SATPC0037011 Tab 04 4 SOW.pdf
PDF 113 KB Posted
- Attached to
- Shadow Mask Aligner Federal contract opportunity
- Solicitation number
- 80NSSC25888284Q
About this file
This Statement of Work (SOW) outlines requirements for a shadow mask aligner needed by NASA's Shared Services Center to improve alignment of patterned masks to patterned substrates for effective pattern transfer.
The key technical specifications require alignment tolerance within 1 micron, an objective lens viewport with lateral X-Y range of motion across 76.2 mm, 100 mm, and 150 mm wafers, soft clamping to prevent wafer breakage, and a base unit featuring 3 linear axes, 1 rotation axis, and 2 tilt axes for wedge error compensation. Delivery is required within 4 months of purchase order receipt.
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Other files for this federal contract opportunity
| File | Type | Posted |
|---|---|---|
| SATPC0037011 Tab 06 RDSS..pdf | ||
| SATPC0037011 Tab 07 Capability Statement SAM.gov.pdf |
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Text version
Specifica�on for a Shadow Mask Aligner
A shadow mask aligner is needed to improve the alignment of a paterned mask to another paterned substrate such that patern transfer is effec�vely accomplished.
• The shadow mask aligner shall have the following capabili�es:
• Alignment to withing 1 micron tolerance.
• Objec�ve lens viewport to have lateral X-Y range of mo�on across 76.2 mm, 100 mm, and 150 mm.
• So� clamping to prevent wafer breakage.
• Base unit with 3 linear axis and 1 rota�on axis and 2 �lt axis for �lt (wedge) error compensa�on.
• Delivery: 4 months upon receipt of purchase order.
File details come from the government source that posted it. Updated .