Requirements Document.docx

STATEMENT OF WORK

Laser etalon and detector system

MML / 642

I. BACKGROUND INFORMATION

Thermosets used in semiconductor applications demonstrate complex cure kinetics that are highly affected by the processing parameters (i.e., temperature, humidity). Furthermore, these thermoset materials are cured in thin film geometries, where residual stress development during processing and operation may significantly affect the performance and lifetime of the cured material. The objective of this project is to quantify the residual stress development in thin thermoset films during processing and under hygrothermal conditions relevant to the semiconductor industry.

The thermoset will be placed on a stiff, reflective, and thin (approximately 100 μm – 300 μm thick) cantilever (approximate planar dimensional range: 50 mm × 3 mm – 100 mm × 6 mm) that will bend in response to cure shrinkage and hygrothermal expansion/contraction. The stress development in the film will be quantified by measuring the changes in curvature of the cantilever using a laser etalon system. The laser etalon system must generate an array of laser spots that lands on the free, planar face of the cantilever. The reflection of the laser spots must be captured with a detector to track the change in spacing between laser spots after reflecting off of the stressed cantilever. Software must be included to identify the spots, track their location and spacing, and relate the changes in spacing to stresses in the thermoset film. The calculated stresses will be related to temperature fluctuations in the material that are measured by an infrared camera. An oven or radiative heaters will be used to achieve the hygrothermal states of interest. These setups create dimensional constraints that require flexibility in the laser etalon/detector setup. Therefore, two configurations are required. The first can be used when the reflected laser spots can retrace the optical path taken by the incident laser spots (Normal Incidence). The second can be used when the reflected laser spots cannot retrace the optical path taken by the incident laser spots (Specular Incidence). The described laser etalon/detector system will enable the measurement of residual stress development during and after curing, which are both critical to understanding the performance and lifetime of packaging materials.

II. SCOPE

The contractor is responsible for delivering one laser etalon and detector system meeting the specifications described within this document and providing a hardware and software warranty. The contractor is also responsible for installing and training new users on the laser etalon and detector system either in-person or remotely.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Laser etalon and detector system Quantity: 1 Technical Specifications

1. Laser etalon characteristics

1.1. The laser etalon must be capable of producing a 2D array of at least 4x3 laser spots.

1.2. The 2D array must be adjustable such that a 1D, 3x1 array can be achieved.

1.3. The diameter of the laser spots must be approximately 0.8 mm.

1.4. The wavelength of the laser must be in the visible spectrum.

1.5. Upon exiting the optical enclosure, the power of the laser array must be less than 10 μW.

2. Physical setup

2.1. Two configurations must be provided:

2.1.1. Configuration 1 (Normal incidence): Both the laser etalon source and a detector (used to capture the reflected laser spots and measure curvature) must be housed in the same enclosure. Configuration 1 will be used when the experimental setup allows for the reflected light to retrace the optical path taken by the incident laser spots.

2.1.2. Configuration 2 (Specular incidence): A standalone detector must be provided so that the reflected spots of the laser etalon system from Configuration 1 can be captured when the reflected laser spots cannot be directed back into the enclosure that houses the laser etalon source.

2.2. The pathlength between the incident laser and the sample must be between 0.75 m and 1 m.

2.3. In Configuration 2, the instrument must enable measurement with a pathlength between the sample and the detector up to approximately 1 m.

2.4. The instrument must provide curvature measurements without requiring one of the laser spots to land on a stationary reference point.

2.5. System must operate from a NEMA 5-15R (standard US outlet – 120 V, 15 A).

3. Detector (for both Configuration 1 and 2):

3.1. A 35 mm large format detector must be used.

3.2. The resolution of the detector must be at least 4864 x 3232.

3.3. The size of the pixels must be at most 7.4 μm.

3.4. The frame rate at full resolution must be at least 7.6 fps.

4. Software

4.1. The supplier must provide documentation outlining the analysis conducted by the software and experimental studies demonstrating in-situ measurements.

4.2. The software must provide:

4.2.1. Complete control of data acquisition and analysis.

4.2.2. Automatic detection of laser spots.

4.2.3. Automatic detector exposure control to ensure that the detector is not saturated as surface reflectivity changes.

4.2.4. Real-time plotting and visualization of intensity, reflectivity, differential spot spacing, stress-thickness product, strain, and radius of curvature.

4.2.5. Two data acquisition modes:

4.2.5.1. Focus mode: simultaneous monitoring of the image and a line profile of the laser spot array to facilitate laser alignment and optics focusing.

4.2.5.2. Curvature/Strain Mode: Simultaneous tracking of an arbitrary number of user-configured laser spots to yield time-resolved radius of curvature measurements, mean differential spot spacing, stress, reflectivity, and intensity.

4.2.6. An optional delay time between image acquisitions for time-resolved acquisition modes.

4.2.7. External triggering to sync data acquisition with external events.

4.2.8. Two analysis capabilities:

4.2.8.1. Line profile to accurately determine beam profiles.

4.2.8.2. Radius of curvature and strain analysis. User input of physical geometry and substrate parameters to calculate radius of curvature, stress-thickness product, or relative stress as a function of time, temperature, or other user configurable input. It must also be possible to plot simple centroid position and spot separation distance.

4.2.9. Data storage in ASCII, Excel, or binary file formats.

4.2.10. A program that allows data to be analyzed remotely (i.e., on a separate computer).

4.3. The computer used to control this system cannot be connected to the internet; therefore, installation of any software needed for this instrument must be achieved without the use of the internet.

5. Control computer

5.1. Control computer must be able to accept a PCIe 2.0 (Gen 2) x4 bus.

5.2. A Windows 10 or newer operating system.

Single-port mounting bracket Quantity: 1 Technical Specifications

1. Mounting bracket for Configuration 1

1.1. Pricing for a mounting bracket for Configuration 1.

1.2. Mounting bracket should include an x-y translation stage to align the laser etalon/detector system.

Angled viewport Quantity: 1 Technical Specifications

1. Angled viewport for Configuration 1

1.1. Pricing for an angled viewport must be provided to enable measurements through transparent windows (i.e., when a window must be placed between the laser etalon system and the sample).

1.2. Borosilicate glass should be used to construct the angled viewport window.

Dual port detector mounting bracket Quantity: 1 Technical Specifications

1. Mounting bracket for the second port in Configuration 2

1.1. Pricing for a mounting bracket for Configuration 2.

1.2. Mounting bracket should include an x-y translation stage to align the detector in the second port.

Blue laser upgrade Technical Specifications

1. Upgrade from red to blue laser

1.1. Pricing for upgrading to a blue laser (405 nm).

Installation and training

1.1. Installation and training must be provided.

1.2. Remote or in-person training will meet this requirement. However, it should be noted that the control computer will NOT be connected to the internet (thus in-person training may be required).

Technical Specifications

1. The cost for shipping and receiving to NIST Gaithersburg, MD must be provided.

IV. DELIVERABLES

Standards of Acceptance: The NIST TPOC or COR shall review that the unit is functioning to specifications as outlined in Section III and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 months of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

a. Construction and fabrication of the equipment shall be completed at the contractor’s facility.

b. If necessary (i.e., if remote installation cannot be achieved), installation and training will be performed at 100 Bureau Dr., Building 224, Gaithersburg, MD 20899.

i. The government will provide access to Building 224 to the contractor for the entire period of performance of this contract.

VI. PERIOD OF PERFORMANCE/LEAD TIME

See “IV. Deliverables” above

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Gaithersburg, MD 20899

VIII. INSTALLATION

The system shall be installed with Contractor assistance and meet contract specifications no later than 1 month after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation shall be done at NIST, (Gaithersburg, MD- Building 224).

IX. TRAINING

The contractor shall conduct training session(s) for up to 2 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed either on-site at the NIST Gaithersburg campus or remotely, Monday – Friday during the operating hours of 8:00 am - 5:00 pm (eastern time), within 5 business days after installation.

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, and full system design schematics for the system at the time of award.

X. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Basic functions will be tested including:

a. Powering on the provided control computer.

b. Connecting the laser etalon and detector system to the control computer.

c. Ensuring the laser etalon system powers on.

d. Ensuring the detectors power on.

e. Ensuring the control computer can communicate with and control the laser etalon and detector system.

f. Ensuring the detector detects the laser array provided by the laser etalon.

g. Ensuring the control computer records the data from the detector.

h. Ensuring the software identifies laser spots reflected onto the detector.

i. Ensuring the software offers the functionality listed in Sections 4.2.5 and 4.2.8 - 4.2.10 of the Technical Specifications for Line Item 0001.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 2 months of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XI. WARRANTY

At a minimum, the Contractor shall provide a 12-month limited warranty, starting upon acceptance, to cover defects in materials and workmanship of the laser etalon, detector, and control computer. The Contractor shall provide k-Space Associates, Inc. authorized service for warranty repairs of the system.

XII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIII. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XIV. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XV. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractors shall comply with NIST identification and access requirements. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

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