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STATEMENT OF WORK

Title: Motorized positioners Lab: 672.03

BACKGROUND INFORMATION

Advanced semiconductor technology has led to continuous performance improvements in transistors. However, many iterations are needed to obtain optimal performance at millimeter wave frequencies and the yield and reproducibility is incredibly poor. Furthermore, US chip makers are ill-equipped with legacy measurement techniques and underperforming models. The National Institutes of Standards and Technology proposes a robust path to develop and verify high-frequency transistor models: 1) new on-wafer standards and calibration, 2) precision noise measurements for transistor quality assurance, 3) improved large signal characterizations, 4) optimal models tailored to a given technology, and 5) transistor model verification across frequency with key performance indicators.

NIST requires motorized linear translation stages for custom-built automated optical and RF wafer probing systems. These translation stages must have large travel ranges with 20 nm minimum movements for precision automated alignment of probing experiments.

PURPOSE

The required work provides two motorized positioners stages for wafer probing systems. These two motorized stages will be used to characterize high-frequency microelectronic devices under the CHIPS act program in the High Frequency Electronic laboratory, CTL, In Boulder CO.

MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Motorized horizontal linear translation stage Quantity: 1 A. Technical Specifications

a. 75 mm travel or greater

b. 20 nm or smaller guaranteed minimum incremental movement

c. Linear motor drive

d. Crossed-roller bearings

e. Designed to be mounted with the moving platform horizontal

f. Aluminum or steel base and moving platform

g. Maximum centered load of 100 N or greater

h. Integrated optical encoder for incremental or absolute closed loop positioning

i. Optical index mark for homing

j. M6 or M4 threaded holes for mounting probes onto moving platform

k. Dimensions with moving platform centered should not exceed 160 x 160 x 35 mm excluding cables

l. Powered by common (e.g., 12, 24, or 48V) DC power supply

m. Controller, compatible with USB connection to PC, must be included

Line Item 0002:

Description: Motorized vertical linear translation stage Quantity: 1 A. Technical Specifications

a. 20 mm travel or greater

b. 20 nm or smaller guaranteed minimum incremental movement

c. Linear motor drive

d. Crossed-roller bearings

e. Designed to be mounted with the moving platform vertical

f. Aluminum or steel base and moving platform

g. Integrated passive counterbalance for loads up to 15 N or greater

h. Integrated optical encoder for incremental or absolute closed loop positioning

i. Optical index mark for homing

j. M6 or M4 threaded holes for mounting probes onto moving platform

k. Dimensions with moving platform centered should not exceed 200 x 120 x 40 mm excluding cables

l. Powered by common (e.g., 12, 24, or 48V) DC power supply

m. Controller, compatible with USB connection to PC, must be included

SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 10 days. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc

PLACE OF PERFORMANCE

A. NIST Boulder, Building 81-1E121 B. All work shall be performed at the 325 Broadway, Boulder Colorado, 80305 C. The government will provide access to Building 1 to the contractor for the entire period of performance of this contract.

D. Equipment will be delivered to the lab by the contractor.

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, (revise as applicable 8:00 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures. (Add applicable language if applicable)

PERIOD OF PERFORMANCE

The period of performance will take approximately 12 weeks ARO.

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, Colorado 80305 Bryan Bosworth

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Translation stage operation, fulfilling all listed specifications using a commercial PC and microscope system

2. Visual inspection

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

I. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 3 years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

· First year full warrant and return manufacturer

PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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