SATPC0041123 Tab 04 4 SOW.pdf

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Maintenance contract and health check for 2 profilometer systems
Solicitation number
80NSSC26932737Q
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This is a Statement of Work (SOW) for annual maintenance services on precision profilometer metrology equipment at NASA's Goddard Space Flight Center.

The contractor shall provide health checks and maintenance services for two KLA Tencor profilometers located in the Detector Development Lab, Building 30, Goddard Space Flight Center: the P7 (UTID 7300282) and the P16+ (UTID 7091797). For both units, the contractor must provide on-site coverage Monday through Friday excluding holidays, with a 24 business-hour on-site response time. The contractor shall include all parts and labor costs in the service delivery. Health check and service visits must be completed within 12 months from award. These high-precision instruments are used to measure thin film thickness on silicon wafers processed in Code 521, and require maintenance by qualified field service engineers on a regular basis per NASA Shared Services Center requirements.

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STATEMENT OF WORK

1. Objective/Requirements NASA-GSFC owns and operates one KLA Tencor Model P7 and one KLA Tencor Model P16+ profilometer. These are high precision measurement equipment used to measure thin film thickness deposited on silicon wafers that are processed in the Code 521 Detector Development Lab. These systems require maintenance by qualified field service engineers on a regular basis. NASA Shared Services Center has a requirement for providing annual maintenance on profilometer metrology equipment.

2. Characteristics, Scope, and Specs The contractor shall perform a health check for P7 UTID 7300282 Profilometer and P16+ UTID 7091797 Profilometer.

The contractor shall perform the following duties for a P7 UTID 7300282 Profilometer:

Provide on site coverage for days Monday through Friday (no holidays) Provide on site response time of 24 business hours Provide all parts included Provide all labor included

The contractor shall perform the following duties for a P16+ UTID 7091797 Profilometer:

Provide on site coverage for days Monday through Friday (no holidays) Provide on site response time of 24 business hours Provide all parts included Provide all labor included

3. Place of Performance Detector Development Lab, Building 30, Goddard Space Flight Center

4. Period of Performance Health check and service visits shall be performed within 12 months ARO

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