Requirements Document.pdf

Requirements Document High-performance IR camera system

MML / 642

I. BACKGROUND INFORMATION

Currently, most of the thermoset composites used in semiconductor packaging are purchased overseas.

Overseas suppliers provide limited material property information under idealized conditions, whereas packaging materials are deployed in complicated environments that include temperature and humidity fluctuations. The lack of available data on commercially-available materials makes it challenging for domestic semiconductor manufacturers to measure, monitor, predict, and ensure quality and reliability in advanced packaging for highly complex, integrated semiconductors. The objective of this project is to provide the semiconductor industry with measurement capabilities, knowledge, and open-source data for polymeric materials that are used in next-generation packaging technologies.

A high-performance mid-wave infrared (MWIR) camera system is being purchased to support the CHIPS Metrology Program’s Grand Challenge 3: “Enabling Metrology for Integrating Components in Advanced Packaging.” The objective of the “CHIPS R&D: AWACKSM, IR camera” is to spatially map the temperature evolution of thermosets during thermal cure and during post-cure under relevant operating conditions for packaging materials (thermal and humidity cycling). The thermoset will be placed on a thin (approximately 100 μm – 300 μm thick), stiff cantilever (approximate planar dimensional range: 50 mm × 3 mm – 100 mm × 6 mm) that will bend in response to cure shrinkage and hygrothermal expansion/contraction. The amount of bending will be measured with a laser system, enabling the cantilever to act as a sensor to quantify the residual stress induced by dimensional changes in the thermoset. The calculated stresses will be related to temperature fluctuations in the material that are measured by the IR camera. An oven or radiative heaters will be used to achieve the hygrothermal states of interest. These setups create dimensional constraints that require large, adjustable distances between the IR camera and the cantilever. Additionally, the planar dimensions of the cantilever are small, which necessitates an IR camera with high spatial resolution. To study next-generation packaging materials that exhibit rapid cure times, this IR camera must also be capable of high-speed operation to capture the temperature evolution of the material.

II. SCOPE

The contractor is responsible for delivering one IR camera system meeting the specifications described within this document and providing a hardware and software warranty. NIST is responsible for integrating the camera into existing instrument control hardware and software.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: High-speed and high-resolution mid-wave infrared (MWIR) camera system Comment: Only a single camera is desired; however, two camera configurations have been identified that will achieve the desired performance. If the vendor can supply both configurations, they are encouraged to provide separate quotes for each configuration so that each can be evaluated. At most, one camera will be selected.

Quantity: 1 Technical Specifications - Configuration 1

1. Sensor size – Native sensor resolution must be at least 640 pixels x 512 pixels. Stronger consideration will be given to a camera that can achieve this pixel resolution using the inherent optical system within the camera, or other solution that provides the most accurate resolution possible, without uncertainty generated by post-processed corrections.

2. Thermal sensitivity – The camera detector must have a typical Noise Equivalent Temperature Difference (NETD) less than or equal to 30 mK.

3. Acquisition rates

3.1. Maximum frame rate must achieve at least 1000 Hz at 640 pixels x 512 pixels.

3.2. Programmable frame rates must allow for selection from a minimum range of 0.02 Hz to

1000 Hz.

3.3. Maximum frame rate of at least 10,000 Hz for subwindowed frame.

4. Spatial resolution

4.1. The spatial resolution described below must be achieved using a simplified system that minimizes differences in the relative illumination between the center and edges of the frame. The primary reason for this specification is to eliminate vignetting in the imaging system.

4.2. Working distance – Camera system (detector and optics combined) must have a working distance that can be varied between 200 mm and 500 mm. Stronger consideration will be given to a single lens that allows the working distance to be continuously varied between 200 mm and 500 mm because such a solution will provide the most flexibility in camera placement. Multiple environmental chambers may be used to test the thermoset-coated cantilevers, and the lens solution must be able to accommodate those changes at any distance within the stated range.

4.3. Instantaneous field of view

4.3.1. At a working distance of 200 mm, the camera system (detector and optics combined) must have a spatial resolution less than or equal to 90 μm/pixel.

4.3.2. At a working distance of 500 mm, the camera system (detector and optics combined) must have a spatial resolution less than or equal to 260 μm/pixel.

4.4. Field of view

4.4.1. At a working distance of 200 mm, the camera system (detector and optics combined) must provide a field of view of at least 50 mm x 40 mm.

4.4.2. At a working distance of 500 mm, the camera system (detector and optics combined) must provide a field of view of at least 160 mm x 130 mm.

5. Trigger – Camera system must provide at least one hardware trigger input available by BNC or SMA connection on the camera body. An included dongle between a camera body connector and BNC or SMA meets this requirement.

6. Spectral range – The MWIR system must detect wavelengths from 3 μm to 5 μm.

7. Calibration – The camera system (detector and optics combined) must be calibrated at a minimum range of −20 °C to 350 °C without extrapolation.

8. Software requirements

8.1. At least one perpetual “seat” of analysis software licensing must be included. The computer used to control this camera cannot be connected to the internet. Therefore, activation of this seat must NOT require an internet connection. Further, the files needed to install and run the analysis software must also be provided in a manner that does NOT require an internet connection.

8.2. Setting of all user-settable operational parameters including integration time, sensor windowing, frame rate, filter wheel position, trigger types, trigger arming, emissivity.

8.3. Display of real time images from the camera for operations including focusing.

8.4. Capturing of data from the camera to the control PC. Both real-time streaming of data to the

PC and local storage on the camera that can be transferred to the control PC meet this requirement.

8.5. Exporting of data from any proprietary formats to open formats. Inclusion of a software development kit (SDK) that would enable access from other programming languages can meet this requirement if the SDK can read the raw data and any required metadata including temperature calibration information.

8.6. Defining a region of interest using a rectangle, circle, line, or single pixel and creating a time versus temperature plot that is the mean temperature within that region. Along with the plot, it must be possible to export the data as at least one of the following filetypes: .CSV, .TXT, .XLS, or .XLSX.

9. Physical

9.1. Connections from the camera to the control PC must enable data transfer at the highest frame rate specified in “2. Acquisition rates.”

9.2. Description must be included that lists the computer hardware (such as the frame grabber card and the PCI) required to connect the camera to the computer using CoaXPress and/or Camera Link cables to enable rapid data transfer for high frame rate data acquisition.

9.3. Must operate from a NEMA 5-15R (standard US outlet – 120 V, 15 A).

9.4. Camera system (including detector and optics) must weigh less than 8 kg so that it can be mounted on industrially available stages.

9.5. Camera must include a filter wheel that holds at least 4 filters.

10. Memory – The camera must include an on-board solid-state disk (SSD).

11. Control computer – A control computer is NOT required. NIST will use its own computer to control the camera.

Technical Specifications - Configuration 2

1. Sensor size – Native sensor resolution must be at least 1280 pixels x 1024 pixels. Stronger consideration will be given to a camera that can achieve this pixel resolution using the inherent optical system within the camera, or other solution that provides the most accurate resolution possible, without uncertainty generated by post-processed corrections.

2. Thermal sensitivity – The camera detector must have a typical Noise Equivalent Temperature Difference (NETD) less than or equal to 30 mK.

3. Acquisition rates

3.1. Maximum frame rate must achieve at least 40 Hz at 1280 pixels x 1024 pixels.

3.2. Programmable frame rates must allow for selection from a minimum range of 0.02 Hz to 40 Hz.

4. Spatial resolution

4.1. The spatial resolution described below must be achieved using a simplified system that minimizes differences in the relative illumination between the center and edges of the frame. The primary reason for this specification is to eliminate vignetting in the imaging system.

4.2. Working distance – Camera system (detector and optics combined) must have a working distance that can be varied between 200 mm and 500 mm. Stronger consideration will be given to a single lens that allows the working distance to be continuously varied between 200 mm and 500 mm because such a solution will provide the most flexibility in camera placement. Multiple environmental chambers may be used to test the thermoset-coated cantilevers, and the lens solution must be able to accommodate those changes at any distance within the stated range.

4.3. Instantaneous field of view

4.3.1. At a working distance of 200 mm, the camera system (detector and optics combined) must have a spatial resolution less than or equal to 50 μm/pixel.

4.3.2. At a working distance of 500 mm, the camera system (detector and optics combined) must have a spatial resolution less than or equal to 130 μm/pixel.

4.4. Field of view

4.4.1. At a working distance of 200 mm, camera system (detector and optics combined) must provide a field of view of at least 50 mm x 40 mm.

4.4.2. At a working distance of 500 mm, camera system (detector and optics combined) must provide a field of view of at least 150 mm x 110 mm.

5. Trigger – Camera system must provide at least one hardware trigger input available by BNC or SMA connection on the camera body. An included dongle between a camera body connector and BNC or SMA meets this requirement.

6. Spectral range – The MWIR system must detect wavelengths from 3 μm to 5 μm.

7. Calibration – The camera system (detector and optics combined) must be calibrated at a minimum range of −20 °C to 350 °C without extrapolation.

8. Software requirements

8.1. At least one perpetual “seat” of analysis software licensing must be included. The computer used to control this camera cannot be connected to the internet. Therefore, activation of this seat must NOT require an internet connection. Further, the files needed to install and run the analysis software must also be provided in a manner that does NOT require an internet connection.

8.2. Setting of all user-settable operational parameters including integration time, sensor windowing, frame rate, filter wheel position, triggers, emissivity.

8.3. Display of real time images from the camera for operations including focusing.

8.4. Capturing of data from the camera to the control PC. Both real-time streaming of data to the PC and local storage on the camera that can be transferred to the control PC meet this requirement.

8.5. Exporting of data from any proprietary formats to open formats. Inclusion of a software development kit (SDK) that would enable access from other programming languages can meet this requirement if the SDK can read the raw data and any required metadata including temperature calibration information.

8.6. Defining a region of interest using a rectangle, circle, line, or single pixel and creating a time versus temperature plot that is the mean temperature within that region. Along with the plot, it must be possible to export the data as at least one of the following filetypes: .CSV, .TXT, .XLS, or .XLSX.

9. Physical

9.1. Connections from the camera to the control PC must enable data transfer at the highest full frame rate specified above.

9.2. Must operate from a NEMA 5-15R (standard US outlet – 120 V, 15 A).

9.3. Camera module with optics must weigh less than 8 kg.

9.4. Camera must include a filter wheel that holds at least 4 filters.

10. Control computer – A control computer is NOT required. NIST will use its own computer to control the camera.

Line Item 0002 (Optional):

Description: Extended temperature calibration Quantity: 1 Technical Specifications

1. Pricing for calibration up to at least 500 °C (including all required equipment) may be provided as an option.

2. This is an optional item. The evaluation team will make a decision on if this item will be included in the purchase order at time of award.

Line Item 0003 (Optional):

Description: Optional lens Quantity: 1 Technical Specifications

1. Pricing for an optional lens that provides working distances between 500 mm and infinity may be provided as an option.

2. Pricing for calibrating the optional lens for the temperatures stated previously should be included as an option.

3. This is an optional item. The evaluation team will make a decision on if this item will be included in the purchase order at time of award.

Line Item 0004 (Optional):

Description: Training Quantity: 1 Technical Specifications

1. Pricing for on-site training on how to use the IR camera system may be provided as an option.

2. This is an optional item. The evaluation team will make a decision on if this item will be included in the purchase order at time of award.

Line Item 0005 (Optional):

Description: Customer care program Quantity: 1 Technical Specifications

1. Pricing for a customer care program (that includes at a minimum remote technical support) may be provided as an option.

2. This is an optional item. The evaluation team will make a decision on if this item will be included in the purchase order at time of award.

IV. DELIVERABLES

Milestone Description Due Date Format

1 High-performance IR camera system

12-20 weeks after award

Physical Instrument and

V. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: TBA, Building 224 Gaithersburg, MD 20899

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Basic functions will be tested including:

a. Installing the control software on a NIST owned PC.

b. Connecting the IR camera system to the control PC.

c. Using a “live view” display on the camera control software to position and focus the camera on a test specimen to ensure that the camera setup achieves the required spatial resolution. This test will be conducted for both camera configurations.

d. The proper operation of the user-settable operation parameters (integration time, sensor windowing, frame rate, filter wheel position, trigger types, trigger arming) will be verified. Data will be recorded varying each of these parameters within their specified range to ensure the camera setup achieves the required specifications.

control software

2 Operations and maintenance manual for the system covering proper operation, routine maintenance, and troubleshooting for the instrument and controlling software

At the same time as the high-performance mid-wave IR camera

Electronic (.pdf) or paper copies

2. High-speed operation: the camera system will be configured to window the detector and provide higher frame rate operation to ensure operation of the higher speeds.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST DGO to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 1 month of the receipt of the equipment unless otherwise indicated above. A piece of equipment required for acceptance is also currently being procured, and the increased acceptance time is to ensure that adequate time is given for all acceptance testing to be performed for the camera and additional procurements. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

VIII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

Government Acceptance 100%

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. TRAVEL

The contractor shall supply all parts, hardware, equipment, travel expenses, and labor required to perform the tasks listed.

X. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, (revise as applicable 8:00 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.