Attachment_1_-_Statement_of_Work.pdf

Statement of Work: Electron Beam Lithography System Attachment for a JEOL

JSM 7800F FESEM

BACKGROUND INFORMATION

The National Institute of Standards & Technology (NIST) requires an Electron Beam Lithography (EBL) system attachment for a JEOL JSM 7800F FESEM to support nanofabrication research and development in the Center for Nanoscale Science and Technology (CNST) NanoFab User Facility. The system will be sited and used as a shared resource in the CNST NanoFab, accessible to researchers from industry, academia, NIST, and other government agencies. Nanoscale lithographic patterning is an essential capability for the NanoFab. There are two direct write EBL systems and one FIB-SEM with EBL capabilities currently housed at the NanoFab User Facility. The FIB-SEM EBL system is a Zeiss NVision 40 Cross Beam microscope with a Raith ELPHY Quantum EBL attachment that is 10+ years old. NIST intends to retire this system and replace it with a new EBL attachment, which will be mounted on an existing JEOL 7800F FESEM, because this capability is essential to a number of NanoFab projects.

GENERAL DESCRIPTION

Electron-beam lithography is a technique where a beam of electrons is used to expose a pattern over a substrate which has been coated with an electron sensitive material. This technique is used to create nanoscale-level structures that can be transferred to the substrate material in order to build nanoscale devices. The SEM-EBL system is a unique capability in the NanoFab as it provides the ability to place nanoscale patterns at specific areas of a sample by using both the imaging (SEM) and writing (EBL) modes in one tool. This capability is essential to a number of NanoFab projects which rely on the ability to image and pattern specific areas such as graphene measurement research.

MINIMUM SPECIFICATIONS

The system shall meet or exceed the minimum requirements identified below. All items must be new.

Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide a quantity of one (1) Electron Beam Lithography (EBL) system attachment that meets the following minimum specifications:

1. GENERAL

a. The EBL system attachment must be installed and operated on a JEOL 7800F FESEM.

2. BASIC HARDWARE REQUIREMENTS:

a. Pattern generating hardware with a minimum of 12 MHz pattern writing speed

b. A minimum of 16-bit DACs for mainfield electron beam control

c. Direct connection and interface with a JEOL 7800F FE-SEM with all connecting cables and/or adapters included.

3. SOFTWARE:

a. Operating software with built-in multi-user control allowing separate log-in and use of system

b. Built-in CAD design software allowing import of data formats such as GDS-2, CIF, and DXF.

c. Built-in proximity effect correction software allowing optimum pattern dose distribution.

4. EXTERNAL BEAM BLANKER

a. Beam blanking system that is compatible with a JEOL 7800F FESEM.

b. 12 MHz beam blanking speed or better

c. Beam blanker Driver Electronics - Interface to allow control of the blanking system directly from an automated lithography system

d. JEOL installation of the beam blanker including travel expenses

5. SEM EXTERNAL CONTROL SOFTWARE

a. JEOL SM-77480ESP External Control Software for JSM-7800F SN SM1881001490149, acct#12970

b. JEOL installation including Travel Expenses

6. COMPUTER: To be supplied with system with Windows 7 or newer operating system.

7. MANUALS: All manuals necessary to operate and maintain the system shall be included in both printed and electronic form.

8. DELIVERY and INSTALLATION: Delivery shall be FOB Destination. Delivery and installation of the system in the CNST NanoFab class 100 cleanroom shall be completed in less than 6 months ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 216 Gaithersburg, MD 20899-1640

9. TRAINING: One (1) onsite training session for a group of process engineers required after system installation.

10. SERVICE SUPPORT: Software, application and hardware phone support for the life of the instrument.

11. INSPECTION & ACCEPTANCE: In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

The system shall meet the technical specifications outlined in this SOW no later than 30 days after delivery and installation. Specifically, NIST shall test the EBL system attachment to ensure that it:

A. Demonstrates successful operation of entire system and its subcomponents B. Demonstrates successful lithography by converting and writing a NIST generated CAD file onto a resist coated silicon wafer. Wafer will be etched and examined in SEM for litho-based anomalies and artifacts.

12. WARRANTY:

a. The system shall be provided with a warranty for parts and labor for at least 12 months, to start upon acceptance of the glow discharge system and shall be in accordance with terms in

FAR 52.212-4.

b. The system shall be provided with telephone and email support for troubleshooting.

13. PAYMENT SCHEDULE:

The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of a fully installed system

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed

NOTE: Partial shipments/installation and partial invoices will not be accepted, unless other-wise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.