SATPC0036773 Tab 04 4 SOW.pdf
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- Attached to
- Four point probe measurement system Federal contract opportunity
- Solicitation number
- 80NSSC25884976Q
About this file
This document is a Statement of Work (SOW) for an Automated Four-Point Probe Resistance Measurement system. NASA-GSFC has a requirement for a new, commercially available system capable of measuring thin film electrical properties on wafers up to 200mm in diameter within a Class 100 cleanroom. The system must meet detailed specifications for resistance measurement range, repeatability, accuracy, and probe characteristics. It must include automated measurement routines, data analysis, and calibration features. The successful vendor must have at least 10 working identical systems in the field and provide references. The system is to be delivered and installed at the Goddard Space Flight Center in Greenbelt, Maryland within 12 weeks of contract award. A 12-month parts and labor warranty is required.
The related federal contract opportunity is a Special Notice for a sole source procurement of this system from AFP TECHNOLOGY, INC. under FAR Part 12 and Part 13. NASA-NSSC intends to award a contract to AFP TECHNOLOGY, INC. as the sole provider of the required Automated Four-Point Probe Resistance Measurement system. Interested organizations may submit their capabilities by October 30, 2024 to be considered for a competitive procurement.
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Other files for this federal contract opportunity
| File | Type | Posted |
|---|---|---|
| SATPC0036773 Tab 07 Capability Statement Commercial.pdf |
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Text version
STATEMENT OF WORK
Automated Four-Point Probe Resistance Measurement system
1. Objective/Requirements
NASA-GSFC is developing advanced electronics and detectors for aerospace applications. Fabrication of these components requires deposition of thin films of exacting thickness and electrical properties both to verify run-to-run repeatability and uniformity and within wafer thin-film uniformity. Measurement of film properties is critical for maintaining high yield and quality specifications. The four-point-probe is a standard method for measuring film DC resistance and from which to infer film thickness. To facilitate this metrology task the Detector Systems Branch requires an automated four point probe measuring system that can take multiple measurements on wafer sizes from 100 mm to 200 mm diameter providing within wafer uniformity measurements for fast automated characterization of thin film electrical properties. The following specifications are required.
2. Specifications
a. A brand new system is required. Used or rebuilt systems will not be considered.
b. The successful vendor will demonstrate at least 10 working identical systems in the field. The system shall not be a custom one-of-a-kind solution.
c. The successful vendor shall provide references upon request of a minimum of 2 users of identical tools operating in the field.
d. The system shall be compatible with a CLASS 100 cleanroom facility.
e. The motorized XY travel stage shall be capable of handling wafers up to 200 mm diameter and the XY travel stage shall be motorized and have +/- 100 mm travel range. The system shall include a vacuum chuck for holding wafers. The vacuum chuck shall hold wafer diameters 100mm, 150mm and 200mm.
f. The electrical measurement system shall have a 1sigma repeatability of < 0.02%
g. The electrical measurement system shall have an accuracy of < +/- 0.2%
h. The electrical measurement system shall have a range of 0.1 ohm per square to 200
Mohm/square
i. The electrical measurement system shall utilize a 24 bit analog to digital converter.
j. The electrical probes shall not utilize eddy current measurement.
k. Electrical 4 point probes shall meet the following specifications and shall be easily changeable by the user to accommodate different materials characterization:
i. 1mm spacing, 40um diameter tip
ii. 1 mm spacing, 100um diameter tips
iii. 1mm spacing, 200um diameter tips
l. Nominal spring loads of all probe tips shall be less than or equal to 100g
m. The system shall include the ability to control speed of probe touchdown on the sample to reduce sample damage.
n. Electrical measurements shall be taken in an opaque box to reduce effect of light input on semiconductor resistivity measurements.
o. The system shall map resistance as a function of film thickness or film thickness as a function of resistance.
p. The system shall include an automated probe qualification routine.
q. Measurement of resistance shall automatically correct for film edge effects as well as probe pin spacing errors.
r. Automated measurement routines shall be recipe based including capability of using rectangular, linear and polar coordinate site locations. Measurement results shall be automatically displayed as 2D surface or contour maps and 3D plots with automated interpolation between measurement sites. Data shall be downloadable in standard graphics formats such as (.png, .gif, .tiff etc) or exported in text format for additional analysis.
s. The measurement routines shall include current-voltage curve plotting and current ramp scanning features.
t. Calibration samples shall be provided by the vendor including 2.8 ohm, 280ohm, and 2.8kohm resistors.
u. The system shall include 100 mm diameter qualification wafers with resistances of 4 ohms/square and 3.5kohm/sq.
v. The system shall include a Windows 11 PC configured with automated control of user defined measurement locations, film characterization mapping and data acquisition software. A 27 inch monitor shall be provided.
w. The system shall be a bench top system.
x. The system shall be less than or equal to 475mm x 561 mm x 392 mm, The system shall weigh less than or equal to 28kg
y. The system shall operate from 120V AC 60Hz power.
z. The vendor shall include on-site installation and user training for the system at
Goddard Space Flight Center 8800 Greenbelt Road, Greenbelt Maryland.
3. Place of Performance
Vendor location
4. Warranty Supplier shall provide a warranty of at least 12 Months (Parts and Labor), guaranteed to meet factory specifications.
5. Period of Performance: System delivery to Goddard Space Flight Center, 8800 Greenbelt Road, Greenbelt Maryland within 12 weeks of award.
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