Assembly_Frame_Granite_Rev07B.pdf

Granite Vertical Support Block

Granite Horizontal Carriage Support Block

GRANITE ASSEMBLY REQUIREMENTS

(VACUUM SEALED GRANITE)

Assembly_Frame_Granite_Rev07

WEIGHT:

A4

SHEET 1 OF 6SCALE:1:10

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D

CHK'D

DRAWN

Granite vac sealed (10^-3 Torr)

1.2 μm/m (1.2 μin/in)

Rail alignment surface

1.2 μm/m (1.2 μin/in)

F

B

C A

DETAIL F

SCALE 1 : 5

Rail alignment surface

Required flatness under the PRO115 stage. (Stage: see last two pages)

Parallelism:

Required flatness under the 20mm and 15mm rails. (Rails: see last two pages)

GRANITE ASSEMBLY REQUIREMENTS

(VACUUM SEALED GRANITE)

Perpendicularity:

0.86 μm/m (0.86 μin/in) A B

1.2 μm/m (1.2 μin/in) B C

0.015

Assembly_Frame_Granite_Rev07

WEIGHT:

Granite should be vac sealed

Granite vac sealed (10^-3 Torr)

A4

SHEET 2 OF 6SCALE:1:15

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D

CHK'D

DRAWN

R20

50 x 4.20 15 M5x0.8 - 6H 14.20

17 x 3.30 15 M4x0.7 - 6H 14.30

11 x 5.11 16.51

1/4-20 UNC 12.70

25.40

864.20

1219.80

79.20

528.54

8.

.5

8 x 5.11 16.51

1/4-20 UNC 12.70

2 x 5.11 16.51

1/4-20 UNC 12.70

5.

5.

6.

348.75

367.75

1222.29

1264.29

4 x 7 19 M8x1.0 - 6H 16

4 x 5 15 M6x1.0 - 6H 12

TOP

BOTTOM

H

R0.30

DETAIL H

SCALE 1 : 3

Vacuum Seal

GRANITE - HORIZONTAL CARRIAGE SUPPORT BLOCK REQUIREMENTS

(GRANITE PEICE #1- VACUUM SEALED GRANITE)

SIDE VIEW

C

2 31 4

B

A

D

E

F

Granite Carriage Support Block

Assembly_Frame_Granite_Rev07

WEIGHT:

Granite vac sealed (10^-3 Torr)

A4

SHEET 3 OF 6SCALE:1:15

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D

175.40

429.40

528.20

818.50

928.20

1018.50

3.

4 x 5.11 16.51

1/4-20 UNC 12.70

2 x 3.80 12.83

10-24 UNC 9.65

28 x 5 18 M6x1.0 - 6H 15

2 x 5.11 16.51

1/4-20 UNC 12.70

789.20

1144.80

10 x 5.11 16.51

1/4-20 UNC 12.70

8 x 5.11 16.51

1/4-20 UNC 12.70

814.60

1170.20

4.

0.

7.

GRANITE - VERTICAL SUPPORT BLOCK REQUIREMENTS

(GRANITE PEICE #2 - VACUUM SEALED GRANITE)

TOP

FRONT

Granite Vertical Support Block

Assembly_Frame_Granite_Rev07

WEIGHT:

Granite vac sealed (10^-3 Torr)

A4

SHEET 4 OF 6SCALE:

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D

CHK'D

DRAWN

WEIGHT:

A4

SHEET 4 OF 6SCALE:1:10

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D

Granite Vertical Support Block

Granite Carriage Support Block

PRO115-600

Actuator

Bosch Rexroth 20mm Rail

Bosch Rexroth 15mm Rail

Bosch Rexroth 20mm Rail

PRO225-200

Actuator x 2

BMS465

Actuator for Thomdson Ball Screw

GRANITE ASSEMBLY DETAILS

(VACUUM SEALED GRANITE)

Frame and granite design considerations

Assembly_Frame_Granite_Rev07

WEIGHT:

Granite: vacuum sealed (10^-3 Torr) Frame: stainless steel 304

A4

SHEET 5 OF 6SCALE:1:15

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D

175 175 OVERHANG:

Granite side overhang between 75-175mm

A custom 4-wheel assembly (to be designed and fabricated by NIST)

Frame footprint length should not exceed:

GROUND

100.18 2

Granite base

Bo tto m o f g ra ni te to fl oo r

OVERHANG CONSIDERATIONS:

There needs to be at least 105 mm clearance between edge of granite and frame bottom support for a motor-ball screw assembly as shown below:

Approximately 250mm clearance between the bottom of granite and any structural support beam on the "split" side of the granite

NOTE: The entire system is meant to be wheeled in and out of a vacuum chamber

304 SS FRAME REQUIREMENTS

Frame footprint width should not exceed:

Granite and Frame

Assembly_Frame_Granite_Rev07

WEIGHT:

Frame material:

Stainless steel 304

A4

SHEET 6 OF 6SCALE:1:20

DWG NO.

TITLE:

REVISIONDO NOT SCALE DRAWING

MATERIAL:

DATESIGNATURENAME

DEBUR AND

BREAK SHARP

EDGES

FINISH:UNLESS OTHERWISE SPECIFIED:

DIMENSIONS ARE IN MILLIMETERS

SURFACE FINISH:

TOLERANCES:

LINEAR:

ANGULAR:

Q.A

MFG

APPV'D