SOW_ALD_GasDeliveryLine.pdf
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- Solicitation number
- N00173-23-Q-0706
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Scope of Work for Gas Delivery Line Installation
1. The Naval Research Laboratory (NRL) has a requirement for the installation of gas delivery lines for semiconductor process and growth equipment.
a. Lesker 150LX Atomic Layer Deposition (ALD) Tool
• ¼” gas line for O2 with isolation valve from purifier panel to tool
• ¼” gas line with isolation valve for Ar to tool
• ¼” gas line for N2 with isolation valve from purifier panel to tool
• ¼” gas line for H2 with isolation valve from closet to tool
2. All fabricated gas lines are to be constructed of new ¼” 316L stainless steel electropolished tubing as is customary for semiconductor process gas lines. Installation must include labels, supports, and hangers as needed. Helium leak test must be performed to an acceptance rate of 1x10-9 atm-cc/s.
3. Warranty and Support: The contractor shall offer the Government at least the same warranty terms, including offers of extended warranties, offered to the general public in customary commercial practice.
N00173-23-Q-SP05
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