SATPC0042164 TAB 10 SOW PRINTED.pdf

This is a Statement of Work for the procurement of a vacuum pump for the Detector Development Labs' Atomic Layer Deposition (ALD) processing tool. The objective is to acquire a dry pump capable of withstanding the corrosive environment of the ALD process, which uses materials such as titanium tetrachloride, trimethylaluminum, and ammonia.

The vacuum pump must meet the following functional specifications: 200-240VAC 60Hz 3 Phase electrical input; peak pump speed of 59 CFM (100 m³/h); ultimate pressure of 1.5 x 10⁻² Torr; ISO 63 vacuum inlet and NW 40 vacuum outlet; water cooling capability with 2 l/m flow rate; and nitrogen purge capability of 28-44 Slm. The pump must be a dry pump that creates vacuum without internal fluids in the compression chamber. The equipment footprint is specified as 784mm x 390mm x 526mm (L x W x H). Delivery is required within 2-4 weeks after receipt of order, with the equipment currently in stock plus shipping time. No specific response date, award date, or pricing information is provided in this document.