SOW ATLANT_3D 2020.pdf

PR _______________

STATEMENT OF WORK

Procurement of a Custom Spatial Atomic Layer Deposition Thin Film System for Microgravity Verification Manifested on the Blue Origin New Shepard

Flight Opportunity

1. Objective/Requirements The PI, Vivek Dwivedi has been awarded a technology demonstration flight manifested on the Blue Origin New Shepard launch vehicle for a microgravity demonstration of a thin film deposition process called Spatial Atomic Layer Deposition (SALD). In order to demonstrate the flight, the SALD reactor system must be engineered to fit within the Blue Origins single locker specifications per the Blue Origins User Guide.

2. Characteristics, Scope, and Specs

The Spatial Atomic Layer Deposition System will:

Perform a thin film process growing a conformal film of zinc oxide spatially on a 2” Si wafer

Perform a thin film process growing a line of various thicknesses of zinc oxide spatially on a 2” Si wafer

Fit within the specifications of a Blue Origin Single Locker System

Figure 1: Spatial Atomic Layer Deposition System

Figure 1 is the deposition system that will be delivered to GSFC for inclusion within the Blue Origin single payload reactor.

Specifications of the reactor system

The deposition system has to fit the following dimensions:

20.60 inches (53.32 cm) x 16.30 inches (41.40 cm) x 9.56 inches (24.28 cm) – Usable volume 1.84 ft^3 (52 liters)

If the experiment is intended to be lowered down through the top opening of the Locker, then it should fit within the opening of 14.64 inches (37.19 cm) by 18.43 inches (46.81 cm)

Total mass – 11.3 KG - Estimated Maximum power 144 W

The deposition system must grow films of zinc oxide

Figure 2: The deposition system must be able to grow a conformal film similar to this example for 500 cycles on a 2” silicon wafer

Figure 3: The deposition system must be able to grow lines of different widths similar to this example for 1000 cycles on a 2” silicon wafer

3. Place of Performance

NASA, Goddard Space Flight Center, Greenbelt, MD

4. Period of Performance

TBD.