SATPC0040786 TAB 04 4 SOW.pdf
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- Attached to
- CEE X-PRO II SPINNER-HOTPLATE WORKSTATION Federal contract opportunity
- Solicitation number
- 80NSSC26929804Q
About this file
This is a Statement of Work for the acquisition of a CEE X-Pro II spinner-hotplate workstation by NASA's Goddard Space Flight Center (GSFC) Detector Development Lab. The workstation will support microfabrication activities for the Habitable Worlds Observatory and other projects and missions. The equipment is intended to replace an aging Headway spinner station that is over 25 years old and suffers from frequent mechanical failures and inability to maintain process tolerances required for flight hardware production. The new system can process wafers ranging from 100mm to 200mm with precise resist thickness control and uniform coverage, and features programmable recipe storage, advanced automated controls, and contamination control capabilities.
The vendor must deliver a complete CEE X-Pro Workstation to NASA GSFC with all specified components, including the Apogee 200 spinner coater and bake plate, safety kit, bowl liners, dispense arms and cartridges, dual pressure cans with sensors, 4-position dispense control box, spin chuck set, centering devices for multiple substrate sizes, drain bottle assembly, Optiflow exhaust system, and inert gas purge hood. The period of performance spans twelve to sixteen weeks from the date of award, with a firm delivery deadline of DA+16 weeks (16 weeks after award) for shipment of all parts to NASA GSFC.
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Text version
STATEMENT OF WORK
Vacuum Chamber Acquisition
PR: ____________________
Background
The Detector Development Lab at GSFC is purchasing a CEE X-Pro II spinner-hotplate workstation to support microfabrication for the Habitable Worlds Observatory as well as other projects and missions. This CEE workstation is capable of processing wafers from
100mm to 200mm with precise resist thickness control and exceptional uniformity across the entire substrate. The new equipment features programmable recipe storage, advanced automated controls, and built-in safety systems that significantly improve process reliability and repeatability compared to our current setup. It is intended to replace the old
Headway spinner station which is more than 25 years old, suffers from frequent mechanical failures, and can no longer maintain the tight process tolerances required for flight hardware production. This essential equipment upgrade will ensure continued fabrication capabilities for mission-critical components through its process contamination control features.
Requirements
The vendor shall deliver a CEE X-Pro Workstation to NASA GSFC with all item selections, including safety kit, Apogee 200 spinner coater, bowl liners (3X), dispense arm, two cartridges with 1/8" and ¼" lines respectively, EBR pressure can with sensor, BSR pressure can with sensor, 4-position dispense control box, spin chuck set, centering devices for 100mm, 150mm, and 200mm substrates, drain bottle assembly, Optiflow exhaust system, Apogee 200 bake plate (400C capability) with lid-mounted chill station, and inert gas purge hood.
Deliverables or Delivery Schedule
• Deliverable schedule begins at Date of Award (DA).
• DA+16 weeks: Vendor ships all parts to NASA/GSFC
Period of Performance
• The period of performance for this statement of work is twelve to sixteen weeks from the date of award.
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