Chlorine_Etcher_Site_Specific_Data.pdf

Oxford Instruments

Plasma Technology PlasmaPro®100 Cobra

Issue: 01 / December 2017

Facilities Interface Specification www.oxford-instruments.com

©2012. Oxford Instruments Plasma Technology. All rights reserved.

Facilities Interface Specification

PlasmaPro®100 Cobra This page is intentionally blank.

Page ii Template Issue: 01

1.Facilities Interface Specification

1.1 Introduction

This Facilities Interface Specification (FIS) provides the data required to forward plan the facilitisation of the PlasmaPro®100 Cobra tool. It contains SEMI E6-0914 compliant Facilities Data Sheets covering PlasmaPro®100 Cobra system installation and has been written to ensure compliance with all relevant SEMI standards, including but not limited to E6, E76, S10 & S13.

Note The information contained within this manual is accurate at time of placement of order.

1.2 Customer Support

Oxford Instruments Plasma Technology has global customer support that provide a coordinated response to customer’s queries. All queries are recorded on our support database and are dealt with as quickly as possible. If we are not able to answer the query immediately, we will contact you promptly.

Please direct all queries through your nearest support facility (see below), and have the following details available::

You can contact us on the following telephone number:

Tool type PlasmaPro®100 Cobra

Works order number 94-220288

Contact information Your name, the name of your company, and how we can contact you.

Details of your query The nature of your problem, part numbers of spares required, etc.

Oxford Instruments Plasma Technology

US, Canada and Latin America Concord, MA

TOLLFREE: +1 800 447 4717

Template Issue: 01 Page 1

1.3 Preparing the site

The site where the tool is to be located must be surveyed and prepared before the tool is delivered. In particular, ensure that the following issues are resolved before commencing the installation:

• Ensure that the positions and fixing arrangements of all tool components are defined. Make sure that all parts of the tool are considered, including components that are mounted remotely.

• Ensure that the location of the tool allows easy access to the customer supplied isolation devices for all services (the electrical isolator; and the isolation valves for the cooling water, CDA, nitrogen, and process gas supplies).

• Assess loadings on the floor, and on any walls or support structures, to sure they are sufficient to support the weight of the various tool components.

• Make sure that all required safety features, such as gas detection equipment are installed and operational when the tool arrives.

• Make sure that the routing of interconnecting cables and pipework between the various tool components has been properly considered. Pipework or cables must not be routed where personnel are liable to walk or require regular access. Pipework and cabling must not impede access to tool safety features, such as emergency off buttons, circuit breakers or gas shut-off valves.

• Separate AC power cables from low voltage signal cables.

• Make sure the site allows sufficient clearance around all the main tool components (See Data Sheet 300).

• Make sure that the site is well ventilated and allows the free movement of air around the tool. The volume of the room must be at least 9 m3. The room must be ventilated with at least 4 air changes per hour, to keep the oxygen concentration high.

• Make sure that all the services required for tool operation are available and meet the required specifications (see Data Sheets 400-1000).

• Ensure that the procedures, personnel and equipment required for safely connecting the tool services have been planned. It may be necessary to shut down other equipment in the facility in order to connect exhausts, gas lines, water or electrical power to the tool.

• Check that the route, equipment and personnel required for safely transporting the equipment from the loading dock to the installation site are satisfactory.

Care must be taken to consider floor loadings and access along the entire route.

• If the tool is to be installed in a clean room, consider the impact on other equipment and processes in the facility before commencing installation.

1.4 Installation

This section explains how to move the PlasmaPro®100 Cobra tool into position and connect to the customer supplied services.

Template Issue: 01 Page 2

1.4.1 Storage information

The PlasmaPro®100 Cobra is shipped in sealed, evacuated plastic bags within a wooden packing case. The bags contain silica gel to protect the tool from moisture. Store the tool in a facility that meets the following requirements.

• Temperature controlled between 0°C and 50°C (32°F to 122°F).

• A dry area that protects the crates from the weather (rain and dust).

1.4.2 Moving the tool into position

When transporting or moving the tool, ensure that it remains vertical at all times. The base unit can topple if tilted, causing severe injury. The main frame is fitted with wheels for use on flat surfaces.

1.4.3 Removing the tool’s wheels

• Using a suitable spanner, lower the four feet until they support the weight of the frame.

• Remove the four screws that secure each of the two rear wheel assemblies to the frame. Remove the two wheel assemblies (see Figure A-1).

Fig 1 Tool wheels

• Remove the four screws that secure each of the two front wheel assemblies to the frame. Remove the two wheel assemblies.

• Place a spirit level or inclinometer on a horizontal part of the frame and adjust the four feet until the base unit is level.

Template Issue: 01 Page 3

Note The tool is shipped with the process chamber under vacuum, so the chamber lid cannot be opened. During the commissioning process, an OIPT engineer will re-level the tool using the upper surface of the substrate table as the datum point.

• Lock the adjustable feet in place. Recheck that the frame is level.

• Attach the bolt-down brackets to the tool.

• Bolt the tool to the floor with six M10 x 40 mm hexagonal headed screws through the bolt-down brackets.

Note The process module must be bolted to the floor to avoid a safety hazard caused by failure of the turbo pump and if located in a seismic region.

Template Issue: 01 Page 4

Fig 2 Typical System Fixing Positions Template Issue: 01 Page 5

1.5 Data Sheet 100 - Equipment Identification

Data Sheet 100 - Equipment Identification

Data Type Units

A Install Data ID text System Facilities Data

B Install Data Rev. text 01

C Data Rev. date text December 2017

D SEMI Std. text SEMI E6-0914

E Equip. Name text PlasmaPro®100 Cobra

F Equip Model No. text

G Process Type text Plasma Etch

H Wafer Size mm 200

I No. of Equip.

Components

# 6

J Equip.

Comments text

K Supplier Name text Oxford Instruments Plasma Technology

L Supplier Address text North End, Yatton, Bristol, UK.

M Supplier Mail Code text BS49 4AP

N Supplier Phone text +44 (0) 1934 837000

O Admin. Interface Ref.

text N/A

P Customer Name text NIST(USA)

Q Customer PO No. text

R Cust. Equip. ID. text 94-220288

S Cust. Equip. ID.

Serial No.

text N/A Template Issue: 01 Page 6

1.6 Data Sheet 200 - Environmental Conditions

Note It should be noted that the environmental data in the following tables is based on installations carried out at altitudes between sea level and 3000 metres. For installations above 3000 metres specific approval should be sought from OIPT.

Data Sheet 200 - Environmental Conditions (Sheet 1 of 2)

Data Type Units Environmental Conditions

A Element ID. text Cobra Control Rack Loadlock Pump

Chamber Pump

B Max. Distance metre 5 5 5 5

C Min. Cleanroom Spec.

text 1000 1000 1000 1000

D Cleanroom Classification

Standard text Fed Std 209E or ISO 14644

Fed Std 209E or ISO 14644

Fed Std 209E or ISO 14644

Fed Std 209E or ISO 14644

E Target Room Temp.

ºC 20 20 20 20

F Min. Room Temp ºC 15 15 5 5

G Max. Room Temp. ºC 25 25 25 25

H Room Temp.

Fluctuation

º/hr 5 5 5 5

I Heat Loading Idle watts 1500

J Heat Loading Process watts 3500

K Target Room Humidity

% 45 45 45 45

L Min. Room Humidity

% 10 10 10 10

M Max. Room Humidity

% 80 80 80 80

N Humidity Fluctuation

%/hr 10 10 10 10

O Vibration Sensitivity text

P Vibration Generation text

Q Other Vib. Req. text

R Other Conditions text Min. Light Level 300 Lux

Min. Light Level 300 Lux

Min. Light Level 300 Lux

Min. Light Level 300 Lux

S Env. Cond.

Comments text Template Issue: 01 Page 7

A Element ID. text Chiller Gas Pod LN2 ACU Pump Purge

B Max. Distance metre 10 10 10 10

C Min. Cleanroom Spec.

text 1000 1000 1000 1000

D Cleanroom Classification

Standard text Fed Std 209E or ISO 14644

Fed Std 209E or ISO 14644

Fed Std 209E or ISO 14644

Fed Std 209E or ISO 14644

E Target Room Temp.

ºC 20 20 20 20

F Min. Room Temp ºC 5 5 5 5

G Max. Room Temp. ºC 25 25 25 25

H Room Temp.

Fluctuation

º/hr 5 5 5 5

I Heat Loading Idle watts

J Heat Loading Process watts

K Target Humidity % 45 45 45 45

L Min. Humidity % 10 10 10 10

M Max. Humidity % 80 80 80 80

N Humidity Fluctuation

%/hr 10 10 10 10

O Vibration Sensitivity text

P Vibration Generation text

Q Other Vibration Requirement text

R Other Conditions text Min. Light Level 300 Lux

Min. Light Level 300 Lux

Min. Light Level 300 Lux

Min. Light Level 300 Lux

S Env. Cond.

Comments text

Data Sheet 200 - Environmental Conditions (Sheet 2 of 2)

Data Type Units Environmental Conditions Template Issue: 01 Page 8

Fig 3 System Footprint Template Issue: 01 Page 9

1.Data Sheet 300 - Physical Characteristics

Data Sheet 300 - Physical Characteristics (Sheet 1 of 2)

Data Type Units Physical Characteristics

A Element ID. text Cobra Tool Control Rack

Loadlock Pump

Chamber Pump

B Shipping Data Ref. text

C No. of Containers #

D Installation Instructions Ref.

text

E No. of Cleanroom Items

# 1 1 1 1

F Max Move-in Length mm 1749 639 430 742

G Max Move-in Width mm 653 612 281 300

H Max Move-in Height mm 1630 1091 302 395

I Max Move-in Weight kg 636 75 25 120

J ESH Information Ref. text See the Operator Manual

See the Operator Manual

See the

OEM

Manual

See the

OEM

Manual

K Assembled Length mm 1749 639 430 742

L Assembled Width mm 653 612 281 300

M Min. Assembled Height mm 1590 1091 302 395

N Max. Assembled Height mm 1600 1102 302 395

O Assembled Weight kg 616 75 25 120

P Clearance Front mm 1000 1000 1000

Q Clearance Right mm 1000 0 1000 1000

R Clearance Left mm 1000 0 1000 1000

S Clearance Back mm 1000 1000 1000 1000

T Clearance Top mm 1000 1000 1000 1000

U Clearance Bottom mm N/A N/A N/A N/A

V Floor Loading Ref. text Refer to section 1.7.1

Refer to section 1.7.2

Refer to section 1.7.3

Refer to section 1.7.3

W Drawing Refs. text

X Comments text Template Issue: 01 Page 10

A Element ID. text Chiller Gas Pod LN2 ACU Pump Purge

B Shipping Data Ref. text

C No. of Containers #

D Inst. Instructions Ref. text

E No of Cleanroom Items.

# 1 1 1 1

F Max Move-in Length mm 550 650 470 201

G Max Move-in Width mm 465 264 236 185

H Max Move-in Height mm 881 1428 642 70

I Max Move-in Weight kg 90 70

J ESH Info. Ref. text See the

OEM

Manual

See the Operator Manual

See the Operator Manual

See the Operator Manual

K Assembled Length mm 550 650 470 201

L Assembled Width mm 465 264 236 185

M Min. Assembled Height mm 881 1428 642 70

N Max. Assembled Height mm 881 1428 642 70

O Assembled Weight kg 90 70

P Clearance Front mm 1000 1000 1000 500

Q Clearance Right mm 1000 1000 500 0

R Clearance Left mm 1000 0 500 0

S Clearance Back mm 1000 0 0 500

T Clearance Top mm 1000 0 500 500

U Clearance Bottom mm N/A 300 500 N/A

V Floor Loading Ref. text Refer to section 1.7.4

Refer to section 1.7.5

Refer to section 1.7.6

Refer to section 1.7.6

W Drawing Refs. text

X Comments

Data Sheet 300 - Physical Characteristics (Sheet 2 of 2)

Data Type Units Physical Characteristics Template Issue: 01 Page 11

1.6.1 PlasmaPro®100 Cobra Tool Positioning Data

PlasmaPro®100 Tool Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

A (Datum) 0 0 124.8 70

B 1025 -82 163.6 70

C 0 -600 124.8 70

D 1025 -518 163.6 70 Template Issue: 01 Page 12

Fig 4 PlasmaPro®100 Cobra Tool Dimensions Template Issue: 01 Page 13

1.6.2 Control Rack Positioning Data.

Control Rack Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

A (Datum) 0 0 32

B 535 0 32

C 0 -535 32

D 535 -535 32 Template Issue: 01 Page 14

Fig 5 Control Rack Dimensions Template Issue: 01 Page 15

1.7 Pump Positioning Data

Process Module Pump Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

A (Datum) 0 0 37

B 510 0 37

C 0 -334 37

D 510 -334 37

Loadlock Pump Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

A (Datum) 0 0 12

B 224 0 12

C 0 -150 12

D 224 -150 12 Template Issue: 01 Page 16

Fig 6 Pump Dimensions Template Issue: 01 Page 17

1.7.1 Chiller Positioning Data

Chiller Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

No feet for this component. Overall weight 90 kgs.

Template Issue: 01 Page 18

Fig 7 Chiller Dimensions Template Issue: 01 Page 19

1.7.2 Gas Pod Positioning Data.

Gas Pod Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

No feet for this component. Overall maximum weight 70 kgs.

Template Issue: 01 Page 20

Fig 8 Gas Pod Dimensions Template Issue: 01 Page 21

1.7.3 LN2 ACU Positioning Data

LN2 ACU Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

A (Datum)

No feet for this component. Overall weight 35 kgs.B

C

D

Template Issue: 01 Page 22

Fig 9 LN2 ACU Dimensions Template Issue: 01 Page 23

1.7.4 Pump Purge Positioning Data

Pump Purge Box Floor Loading Information

Foot Ref. X (mm)

Y (mm)

Weight (Kg)

Foot Diameter (mm)

A (Datum) 0 0 9

B 115 0 9

C 0 -130 9

D 115 -130 9 Template Issue: 01 Page 24

Fig 10 Pump Purge Box Dimensions Template Issue: 01 Page 25

1.8 Data Sheet 400 - Electrical Power

Note A suitably rated circuit breaker must be installed as part of the electrical supply to the tool before the main circuit breaker on the OIPT supplied electrical rack.

Note The electrical supply cable must be rated to carry more than the tools incoming circuit breaker value in accordance with local electrical rules and regulations. It is the responsibility of the customer to make sure it is suitably rated prior to installation of the tool.

Note The control rack is supplied with five metres of interconnecting cables as standard, which allowing for cable drops, leaves three metres between the rack and other system parts. However, the effective distance between parts may be further reduced to avoid obstructions or if cables are routed via cable trays.

Note An input from a fire alarm system can be linked in to the OIPT EMO circuit if required.

Template Issue: 01 Page 26

Data Sheet 400 - Electrical Power

Data Type Units Electrical Power

A Element ID. text Control Rack

B Connection Number text 401

C Connection Label text XEP100

D Utility Type text Normal Power

E Line Source text Facilities

F Voltage/Phase/ Wire volts 208V 3 Phase, Neutral + Ground (5 wire)

G Frequency Hz 60

H Equipment Component

Connection Type text Isolator

I Interrupting Capacity kA

J MCCB amp 50

J Electrical Connection

Positioning Data text Refer to Fig 11 Template Issue: 01 Page 27

Fig 11 Electrical Connection Point Template Issue: 01 Page 28

1.9 Data Sheet 500 - Water

Data Sheet 500 - Water

Data Type Units Water

A Element ID. text Cobra Tool Chamber Pump

B Connection Number text 501/502 503/504

C Connection Label text WATER IN/

OUT

IN/OUT

D Utility Type text Chilled Water

Chilled Water

E Line Source text Facilities Facilities

F Purity text 100 microns microns

G Contaminants text 30 ppm ph 6- 8

30 ppm ph 6 - 8

H Minimum Pressure kPa 200 200

I Maximum Pressure kPa 300 300

J Max. Pressure Fluctuation kPa 30 30

K Min. Pressure Differential kPa 172

L Avg. Flow Idle lpm 23 1

M Avg Flow Proc. lpm 23 1

N Max. Flow. lpm 23 1

O Max Temperature

ºC 25 25

P Min.

Temperature

ºC 15 15

Q Equip. Comp.

Fitting Size inches 3/4 3/8

R Equip. Comp.

Fitting Matl.

text Stainless Steel

Stainless Steel

S Equip. Comp.

Fitting Type text Barbed NPT

T Drawing Reference text

U Comments text Template Issue: 01 Page 29

Fig 12 Water Connection Points Template Issue: 01 Page 30

1.10 Data Sheet 600 - Bulk Chemicals

Data Sheet 600 - Bulk Chemicals

Data Type Units Chemical Data

A Element ID. text LN2 ACU Cobra Tool

B Connection Number text 601/602 605/606

C Connection Label text LN2

SUPPLY/

EXHAUST

COOLANT

IN/OUT

D Utility Type text LN2 LN2

E Line Source text Facilities 603/604

F Purity text

G Contaminants text

H Min. Pressure KPa 200

I Max. Pressure KPa 300

J Max.Pressure Fluctuation

KPa

K Min. Pressure Differential

KPa

L Idle Avg. Flow lpm

M Process Avg.

Flow lpm

N Max. Flow lpm

O Max. Temp °C

P Equip. Comp.

Fitting Size text 3/8" 3/8"

Q Equip. Comp.

Fitting Matl.

text Stainless Steel

Stainless Steel

R Equip. Comp.

Fitting Type text Double Ferrule

Double Ferrule

S Double Containment

Y/N N N

T Equip. Comp.

Double. Cont.

Size mm N/A N/A

U Equip. Comp.

Double. Cont.

Matl.

text N/A N/A

V Equip. Comp.

Double. Cont.

Type.

text N/A N/A Template Issue: 01 Page 31

W Drawing Refs. text

X Comments text

Data Sheet 600 - Bulk Chemicals

Data Type Units Chemical Data Template Issue: 01 Page 32

Fig 13 Bulk chemicals connection points Template Issue: 01 Page 33

Fig 14 ACU Positioning Details Template Issue: 01 Page 34

1.11 Data Sheet 700 - Drains

No drains are used on the Cobra System; therefore, Data Sheet 700 is not applicable.

Template Issue: 01 Page 35

1.12 Data Sheet 800 - Gases

1.12.1 General Gases

Data Sheet 800 - General Gases

Data Type Units Gas Data

A Element ID. text Cobra Tool

Cobra Tool

Cobra Tool

Cobra Tool

Pump Purge

LN2

ACU

B Connection Number text 801 802 803 804 805 806

C Connection Label text AIR IN PSM AIR

IN

N2 HELIUM IN DRY N2

SUPPLY

D Utility Type text CDA CDA N2 He N2 N2

E Line Source text Facilities Facilities Facilities Facilities Facilities Facilities

F Gas State text Pure Gas

Pure Gas

Pure Gas

Pure Gas

Pure Gas

Pure as

G Purity text CDA CDA 99.99% 99.99% 99.99% 99.99%

H Contaminants text

I Filtration microns 0.3 0.3 2.0 2.0 2.0 2.0

J Min. Pressure KPa 600 600 200 200 200 200

K Max. Pressure KPa 600 600 300 300 300 300

L External Regulator text Not Required

Not Required

Required Required Required Required

M Idle Avg. Flow lpm

N Process Avg.

Flow lpm

O Max. Flow lpm 135 60 10 0.05 4.0

P Equip. Comp.

Fitting Size mm/ inch

10mm 10mm 1/4" 1/4" 10mm 10mm

Q Equip. Comp.

Fitting Matl.

text Plastic Plastic Stainless Steel

Stainless Steel

Plastic Plastic

R Equip. Comp.

Fitting Type text Push Fit Push Fit Double Ferrule

Double Ferrule

Push Fit Push Fit

S Double Containment

Y/N N N N N N N

T Equip. Comp.

Double

Containment Size mm/ inch

N/A N/A N/A N/A N/A N/A Template Issue: 01 Page 36

U Equip. Comp.

Double

Containment Matl.

text N/A N/A N/A N/A N/A N/A

V Equip. Comp.

Double

Containment Type text N/A N/A N/A N/A N/A N/A

W Drawing Refs text

X Comments text

Data Sheet 800 - General Gases

Data Type Units Gas Data Template Issue: 01 Page 37

Fig 15 General Gas Connection Points Template Issue: 01 Page 38

1.12.2 Process Gas Data Sheet

Note OIPT only recommend the use of orbitally welded VCR fittings for all gas line installations from source to gas pod. Only fit correctly rated regulators. It is also recommended a wall-mounted isolation valve, high-flow valve and non-return valve to be fitted in each gas line. Failure to provide this equipment may result in unnecessary delays in the commissioning of the system Gas Data Sheet.

Data Sheet 800 - Process Gas Data Sheet (Sheet 1 of 2)

Data Type Units Process Gas Data

A Element ID. text Gas Pod Gas Pod Gas Pod Gas Pod Gas Pod

B Connection Number text 806 807 808 809 810

C Connection Label text B C l 3 S i C l 4 H B r C l 2 C H 4

D Utility Type text

E Line Source text Facilities Facilities Facilities Facilities Facilities

F Gas State text Pure Gas Pure Gas Pure Gas Pure Gas Pure Gas

G Purity text 99.999% 99.999% 99.999% 99.999% 99.999%

H Contaminants text

I Filtration microns 2.0 2.0 2.0 2.0 2.0

J Min. Pressure KPa 200 200 200 200 200

K Max. Pressure KPa 300 300 300 300 300

L External Regulator text Required Required Required Required Required

M Idle Avg. Flow lpm 0 0 0 0 0

N Process Avg.

Flow lpm Process Dependant

Process Dependant

Process Dependant

Process Dependant

Process Dependant

O Max. Flow lpm 0 . 0 5

P Equip. Comp.

Fitting Size inch 1/4 1/4 1/4 1/4 1/4

Q Equip. Comp.

Fitting Matl.

text 316 Stainless

Steel

Stainless

Steel

Stainless

Steel

Stainless

Steel

Stainless

Steel

R Equip. Comp.

Fitting Type text VCR VCR VCR VCR VCR

S Double Containment

Y/N Y Y Y Y Y

B C l 3 S i C l 4 H B r C l 2 C H 4

0 . 0 5 0 . 0 5 0 . 0 50 . 0 5 Template Issue: 01 Page 39

T Equip. Comp.

Double Cont.

Size inch 1/2

U Equip. Comp.

Double Cont.

Matl.

text Stainless

V Equip. Comp.

Double Cont.

Type text VCR VCR VCR VCR VCR

W Drawing Refs. text

X Comments text

Data Sheet 800 - Process Gas Data Sheet (Sheet 2 of 2)

Data Type Units Process Gas Data

1/2 1/2 1/2 1/2

StainlessStainlessStainlessStainless Template Issue: 01 Page 40

Data Sheet 800 - Process Gas Data Sheet (Sheet 1 of 2)

Data Type Units Process Gas Data

A Element ID. text Gas Pod Gas Pod Gas Pod Gas Pod Gas Pod

B Connection Number text 811 812 813 814 815

C Connection Label text H2 He Ar

D Utility Type text H2 He Ar

E Line Source text Facilities Facilities Facilities

F Gas State text Pure Gas Pure Gas Pure Gas

G Purity text 99.999% 99.999% 99.999%

H Contaminants text

I Filtration microns 2.0 2.0 2.0

J Min. Pressure KPa 200 200 200

K Max. Pressure KPa 300 300 300

L External Regulator text Required Required Required

M Idle Avg. Flow lpm 0 0 0

N Process Avg.

Flow lpm Process Dependant

Process Dependant

Process Dependant

O Max. Flow lpm 0.05 0.2 0.1

P Equip. Comp.

Fitting Size inch 1/4 1/4 1/4

Q Equip. Comp.

Fitting Matl.

text 316 Stainless

Steel

Stainless

Steel

Stainless

Steel

R Equip. Comp.

Fitting Type text VCR VCR VCR

S Double Containment

Y/N N N N

T Equip. Comp.

Double Cont.

Size inch N/A N/A N/A

U Equip. Comp.

Double Cont.

Matl.

text N/A N/A N/A

V Equip. Comp.

Double Cont.

Type text N/A N/A N/A

W Drawing Refs. text

O2

O2

Pure Gas

99.999%

2.0

Required

Process

0.1

1/4

Steel

VCR

N

Stainless

N/A

N/A

N/A

N/A

N/A

N/A

1/4

Stainless

Steel

VCR

N

Required

Process

0.5

2.0

CF4

CF4

Pure Gas

99.999% Template Issue: 01 Page 41

X Comments text

Data Sheet 800 - Process Gas Data Sheet (Sheet 2 of 2)

Data Type Units Process Gas Data Template Issue: 01 Page 42

Data Sheet 800 - Process Gas Data Sheet

Data Type Units Process Gas Data

A Element ID. text Gas Pod Gas Pod Gas Pod Gas Pod Gas Pod

B Connection Number text 816 817

C Connection Label text

D Utility Type text

E Line Source text

F Gas State text

G Purity text

H Contaminants text

I Filtration microns

J Min. Pressure KPa

K Max. Pressure KPa

L External Regulator text

M Idle Avg. Flow lpm

N Process Avg.

Flow lpm

O Max. Flow lpm

P Equip. Comp.

Fitting Size inch

Q Equip. Comp.

Fitting Matl.

text

R Equip. Comp.

Fitting Type text

S Double Containment

Y/N

T Equip. Comp.

Double Cont.

Size inch

U Equip. Comp.

Double Cont.

Matl.

text

V Equip. Comp.

Double Cont.

Type text

W Drawing Refs. text

X Comments text

SF6 N2

SF6 N2

Facilities Facilities

Pure Gas Pure Gas

99.999% 99.999%

2.0 2.0

200 200

300 300

Required Required

0 0

Process Dependant

Process Dependant

0.05 0.1

1/4 1/4

Stainless

Steel

Stainless

Steel

VCR VCR

N N

N/A N/A

N/A N/A

N/A N/A Template Issue: 01 Page 43

Fig 16 Gas connection Points Template Issue: 01 Page 44

1.13 Data Sheet 900 - Vacuum

Data Sheet 900 - Vacuum

Data Type Units Vacuum Connection Data

A Element ID. text Cobra Tool Cobra Tool

B Connection Number text 901 902

C Connection Label text Loadlock Pump

Chamber Pump

D Utility Type text Loadlock Vacuum

Process Vacuum

E Line Source text Loadlock Pump

Chamber Pump

F Vacuum Conveyed

Process Wastes text N/A N/A

G Min. Vacuum Pa

H Max. Vacuum Pa

I Max. Vacuum Fluctuation

Pa

J Max. Flow cmh

K Heating/ Insulating text No No

L Equip. Comp.

Fitting Size mm 25 40

M Equip. Comp.

Fitting Matl.

text Stainless Steel Stainless Steel

N Equip. Comp.

Fitting Type text NW NW

O Drawing Refs. text

P Comments text Template Issue: 01 Page 45

Fig 17 Vacuum Connection Points Template Issue: 01 Page 46

Data Sheet 1000 - Exhaust Data Sheet 1000 - Exhaust

Data Type Units Exhaust Connection Data

A Element ID. text Loadlock Pump

Chamber Pump

Gas Pod

B Connection Number text 1001 1002 1003

C Connection Label text

D Utility Type text Loadlock Pump Exhaust

Process Pump Exhaust

Gas Pod Extraction

E Line Source text Facilities Facilities Facilities

F Process Wastes text N/A Process Dependant

N/A

G Min. Static Pressure

Pa

H Max Static Pressure

Pa Refer to OEM manual

Refer to OEM manual

-375

I Max. Pressure Fluctuation

Pa LEV Dependant

LEV

Dependant

LEV

Dependant

J Avg. Idle Flow cmh

K Avg. Process Flow cmh Refer to OEM manual

Refer to OEM manual

L Max. Temperature ºC Ambient Ambient Ambient

M Equip. Comp.

Fitting Size mm 25 40 100

N Equip. Comp.

Fitting Size Dimension

ID/

OD

O Equip. Comp.

Fitting Matl.

text Stainless Steel Stainless Steel Customer Dependant

P Equip. Comp.

Fitting Type text KF NW Pipe Clamp

Q Flow Loss Coefficient

R External Damper Required

Y/N

S Drawing Refs. text

T Comments text Template Issue: 01 Page 47

Fig 18 Exhaust Connection Points Template Issue: 01 Page 48

1.14 Document History

Issue Draft 27/11/17

Draft issue.

Issue 01 19/12/17 First issue.

Template Issue: 01 Page 49

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GLOSSARY

This glossary explains the acronyms and abbreviations used in this Facilities Interface Specification The entries are presented in alphanumeric order.

Acronyms and abbreviations ACU Automatic Changeover Unit Admin Administrative Avg Average C Centigrade CDA Clean Dry Air (compressed air) cmh cubic metre per hour Comp Component Cond Condition Env Environment Equip Equipment E-Off Emergency off Equip Equipment ESH Environment, Safety and Health Fed Federal FIS Facilities Interface Specification He Helium hr Hour Hz Hertz ID Identification ISO International Organisation for Standardisation kg Kilograms kPa Kilopascal LEV Local Exhaust Ventilation lpm litres per minute Matl Material Max Maximum MCCB Moulded Case Circuit Breaker Min Minimum mm Millimetre MTP Material Transfer Plane N/A Not applicable N No No Number OEM Other equipment manufacturer OIPT Oxford Instruments Plasma Technology Pa Pascal PCW Process Cooling Water ph power of hydrogen PO Purchase Order Proc Process Page 51Template Issue: 01

Ref Reference Rev Revision sccm Standard Cubic Centimetres per Minute SEMI Semiconductors Equipment and Materials International Spec Specification Std Standard TBD To be determined Temp Temperature V Volt VCR A trademark of the Swagelok company. In this manual, the term VCR refers to a vacuum connection system using a metal gasket as the seal Y Yes Page 52 Template Issue: 01