Attachment_1_-_Statement_of_Work.pdf

Attachment 1 - Statement of Work

BACKGROUND

The National Institute of Standards & Technology (NIST) seeks commercial vendors that can provide laboratory support services for the Center for Nanoscale Science and Technology

(CNST) NanoFab cleanroom and laboratories. The NanoFab is a shared resource accessible to researchers from industry, academia, NIST, and other government agencies that provides researchers with rapid access to state-of-the-art, commercial nanoscale measurement and fabrication tools and methods, along with associated technical expertise. It is well equipped to process and characterize a wide range of nanoscale materials, structures, and devices.

The CNST NanoFab consists of a 19,000 sq. ft. cleanroom with 8,000 sq. ft. of class 100 space in building 215, and several other temperature and humidity controlled labs outside of the cleanroom in building 215 and building 216. There are physical and exposure hazards present in most labs and the cleanroom has an NFPA hazard rating of 4-health, 4-flammability, 4-instability.

Minimum Requirements:

These requirements apply to all CLINs under this solicitation.

1. QUALIFICATIONS

a. Vendor

i. Vendor must demonstrate experience providing services for class 100 cleanroom environments in accordance with ISO specification 14644, Cleanrooms and Associated Controlled Environments.

ii. Vendors must demonstrate that they provide their staff with basic safety, chemical safety, and cleanroom protocol training relevant to working in a lab environment and class 100 cleanroom in accordance with the requirements outlined in ISO specification 14644, Cleanrooms and

Associated Controlled Environments.

iii. Vendors must describe their staffing strategy for providing backup that ensures continued, uninterrupted service.

b. Vendor Staff

i. All vendor staff onsite must be able to pass a background security check.

ii. All vendor staff onsite must be able to satisfactorily complete the

NanoFab safety training which consists of online training, a one hour in person safety orientation tour, and passing a quiz.

iii. All vendor staff onsite must be able to satisfactorily complete the vendor required training.

c. The government reserves the right to reject the vendor proposed onsite staff based on the requirements of sections (1.a) and (1.b).

2. REQUIRED SERVICES

a. Schedule

i. The NanoFab core business hours are Monday through Friday from 7 am to 6 pm.

ii. The vendors proposed daily schedule shall fall within this time window.

b. Service and supply each lab per the detailed lab tasks in section 3.

c. Daily

i. Check receiving locations for inventory deliveries, check-in chemicals as needed, stock inventory items to inventory locations.

1. All inventory deliveries to NanoFab must be stocked within two business days of arrival.

a. Move all NanoFab chemicals to NIST Gaithersburg

Campus, Building 215, room D107, check-in using chemical tracking system (training provided by NIST), then store in appropriate cabinets.

b. Non-chemical deliveries shall be unpacked and stocked in appropriate inventory locations within bldg. 215.

c. Promptly dispose of packing materials in assigned areas within bldg. 215 (further information included in NIST provided orientation).

d. Weekly

i. Request chemical waste pickups

1. There is limited space for storing chemical waste. Coordinate with

Technical Point of Contact (TPOC) weekly pickups and if waste starts to build up, request additional pickups.

ii. Service cleanroom garments

1. OUT: Pull down garments from building 215 cleanroom and two labs in building 216, load in transport bin, then take to loading dock for pickup.

2. IN: Take garments from loading dock to cleanroom, stock on shelves, confirm quantity delivered on invoice, take invoice to

COR. Stock locations are in building 215 cleanroom and two labs in building 216.

iii. Inventory all chemicals

1. Perform physical inventory of 50 chemical types located in chemical cabinets in the cleanroom using a bar code scanner. Scan the bar code on the cabinet door, enter quantity in cabinet, scan next. Pick-up and Drop-off of scanner will be with TPOC staff.

iv. Test and date eyewash stations

1. Use rolling eyewash station test rig to test 13 eyewash stations inside of cleanroom and 7 in non-cleanroom areas (further information included in NIST provided orientation).

e. Bi-weekly

i. Inventory user supplies

1. Perform physical inventory of 20 user supplies located in cabinets in cleanroom using the bar code scanner. Scan bar code on the cabinet door, enter quantity in cabinet, scan next. Deliver scanner to TPOC.

ii. Inventory safety supplies

1. Perform physical inventory of 20 safety supplies located in cabinets in cleanroom and storage room behind cleanroom using the bar code scanner. Scan bar code on cabinet door, enter quantity, scan next. Deliver scanner to TPOC.

iii. Inventory lab supplies

1. Perform physical inventory of 25 lab supplies located in cabinets in cleanroom and storage room behind cleanroom using the bar code scanner. Scan bar code on cabinet door, enter quantity, scan next.

Deliver scanner to TPOC.

f. Monthly

i. Perform cleanroom air particle counts

1. Use air particle counter and check each cleanroom lab, center hall way, class 1000 halls, and D106. 17 locations total, particle counter runs unattended. Deliver memory stick to TPOC. Air particle counter is stored inside cleanroom. Training provided by

NIST during orientation.

3. DETAILED LAB TASKS

a. Each lab space has specific tasks that must be performed periodically. The chart below shows the requirements for each lab space and the intervals for service.

D=Daily, W=Weekly, M=Monthly. Detailed descriptions of each task are provided starting in section 3.b. PLEASE NOTE: All items for restocking (Task

#3, a-p) will be provided by NIST.

F re q u en cy

R ef il l g lo v es il l g o w n in g s u p p li

C h ec k a n d e m p ty g en er al u se t ra sh c an s ec k a n d e m p ty s o lv en t tr as h c an s

R ef il l

W ip e s

R ef il l

A ci d W ip il l

P ip et s

C le an a n d r es to ck l ab d is h w ar e

P u ll n ew t ac k y m at r ep la ce i f em p ty ec k a n d r em o v e em p ty /w as te c h em ic al b o tt le s

C h an g e o u t w as te c ap tu re c o n ta in er s

C h an g e o u t o ra n g e ac id g lo v ec k a n d d is p o se

/r ep la ce s h ar p s co n ta in er s

W ip e d o w n s h el v es a n d t ab le s as n ee d ed

V ac u u m o r sw ee p l ab a s n ee d ed

Labs Lab Name

215/A101

JEOL E-Beam

Litho / Zeiss SEM D D M M M

215/A102

Spray Clean /

Contact Litho D D D D D D D W W W M M M

215/A103

Laser Writer /

Contact Litho D D D D D D W W W M M M

215/A104

Cluster Dep / E-beam coat D D D D D D W W W M M M

215/A105 Stepper Litho D D D D D D W W W M M M

215/A106 ALD / Dry Etch D D D M M M

215/A-Class

Class 1000 hallway M M

215/B101

General

Chemistry D D D D D D W W W M M M

215/B102 CMOS Chemistry D D D D D D W W W M M M

215/B103 AFM D D M M M

215/B104 Deposition D D D D D W W W M M M

215/B105 Dry Etch D D D M M M

215/B106 PECVD/Furnace D D D M M M

215/B-Class

Class 1000 hallway M M

215/C02-2 Post Process D D M M M

215/D101

Cleanroom

Entrance D W D M M M

215/D102-2

Womens Pre-gowning D D M M M

215/D102-3

Mens Pre-gowning D D M M M

215/D105 Gowning D D M M M

215/D106 JEOL SEM D D M M M

215/D107

Chemical

Receiving/

Removal W D M M M

215/A01 Sub Fab W W M M

215/Bunker Pyro Bunker M

216/F102 Soft Litho W D W D M M M

216/F108 AFM W W M M

216/F110 TEM Prep W W M M

216/G101 Sample Prep W W M M

216/G103 Zeiss FIB/XRD W W M M

216/G107

JEOL E-Beam

Litho W W M M

216/G113 FEI FIB W W D M M

216/G115 FEI TEM W W M M

b. Refill gloves.

i. In each lab, refill white glove and purple glove containers with appropriate sizes. Load gloves such that they can be picked up by the cuff. New gloves go on the bottom of the stack. Wear clean gloves during this process.

c. Refill gowning supplies

i. Includes bouffant caps, booties, face mask, beard covers, gloves

ii. In each lab with gowning supplies, maintain bouffant caps, booties, face masks, beard covers, and gloves.

d. Check and empty general use trash cans

i. In each lab, remove bags, take to outside of D108 for pickup. Place new bag in can.

e. Check and empty solvent trash cans

i. In each lab with solvent processes, remove bags, take to 215/D107 for disposal as solvent waste. Place new bag in can.

f. Refill Wipes

i. In each lab, refill wipe holders. New wipes go on the bottom.

g. Refill Acid Wipes

i. In each lab with acid/base processes, refill acid (blue) wipe holders. New wipes go on the bottom.

h. Refill Pipets

i. In the lithography labs, refill the pipet holders.

i. Clean and restock lab dishware

i. In each lab with chemical processing, remove dish cart, clean using dishwashers in 215/B102 (load, run washer, unload), and restock in dish cabinets. This task must be performed twice per day, two dishwashers, two runs per day.

j. Pull new tacky mat / replace if empty

i. In each lab with tacky mats, pull off top layer and throw away. Replace tacky mat when layers run out.

k. Check and remove empty/waste chemical bottles

i. In each lab with chemical processing, check for empty chemical bottles and remove to D107.

ii. In each lab with chemical processing, check for user created chemical waste bottles. and remove to D107 if bottle is more than 3/4 full or creation date is over one month old.

l. Change out waste capture containers

i. In each lab with chemical processing, check chemical waste containers/carboys under benches and remove to D107 if bottle is more than 3/4 full. Replace waste container. For carboys, empty into waste container at bench and move container to D107.

m. Change out orange acid gloves

i. In each lab with chemical processing, replace all acid gloves. Throw away old gloves. Mark new gloves with date, size, and L or R. In each area, place size 6, 7, 8, 9, and 10. In bay B101, have second set of size 7, 8, and

9.

n. Check and dispose/replace sharps containers

i. In each lab, check the sharps container and replace when 3/4 full. Full container should have lid secured and taped then dispose in regular lab trash. Install new sharps container.

o. Wipe down shelves and tables as needed.

i. Coordinate with lab space owner for access to wipe down shelves and tables with IPA wipes as needed determined by space owner.

p. Vacuum or sweep space as needed

i. Coordinate with lab space owner for access to vacuum, sweep, and/or tacky roll lab as needed determined by space owner. PLEASE NOTE:

All equipment for providing tasks (vacuum, sweeper and cleaning supplies) must be provided by contractor and must be in accordance with

ISO specification 14644, Cleanroom and Associated Controlled

Environments (where applicable).

End of requirements

General Expectations: To ensure clarity, the following list represents the expectations of NIST and the contractor.

NIST will provide:

- NIST nanofab safety training (online), orientation tour and quiz.

- All items listed as “Government Furnished Property” (GFP), including safety gowning.

All GFP will remain within NIST facilities.

- All materials to be stocked in task #3 a-p.

Contractor will provide:

- All equipment and materials for lab services (mop/buckets, vacuum, sweepers, cleaning supplies, etc.) in accordance with the ISO specification 14644.

- Basic safety, chemical safety and cleanroom protocol training for employees, in accordance with the ISO specification 14644.

DELIVERABLES

1. Vendor shall provide weekly progress reports to the TPOC/COR that clearly identifies all tasks completed and any problems or issues encountered no later than COB the first business day following that Friday.

2. Vendor shall deliver all packing slips for inventory items received to TPOC/COR within one business day of unpacking

3. Vendor shall unpack and stock inventory items within two business days of arrival.

4. Vendor shall deliver inventory bar code scanner to TPOC within one business day of inventory completion. Training to be provided during NIST orientation.

5. Vendor shall deliver particle counter data stick to TPOC within one business day of monthly particle count completion.

6. Vendor invoice shall include copies of the weekly progress reports for the time period invoiced.

GOVERNMENT FURNISHED PROPERTY

The government shall furnish the following items for completion of the tasks above. All government furnished items remain the property of the government and shall stay on site at all times.

1. Cleanroom gowning and personal protective equipment

2. Air particle counter

3. Bar code scanner