Revised SOW.pdf

Statement of Work BMF Spin Rinser Dryer

NB# 6871000-21-01426

1. Background Information:

a. NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett

Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-fabrication Facility (BMF). During the fabrication process, photomasks and wafers are cleaned by loading them into a cassette which is placed into a Spin Rinser Dryer (SRD) tool where they are spun in ultra-pure water and then with heated dry nitrogen. This process takes place automatically in specially designed chambers and cassettes to ensure that the wafers are not damaged and are completely dry without contamination. The BMF currently owns 5 Semi tool 870-S dual stack SRDs. Due to increased demand, the BMF requires an additional Semi tool 870-S dual stack SRD. A Semi tool 870-S dual stack SRD is required so it is a drop-in compatible with our existing SRDs.

2. Scope of Work:

a. Objectives:

i. The goal of this contract is to supply one Semi tool 870-S dual stack SRD, or equivalent, that meets the needs of the BMF community.

b. General:

i. The contractor shall:

1. Provide experience of suppling at least 3 similar SRDs with similar requirements to those in the statement of work. Evidence of this criterion shall be demonstrated with appropriate documentation.

2. Supply the installation manual, utility requirements, and a diagram showing the tool footprint, and measurements along with quote

c. Specific Requirements:

i. The contractor shall supply the BMF with quantity one, Semi tool 870-S dual stack SRD or equivalent. The Semi tool 870-S dual stack SRD shall:

1. Be constructed with materials that are compatible for use in an ISO Class 5 cleanroom.

2. Be designed for normal operation at an altitude of 5,500 feet above sea level.

3. Be drop-in compatible with the BMF’s existing Semi tool 870-S dual stack SRDs. This criterion includes all parts required for repairs.

4. Be able to perform according to OEM specifications or better.

5. Be able to clean SEMI spec wafers and photomasks in SEMI spec cassettes in a two-cycle clean.

a. The first cycle shall consist of spinning the cassette while it is being rinsed with ASTM D5127-13, Ultra-pure water used in electronics and semiconductor, grade E-1 water.

During this cycle:

i. The cassette shall be able to rotate in a range of at least 600 to 1000 RPM.

ii. The recipe shall be able to be timed in a range of at least 60 to 120 seconds.

b. The second cycle shall consist of spinning the cassette while it is being dried with heated nitrogen gas. During this cycle:

i. The cassette shall be able to rotate in a range of at least 1000 to 1200 RPM.

ii. The recipe shall be able to be timed in a range of at least 30 to 60 seconds.

c. Be able to control the ramp speed and speed of rotation of each step independently.

d. Be able to perform each step for a fixed amount of time.

6. Include appropriate interlocks to ensure that the tool is safely operated.

7. Be dual stack, front loading units with two SRD chambers.

8. Be able to accommodate 150 mm wafers.

9. Have a controller for each SRD chamber that can have one programmable rinse step and one programmable dry step where the duration and revolutions per minute of the cassette are programmable.

10. Have an Emergency Machine Off (EMO) button located on the front of the tool.

11. Have a single bolt rotor design.

12. Be able to be powered by 110 V.

13. Have an ultra-pure water recirculation system (WR-20).

14. Have the chambers outfitted in the following manner:

a. The first chamber shall have a rotor sized for 3” SEMI spec wafer cassettes.

b. The second chamber shall have a rotor sized for 150 mm SEMI spec wafer cassettes.

15. Be either factory new units or units that have been refurbished to like new conditions. If the units are refurbished, they shall:

a. Contain all new:

i. solenoid valves.

ii. gaskets and o-rings. This includes, but is not limited to, o-rings and gaskets in the following locations:

1. door seals

2. nitrogen manifold

3. rear bowl seal

4. Ultra-pure water manifolds

iii. Required filters.

iv. Vibration dampers.

v. Teflon ultra-pure water and nitrogen lines.

vi. Ultra-pure water nozzles.

b. Have newly electropolished:

i. Spin dryer bowls

ii. Nitrogen manifold

iii. Mounting brackets

iv. Labyrinth seal assembly

c. Have the following parts inspected and replaced if they do not operate to original equipment manufacturer (OEM) specifications or better:

i. Rotor stop positioner

ii. Start/stop switches

iii. Blanket Heaters

iv. Nitrogen pressure sensors

d. Have all machine covers in like new condition. The covers shall be replaced if necessary.

ii. Before shipping the system, the contractor shall provide the Government a factory acceptance report demonstrating that the SRDs perform according to OEM specifications.

iii. The contractor shall supply a one-year warranty on all parts and labor.

3. Period of Performance:

a. The SRD shall be delivered within 6 months after receipt of award. The one-year warranty shall start when the tools have been accepted by the Government.

4. Deliver:

a. The SRD shall be delivered to 325 Broadway, Boulder, Colorado, Building 81, room 1B100.

5. Government Furnished Property:

N/A