Draft_SOW_Pulse_Extreme-_UV_Light_Source.pdf

PULSED EXTREME-ULTRAVIOLET LIGHT SOURCE

STATEMENT OF WORK

(Sources Sought)

The Applied Physics Division has a program to develop an Extreme Atom Probe Tomography (X-APT) tool. This tool uses a pulsed extreme ultraviolet light source to illuminate a specimen surface in the presence of a strong DC electric field. This process enables quantitative three-dimensional (3D) chemical composition analysis in a manner analogous to techniques encountered with conventional laser-assisted atom probe tomography.

The contractor shall furnish the necessary personnel, material, equipment, and services to fabricate, install and test one complete pulsed extreme ultraviolet (EUV) coherent light source to be used for applications in X-APT. The complete system must be fully integrated, serviced and warrantied by the single offeror.

Technical specifications:

• The pulsed light source must produce extreme-UV (EUV) photons anywhere in the range of 10 – 90 eV, with pulse duration below 10 ps.

• The EUV beam should contain pointing stabilization either in the EUV generating beam or in the EUV beamline itself. Please include the light source’s RMS pointing stability.

• The monochromatic EUV flux (at the source) should be in the vicinity of 1012 photons per second at the minimum repetition rate 10 kHz. In this context, and as an example, “monochromatic” means 45 eV +/- 2 eV. The maximum specified repetition rate at an EUV photon energy of 45 eV must be at least 25 - 30 kHz.

• EUV Flux stability better than 5% RMS over 8 hours after warmup.

• Must include an evacuated beamline with required filters, apertures, mirrors or focusing optics, and alignment features to produce a focused monochromatic or broadband EUV beam at the end of the beamline. This beamline may include: diffraction grating and appropriate CCD x-ray camera for optimization of the EUV beam and diagnostics. This includes all necessary electronics and software needed to operate the CCD camera and display the real time image.

• System must fit, and operate within specifications, when installed on an optical table with approximate dimensions of 5’ wide, × 12’ long.