SOW CHIPS Mass Comparator Final.pdf

STATEMENT OF REQUIREMENTS

Title: Mass Comparator for CHIPS 1.02 - Gas Flow and Properties: Standards and models for flow metering semiconductor gases at flows from 10 μL/min to 1 L/min Requiring Lab: Physical Measurement Laboratory (PML)

I. BACKGROUND INFORMATION

The NIST Sensor Science Division’s (SSD) mission is to advance the next genera on of SI-traceable measurements in dimensional metrology, thermodynamics, op cal radia on, and fluid flow. The Fluid Metrology Group (FMG) maintains standards for realizing gas flow. This procurement supports CHIPS project 1.02 for grand challenge 1, where a main deliverable is a “low” flow standard for semiconductor process gases that will be used to support U.S. manufacturer’s that produce mass flow controllers (MFCs).

The standard will be used to provide physical models for how mass flow controllers behave across various semiconductor gas species. MFCs measure gas quan es that are delivered to reac on chambers for surface deposi on or etching reac ons that produce chips. Therefore, the correct stoichiometry is cri cal to the successful produc on of semiconductor chips. Currently there are no non-commercial labs that provide SI-traceable flow for semiconductor gases.

To develop best-in-the-world gas flow standards, we need to determine the volumes of gas collec on vessels with low uncertainty. We do this by weighing the vessel with a fluid that has a known, low-uncertainty density. Therefore, we need to realize mass with high accuracy through SI-traceable masses and a best-in-the-world mass comparator. To meet our mission, we need to procure a mass comparator from the sole source of Me ler Toledo. Without the acquisi on of this laboratory grade mass comparator, we cannot con nue our mission for SSD or CHIPS.

II. PURPOSE

The purpose of this acquisition is to purchase a 10 kg capacity, 1 mg readability mass comparator of laboratory grade. We are seeking to sole source a Mettler Toledo brand mass comparator to replace our 30+ year old version that has failed and cannot be repaired. The application of this instrument is in the chain of SI-traceable measurements that give the volume of gas collection vessels used in gas flow standards.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items shall be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Mettler Toledo Comparator, Model XPR10003SC Quantity: 1

A. Technical Specifications

a. Must have 10 kg capacity with 1 mg readability (resolution)

b. Repeatability < 2 mg without vibration isolation

c. Temperature drift < 0.0004 % of reading/°C

d. Settling time < 5 s

e. Able to fit a 1.5 ft x 1.5 ft footprint excluding any manufacturer provided draft shields

f. Have a “hanging” hook for weighing objects suspended from the bottom.

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g. Compatible with the Fluid Metrology Group’s existing software for data acquisition

IV. SCHEDULE OF DELIVERABLES

Deliverable Number Description Quantity

Delivery Due Date

Place of Delivery

1 A 10 KG capacity, 1mg readability, laboratory grade mass comparator

Model XPR10003SC

5 weeks after receipt of order.

NIST Gaithersburg Shipping and Receiving Building 301 for receipt, then on to final destination Building

230/Room 129

V. INSPECTION & ACCEPTANCE

The Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

The Government will inspect the delivered equipment to ensure conformance with the requirements of this document and to ensure complete operational functionality when installed.

VI. WARRANTY

The contractor shall warrant the en re system for a period of a minimum of 12 months a er delivery of the equipment. The warranty shall be in accordance with the terms in FAR 52.212-4.