PWS.doc

Performance Work Statement (PWS)

Heidelberg Laser Lithography Systems Maintenance and Service 01 August 2023 C.1 General

The Contractor shall provide preventive and corrective maintenance services for one (1) Government-owned Heidelberg Volume Pattern Generator (VPG)200++ and one (1) Government- owned Heidelberg Direct Wire Lithography (DWL)200 laser lithography system located at the Army Research Laboratory (ARL), Adelphi, MD for one (1) year plus one (1) additional option year. The systems are Heidelberg MODEL (SERIAL NUMBER): VPG200++ (HI943) and DWL200 (HI684).

C.2 Objective

Preventive and corrective maintenance for the Government-owned laser lithography systems manufactured by Heidelberg Instruments, is critical in supporting nanofabrication at Specialty Electronic Materials and Sensors Cleanroom (SEMASC). The preventative support and maintenance shall ensure full functionality and performance of the systems in order to prevent any failures or systems downtime.

C.3 Requirement

C.3.1 Preventative Maintenance

The Contractor shall maintain the performance of VPG200++ (HI943) and DWL200 (HI684) by performing two (2) scheduled preventative maintenance visits annually for the DWL200 and four (4) scheduled maintenance visits annually for the VPG200++ in accordance with the Technical Maintenance and Service Documentation of the Systems supplied by the Original Equipment Manufacturer (OEM). During preventative maintenance, the Contractor may implement modifications necessary for the correction and reliability of the full operation of the Systems.

The Contractor shall perform a preventive maintenance inspection that shall include:

-Initial checks

-Optics checks

-Vacuum checks

-Electronics checks

-Performance checks

The Contractor shall take required actions as a result of the above inspections to restore the tool to normal operating condition.

Prior to any maintenance. The Contractor shall inspect the laser systems for indications of mechanical and electrical defects and run performance checks. The Contractor shall identify overheating, corrosion, accumulation of dust, oil, or broken parts.

The date of these visits will be mutually agreed between the Contractor and ARL’s Technical Point of Contact (TPOC).

C.3.2 Corrective Maintenance (Repair Service)

The Contractor shall perform Corrective Maintenance that shall include:

- Repair of defects due to normal wear and tear.

- Diagnosis and repair of defects, reported by the Customer, which prevent the normal continuation of the Customer’s operation of the Systems.

- Labor, travel and expenses for the scope of work in the Agreement is included.

- The Contractor shall provide unlimited phone support within 48 hours of a reported problem not including weekends and national holidays.

- The Contractor shall address all issues that require on-site technical support within five (5) days of a reported problem not including weekends and national holidays.

All DWL200 system hardware that is not considered consumable shall be covered. The Exposure Laser System (or alternate laser systems, if applicable) are considered consumable, and shall not be covered. Any and all costs associated with repair of non-consumable items shall be covered.

All VPG200++ system hardware that is not considered consumable shall be covered. The Exposure Laser System (or alternate laser systems, if applicable) are considered consumable, and shall not be covered. All costs associated with repair of non-consumable items shall be covered.

C.3.3 System control software

The Contractor shall provide all update releases of System control software for both the VPG200++ and DWL200.

C.3.4 Place of Performance

U.S. Army Research Laboratory

2800 Powder Mill Road

Adelphi Maryland

20783-1138

C.3.5 Service hours

Preventive and Corrective Maintenance (Repair Service) shall be carried out by the Contractor Monday through Friday between 8:00 AM and 5:00 PM local time (except holidays).

Routine access of Contractor personnel to Government-controlled facilities is not required. Access to Government-controlled information systems is not required.

The Contractor is not required to obtain a National Agency Check with Inquiries or higher. National, religious, or other special holidays observed by Heidelberg Instruments are excluded.

C.3.6 Quarterly Status Meetings

The Contractor shall participate in status meetings, to be held at least quarterly with the TPOC, to be scheduled by TPOC. The meetings will discuss the progress of the contract, performance of the Contractor, and any problems that have arisen or are expected to arise.

C.4 AT-OPSEC

C.4.1 Access and general protection/security policy and procedures. This standard language is for contractor employees with an area of performance within Army controlled installation, facility, or area. Contractor and all associated sub-contractors employees shall provide all information required for background checks to meet installation access requirements to be accomplished by installation Provost Marshal Office, Director of Emergency Services or Security Office. Contractor workforce must comply with all personal identity verification requirements (FAR clause 52.204-9, Personal Identity Verification of Contractor Personnel) as directed by DOD, HQDA and/or local policy. In addition to the changes otherwise authorized by the changes clause of this contract, should the Force Protection Condition (FPCON) at any individual facility or installation change, the Government may require changes in contractor security matters or processes.

C.4.2 For contractors that do not require CAC but require access to a DoD facility or installation. Contractor and all associated sub-contractors employees shall comply with adjudication standards and procedures using the National Crime Information Center Interstate Identification Index (NCIC-III) and Terrorist Screening Database (TSDB) (Army Directive 2014-05/AR 190-13), applicable installation, facility and area commander installation/facility access and local security policies and procedures (provided by government representative), or, at OCONUS locations, in accordance with status of forces agreements and other theater regulations.

Contracting Officer: