Amendment_1_-_Questions_and_Answers.pdf

SB1341-16-RQ-0640

Solicitation Amendment #1: Questions and Answers

The following amendment is for Solicitation SB1341-16-RQ-0640 for Furnace Stacks. This amendment is to provide the answers to questions received regarding the solicitation documents. Only one question was received in response to the solicitation document. The question and the answer are provided below.

Question:

In section 8-c it states: “The wafer loading system shall support SEMI standard silicon wafers 50 mm, 75 mm, 100 mm, 150 mm, and 200 mm in diameter”. That is five (5) different size wafers. But in section 8-f it states “The vendor shall provide 8 silicon carbide and 8 quartz wafer carriers sized for 50 mm, 100 mm, 150 mm, and 200 mm wafer diameters each…” That line calls for wafer boats for four (4) different size wafers which excludes the 75mm wafer boats. Please clarify the total number of wafer boats and the number of wafer boats for each size wafer.

Answer:

The vendor shall provide 8 silicon carbide and 8 quartz wafer carriers sized for 50 mm, 75 mm, 100 mm, 150 mm, and 200 mm wafer diameters each that are compatible with the wafer loading and soft landing systems. The total number of wafer carriers supplied shall be 40 in silicon carbide for use in the atmospheric furnaces and 40 in quartz for use in the LPCVD furnaces.