SATPC0042093 TAB 04 4 SOW.pdf
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- Solicitation number
- 80NSSC26940041Q
About this file
This is a Statement of Work for field service maintenance on NASA-GSFC photolithography equipment located in the Detector Development Lab, Building 30, at Goddard Space Flight Center. The contractor must perform health checks and regular maintenance on two pieces of high-precision MEMS processing equipment: a SUSS MA8/BA8 GEN4 Mask Aligner (MA8BA8GEN4-000280) and a SUSS DSM8 Front-to-back Alignment Metrology tool (DSM8GEN2-000030). These systems transfer and determine alignment of MEMS patterns on silicon wafers processed in Code 521.
For both pieces of equipment, the contractor shall provide on-site coverage Monday through Friday (excluding holidays) with a 30-day on-site response time and include all labor costs. Health check and service visits must be completed within a 2-year period from award. The work is being procured through NASA Shared Services Center and requires qualified field service engineers capable of servicing specialized photolithography and metrology equipment.
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STATEMENT OF WORK
1. Objective/Requirements NASA-GSFC owns and operates one SUSS MA8/BA8 GEN4 Mask Aligner and one SUSS DSM8 Front-to-back Alignment Metrology tool. These are high precision photolithography equipment used to transfer and determine the alignment of MEMS patterns on silicon wafers that are processed in the Code 521 Detector Development Lab.
These systems require maintenance by qualified field service engineers on a regular basis. NASA Shared Services Center has a requirement for providing annual maintenance on profilometer metrology equipment.
2. Characteristics, Scope, and Specs
The contractor shall perform a health check for MA8BA8GEN4-000280 Mask Aligner and DSM8GEN2-000030 Front-to-back Alignment Checker.
The contractor shall perform the following duties for a MA8BA8GEN4-000280 Mask Aligner:
• Provide on-site coverage for days Monday through Friday (no holidays)
• Provide on-site response time of 30 days
• Provide all labor included
The contractor shall perform the following duties for a DSM8GEN2-000030 Front-to-back Alignment Checker:
• Provide on-site coverage for days Monday through Friday (no holidays)
• Provide on-site response time of 30 days
• Provide all labor included
3. Place of Performance Detector Development Lab, Building 30, Goddard Space Flight Center
4. Period of Performance Health check and service visits shall be performed within 2 years ARO
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