integrated temperature measurement and control within the range of at least 25

C to 50 C

1.2. Two positioners with 6 degrees of freedom for fiber optical probing of die

1.2.1. Reconfigurable for edge and top surface coupling

1.2.2. Reconfigurable for individual fiber, lensed fiber or fiber array with lateral size range from 3.8 mm to at least 15 mm.

1.2.3. Motorized translation with at least 50 mm, 25 mm and 12 mm of travel for X, Y, Z respectively (X is the die optical coupling edge axis)

1.2.4. At least +/- 5 degree rotation range on each axis with at least Y rotation motorized

1.2.5. Capable of fully automatic fiber, lensed fiber and fiber array to chip optical active alignment

1.3. RF and DC electrical probing

1.3.1. One electrical probe positioner for industry standard RF/DC wedges

1.3.2. Fully motorized X, Y and Z translation range of at least 25 mm

1.3.3. Y and Z rotation at least +/-1 degree

1.3.4. Contact sensor interface, ability to automate contact

2. Visual optical observation

2.1. Real-time video and photography of top-down and angle views

2.2. Variable magnification with field of view between 12 mm and 1 mm

2.3. XY translation and focus adjustment to access the full die at the highest magnification

2.4. Appropriate illumination, including coaxial for the top-down camera

3. Electrical measurement and control

3.1. Computerized control of all motorized degrees of freedom with appropriate resolutions

3.2. Sample temperature control, including maintaining and sweeping temperature

3.3. Automated touchdown of the DC and RF probes

3.4. Electrical source measure units with at least 16 channels, each capable of sourcing both I and V as selected by the user

4. Optical measurement automation

4.1. Low loss single mode operation between 1260 nm and 1625 nm.

4.2. A visible (red) laser that can be automatically multiplexed into input fiber(s) for visual prealignment

4.3. Two 1x8 switches for single mode (not polarization maintaining) fiber switching between multiple fibers, such as for selecting different device inputs and outputs for testing.

4.4. At least one optical power detector useable for active alignment.

5. Computerized test automation

5.1. Software environment enabling creation of flexible automated custom measurement sequences, including

5.1.1. vendor-defined routines for automated sequential active alignment and coupling to and electrooptical testing of multiple photonic devices with pre-specified input locations

5.1.2. automated user-defined optical and electrooptic measurement protocols

5.1.3. ability to interface with external swept and tunable lasers, source measure units, power meters and RF test equipment using APIs provided by instrument manufacturers

5.2. probe station remote control by ethernet or equivalent with all relevant software control or API drivers (e.g. vial Labview, Python or Matlab) provided

5.3. A suitable PC with Windows OS

6. Dust cover enclosure

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7. The following are options to go with CLIN 0001, options will be chosen at time of award.

Line Item 0002: OPTIONAL ITEM Description: An additional electrical probe positioner that can be integrated with the probe station in line 1.

Quantity: 1 Technical Specifications: same as (1.3) RF and DC electrical probing, above.

Line Item 0003: OPTIONAL ITEM Description: Software driver instrument 1.

Quantity: 1 Technical Specifications: Implementation of software driver for operating a NIST specified IR detector instrument from the probe station software environment. If necessary, the instrument will be provided on loan by NIST.

Line Item 0004: OPTIONAL ITEM Description: Software driver instrument 2.

Quantity: 1 Technical Specifications: Implementation of software driver for operating a NIST specified polarization synthesizer instrument from the probe station software environment. If necessary, the instrument will be provided on loan by NIST.

Line Item 0005: OPTIONAL ITEM Description: Software driver instrument 3.

Quantity: 1 Technical Specifications: Implementation of software driver for operating a NIST specified instrument from the probe station software environment. If necessary, the instrument will be provided on loan by NIST.

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Probe station delivery

20 Weeks

ARO

NIST Gaithersburg

2 On-site installation and training

Two weeks upon delivery

NIST Gaithersburg

3 Optional items:

Electrical probe positioner

1 TBD at time of award

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the

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Contractor Point of Contact (POC) within 1 week of on-site installation and training and 1 week of Option 1 receipt by NIST.

PLACE OF PERFORMANCE

Delivery: NIST Gaithersburg Installation: NIST designated laboratory at NIST Gaithersburg

Installation and training to be performed on site during regular business hours.

Regular business hours are Monday through Friday, 9:00 am to 6:00 pm Eastern Time, excluding Federal holidays and NIST closures.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O POC Vladimir Aksyuk Bldg 216 A127

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 2 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 216.

VII. TRAINING

The contractor shall conduct training session for up to 3 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9:00 am to 6:00 pm Eastern Time immediately after installation and demonstration of specifications and must be completed no later than 5 days after installation. The contractor shall supply the initial

5 | P a g e installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 2 working days of installation of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 12 months after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

X. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

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The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171. ௗ

Minimally Acceptable Controls

System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

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Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.