SOW.pdf

STATEMENT OF WORK

Title: Confocal Raman Microscope (ACQ0042125)

Lab: Materials Measurement Laboratory/642.03/5.02

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The proposed acquisition will support the CHIPS Act Grand Challenge 5: Modeling and Simulating Semiconductor Manufacturing Processes, specifically the “Electrodeposition of Interconnect Materials and Packaging” project at the National Institute of Standards and Technology (NIST) within the Materials Science and Engineering Division. This procurement aims to acquire a confocal Raman microscope to investigate the mechanisms involved in the deposition processes used in interconnect and packaging manufacturing. By providing detailed insights into these processes, this instrument will enable the optimization of deposition techniques to achieve metallizations, vias, and lines with the precise electronic properties required for advanced semiconductor applications.

II. PURPOSE

The National Institute of Standards and Technology (NIST), Materials Measurement Laboratory, Materials Science and Engineering Division (https://www.nist.gov/mml/materials-science-and-engineering-division), seeks to acquire a confocal Raman microscope spectrometer for advanced interface analysis in computer chip manufacturing. This instrument will enable crucial insights into the electrochemical processes involved in creating microelectronics interconnects, from on-chip metallizations to through-silicon vias for chip stacking and advanced packaging. To better understand how these interconnects are fabricated, particularly in filling complex 3D structures, we need to map local surface chemistry across patterned wafers.

Specifically, the acquisition of a confocal Raman microscope with enhanced spectroscopic capabilities will support research on surfactant-mediated film growth, critical for superconformal filling processes. The technique, known as shell-isolated nanoparticle-enhanced Raman spectroscopy (SHINERS), paired with confocal microscopy, allows precise mapping of surface chemistry on both smooth and patterned surfaces. This purchase requires specific technical capabilities, including plasmonic stimulation, a broad spectral range for detecting chemical fingerprints, real-time temporal resolution, and spatial resolution for mapping chemical events to precise physical features on the specimen. These specifications are essential for advancing Raman spectroscopy and achieving meaningful insights in microelectronics fabrication.

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III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Confocal Raman Microscope Quantity: 1

A. Technical Specifications

a. Lasers

i. System must accommodate at least four lasers with the following installed:

1. ≥ 100 mW, 532 nm or equivalent

2. ≥ 15 mW, 633 nm or equivalent

3. ≥ 90 mW 785 nm or equivalent

ii. Automated laser power control between 100% and 0.01%

iii. Motorized exchange of excitation wavelengths

b. Microscope

i. Objectives

1. At least equipped with 5x, 10x, 50x, 50x LWD (~1 cm working distance), 100x

ii. Motorized xy stage

1. ≤ 1 micron accuracy, minimum step size ≤ 50 nm in XY

2. Z resolution of ≤ 10 nm

iii. Macro accessory for cuvette and free space measurements

1. 90 degree manipulation of laser

iv. Open Platform

1. The system needs an open-frame microscope platform, with the objective turret moving in z rather than the stage to accommodate large electrochemical cells.

v. Real-time focus capabilities

1. The system should enable Fast Auto-focus in video mode which is not making use of a laser in the center of the live video, because it disturbs visualization of small features and might deteriorate fragile samples by local heating or modify photosensitive samples.

vi. Extended Z focus capabilities

1. Z-stack images within the objective field of view in ≤ 20 s.

c. Spectrometer

i. 1” CCD Camera capable of at least 200 nm to 1100 nm range.

ii. At least two automatically controlled gratings near 600 gr/mm and 1800 cm gr/mm

iii. All reflective optics (Czerney-Turner spectrograph)

1. Avoids achromatic aberrations

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iv. A focal length of at least 800 mm to enable a spectral dispersion equal to or better than 0.35 cm⁻¹/pixel for a 633 nm-1 laser and 1800 gr/mm.

v. Half Wave Plates for laser polarization

1. Visible half wave plate with range ≥ (400 nm to 700 nm)

2. NIR half wave plate range ≥ (700 nm to 1100 nm)

vi. Quarter Wave Plates on the laser path

1. Vis range ≥ (400 nm to 700 nm)

2. NIR range ≥ (700 nm to 1100 nm)

vii. Polarization Analyzers/Scramblers

1. VIS/NIR Analyzer 500 nm to 1000 nm or equivalent

2. Fixed scrambler 230 nm to 2500 nm or equivalent

a. Enables complete depolarization of Raman signal

3. Automated motorized plates with ≤ 1° control

4. Internal sample reference for intensity and spectral correction

viii. Ultra-low frequency capability

1. Bandpass and notch filters at 633 nm (or equivalent) for ultra-low frequency measurements ≤ 10 cm-1.

ix. XY piezo scanner capable of laser probing sample areas without moving the stage

1. At 50 x magnification able to probe ≥ 25 µm x 25 µm

2. Able to achieve YZ mapping for sample planes perpendicular to the XY sample stage.

d. Software

i. Z-Stack Stitching and 3D Mapping Stitching: The system must include software capable of Z-stack stitching, allowing the creation of 3D topography maps. The stitching should support nm-scale resolution in the axial (Z) direction. This functionality will enable high-resolution imaging and mapping of large samples with uneven or patterned surfaces.

e. Optional Features:

i. ~30 mW, 405 nm laser or equivalent

ii. ~30 mW, 473 nm laser or equivalent

iii. 100x LWD objective (~ 1 cm working distance or equivalent)

iv. Equivalent ULF filter for the 532 nm laser

v. 300 gr/mm grating

vi. Class 1 microscope enclosure

vii. Raman calibration objective

1. Enabling calibration with sample still under objective turret

viii. Motorized objective turret

B. Installation

a. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash.

b. Demonstrates operation of each laser, ULF filter, polarization features, raman mapping as described in technical specifications.

C. Technical Specifications

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a. At least one day of on-site training, the training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting.

Optional Line Item 0001:

Description: Service Contract Quantity: 1

B. Technical Specifications

a. At least an annual basic service contract including at least 1 preventive maintenance visit and/or emergency service visit.

b. telephone and remote support

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Confocal Raman microscope 1 unit No later than

150 days after awarded

NIST (Gaithersburg)

2 Installation 1 unit No later than 14 days after delivery

NIST (Gaithersburg)

3 Training 1 unit No later than 7 days after installation

NIST (Gaithersburg)

4 Standards of Acceptance Review

1 unit 2 weeks after training

NIST (Gaitherburg)

PLACE OF PERFORMANCE

Work (Installation of the instrument and training) will be performed on the Government site at NIST, Gaithersburg, Maryland. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m. with the exception of Federal holidays and NIST closures

NIST

Building 224/A168 100 Bureau Drive Gaithersburg, MD 20899

Regular Business Hours Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

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PERIOD OF PERFORMANCE

The device will be delivered within 150 days from the date of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology 100 Bureau Drive, Gaithersburg, MD 20899 POC (David Raciti, 224 A168)

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 14 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 224/A168.)

VII. TRAINING

The contractor shall conduct training session for up to (5) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of (8 am to 5 pm) immediately after installation and demonstration of specifications and must be completed no later than 7 days after installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

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Performance Tests:

1. Demonstrate system operation:

a. Use carbon nanotubes to evaluate XY spatial resolution at each laser wavelength.

b. Use suspended graphene to assess Z spatial resolution at each laser wavelength.

c. Demonstrate the best achievable spectral resolution using a single objective and laser combination.

2. Demonstrate both mapping capabilities:

a. Stage scanning.

b. Laser scanning.

3. Neon lamp calibration and instrument response function for each laser wavelength and grating combination (including user-provided 785 nm).

4. Single-layer MoS₂ measurements to demonstrate full polarization control at each laser wavelength.

5. Demonstrate ultra-low frequency cut-off performance for each wavelength/filter combination.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within (7 days) of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

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The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

X. PAYMENT SCHEDULE

The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the COR of fully installed system 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, 8 | P a g e secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL (Remove if not applicable)

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

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Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.