SOW 9-8-25.docx

STATEMENT OF WORK

Microwave digital lock-in amplifier Physical Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. The Photonics and Optomechanics Group requires a microwave digital lock-in amplifier for the measurement of photonic test structures that are being developed for characterization of integrated photonic fabrication processes and materials, among several other application. To measure the structure-, fabrication process- and material-dependent information contained in the high frequency responses of these test structures to optical and electrical stimuli, the system must be able to operate at frequencies of at least 1.8 GHz, and be capable of measuring the amplitude and phase of signals at multiple such frequencies and their harmonics simultaneously.

II. PURPOSE

A digital lock-in amplifier is needed to measure the amplitude and phase of radio frequency signals up to 1.8 GHz at multiple frequencies and harmonics simultaneously. This is needed for the project objective of characterizing integrated photonic fabrication processes and materials using custom photonic test structures. This objective addresses a key metrology need in integrated photonics industry, an integral part of modern semiconductor ecosystem. The new metrology capability will allow foundries to better understand and to rapidly improve their manufacturing processes and provide photonic chip designers accurate information, decreasing the development time and cost for new integrated photonics-based products for communications, computing and sensing.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Microwave digital lock-in amplifier Quantity: 1

A. Technical Specifications

1. Number of independent lock-in channels: 2

2. Frequency range: DC to 1.8 GHz or greater

3. Lock-in input maximum analog-to-digital conversion (ADC) rate: ≥ 4 GSa/s

4. Lock-in input ADC resolution: ≥ 14-bit

5. Lock-in input voltage range: ≤ 10 mV to ≥ 1 V

6. Lock-in input voltage noise: ≤ 10 nV/rt-Hz

7. Dynamic reserve: ≥ 100 dB

8. Output signal frequency range: DC to 1.8 GHz or greater

9. Output signal maximum digital-to-analog conversion (DAC) rate: ≥ 6 GSa/s

10. Output signal DAC resolution: ≥ 14-bit

11. Output signal voltage range: ≤ 10 mV to ≥ 0.5 V

12. Input and output signal connectors: Lock-in input connector: SMA or 2.92 mm, 50 ohm

13. Number of dual-phase demodulators: ≥ 8

14. Demodulator filter slope: selectable from ≤ 1 Hz to ≥ 10 MHz

15. Demodulator filter slope: selectable from 6 to 24 db/octave

16. Frequency reference resolution: 50 microHz

17. Auxiliary signals: 4 output channels, 2 input channels

18. Auxiliary output channel specification: ≥ 14 bit, ≥ 50 MSa/s

19. Auxiliary input channel specification: ≥ 14 bit, ≥ 4 GSa/s

20. Internal clock short term stability: ≤ 0.05 ppm deviation

21. Software: Ability to automatically and fully control the instrument from a windows 11 PC including setting up all modes, acquiring data, transferring and storing the data on the PC in an open format.

22. Computer interface: USB 3.0 and Gigabit Ethernet

23. Line power: 120 V AC, 60 Hz

Line Item 0002:

Inclusion of simultaneous multifrequency operation Quantity: 1

1. At least 6 additional frequencies for synchronous lock-in measurements, and amplitude and frequency modulation analysis with same specifications as the base.

Line Item 0003: OPTION 1 Inclusion of proportional-integral-derivative (PID) controllers and phase-locked loop (PLL) operation.

Quantity: 1

1. Number of independent PID channels: ≥ 4

2. Maximum PID bandwidth: ≥ 1 MHz

3. Input parameters: X, Y, R and Theta outputs of lock-in amplifier and auxiliary inputs

Line Item 0004: OPTION 2 Inclusion of signal modulation and analysis operation.

Quantity: 1

1. Two independent AM/FM (amplitude/frequency) modulation units with 3 frequency components each

2. Simultaneous sideband modulation and demodulation

3. Harmonic sideband analysis

IV. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur within four months of placement of the order.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ POC/COR (Jason Gorman, Bldg. 220)

V. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Test:

A simple verification of lock-in detection will be implemented. The internal reference signal at a frequency of 1 GHz will be applied to the input connector and the amplitude and phase measured by lock-in detection will be confirmed to be the same as that set for the reference signal.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VI. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 12 months after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following all parts and labor associated with repair or replacement of defective components.

VII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after acceptance by the POC, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

2 | Page image1.jpeg