Raman system specification requirements.pdf

Requirements for a Raman Material Property Characterization System.

NRL requires a complete turnkey, automated, mapping research-grade confocal Raman microscope for structure interrogation of wide- and ultrawide bandgap materials. Ultimate resolution and signal-to-noise is required to observe shifts in material composition, phase and strain. It should be equipped with multiple lasers to enable a wide variety of materials and investigation of stacked structures with depth variation. Minimum specifications that will enable this to be accomplished are listed below:

Basic Raman Microscope:

• Fully automated including switching between lasers, confocal pinholes, and calibration of system. Hot swappable of multiple components to allow efficient collection of data

• Truly confocal design with uncompromised sensitivity and spectral resolution (down to < 0.5 cm-1). Tunable laser intensity required with range at least 1-100% maximum intensity.

• Support up to five internal computer-controlled lasers and additional external lasers as needed

• Support multiple spectrographs/gratings and up to four detectors including at least one CCD

• Able to be retrofitted for addition internal and external lasers

• Microscope enabled with both bright field and dark field illumination

• Mapping stage capable of covering a 100 x 100 mm (4” wafer) area with a spatial resolution

(<1 µm). Observation of the sample surface during full range movement is required.

• Microscope should have at least 5 objective lenses covering range from 5x-100x. At 100x, the working distance should be at least 1 mm for ease of use.

Detectors:

• Two detectors with 225 mm and 800 mm spectrographs should be provided and capable of achieving < 1 cm-1) while maintaining sufficient signal-to-noise ratio. Maximum quantum efficiency (QE) at 800 nm > 90%, spectral coverage for 400 nm – 990 nm with QE > 40%.

• TE-cooled spectroscopic CCD camera with cooling down to -60 °C (air circulation). CCD sensor: back-illuminated, deep depletion with anti-fringing, low dark current, lower background noise.

• Adjustable motorize slits and ability automatically switch between up to five gratings

• Should be able to measure down to at least 60 cm-1 with more than one laser wavelength

Lasers

• Enclosure for microscope stage, interlocked to internal lasers

• Require three internal lasers at: 1) 325 – 405 nm; 2) 532 nm; 3) 785 nm. All must have tunable power output with at least 30 mW and at least 2 pm linewidth.

Polarization:

• Include polarization capability for both p- and s- polarized light which can be switched automatically in the software

Temperature controlled stage:

• Equipped with temperature heat/cooling stage that covers range from 77-675 K with 0.01° accuracy and < 0.1° stability

• Operation of heating stage should be done in software and allow for heating and cooling rates of at least 100 °C/min

System Form and Footprint:

• Overall footprint of the system should be less than 2.5m x 2.5m. All electronics and components should be included within the footprint of the system

• The system should be compatible with either 110 or 220V input power.

Computer

• System should be run by a Dell computer with windows 11, monitor, keyboard, mouse all included and capable of running software and all components of the system.

Software

• Software package should be able to do fully automated instrument control (sample manipulation, detectors, lasers, calibration, etc.), data acquisition (mapping, sample observation, and spectral measurements), analysis (baseline/background subtraction, smoothing, cropping, cosmic ray removal, and identification/quantification of peak position, intensity, FWHM, etc.)

• At least five software licenses should come with the system for use on separate computers for analysis

Installation, Training and Warranty:

• The system shall include all installation, labor and materials.

• Vendor will supply the facilities requirements prior to the system delivery to ensure that all electrical, and other needs are met prior to personnel showing up to install the system.

• Acceptance testing demonstrating successful operation of all functions and automation will be conducted on-site during installation. A training session for at least 2 people should be included and cover all major functions of the system

• A warranty covering all parts and labor for at least 12 months must also be included.

Service Contract:

• Vendor should be capable of supplying a service contract that includes at least one preventative maintenance visit and all system, safety and software updates during the agreement year. The cost of this should be optional and be able to be added later.