PWS.doc
DOC document 553 KB Posted
- Solicitation number
- W911QX23Q0142
About this file
This performance work statement outlines requirements for upgrading an electron beam lithography system. The contractor shall upgrade electronics, replace generic pattern generator hardware with universal hardware, and install a 125 MHz clock upgrade. Software and control system updates are also required. Components must be delivered within 11 months of award, with installation and training completed within two additional weeks. The contractor must test the upgraded system and train at least ten users on its capabilities. Maintenance is required to provide technical support. The related sole source notice indicates the Army intends to award a non-competitive contract to Raith America, Inc. for the upgrade services described in the performance work statement to the Raith EBPG 5000 Plus Electron Beam Lithography System located at the Army Research Laboratory in Adelphi, Maryland.
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| File | Type | Posted |
|---|---|---|
| Provisions and Clauses Full-Text Attachment (for Combo Synopsis-Solicitation)_23Q0142.doc | DOC document | |
| Combination Synopsis-Solicitation for Commercial Purchases _23Q0142.docx | DOCX document |
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Performance Work Statement (PWS)
Upgrade of Raith EBPG 5000 Plus Electron Beam Lithography system in ARL Cleanroom June 5, 2023 C.1 Background
The Sensors and Electron Devices Directorate (SEDD) at the Army Research Laboratory (ARL) currently owns and operates one (1) Raith EBPG 5000 Plus Electron Beam Lithography system, a premier tool used in support of the mission critical research in Nanoscience. The Original Equipment Manufacturer (OEM), Raith America Inc. installed the system at ARL in 2009 under contract number W911QX-08-P-082. The system now requires upgrade services in order to increase efficiency (depending on device patterns) anywhere from three (3) to seven (7) times. The increased efficiency from the system upgrade will also allow the Government to make the tool available to more research groups at ARL who are currently limited by the non-availability of tool time.
C.2 Objective
The Government requires services to upgrade parts to the Raith EBPG 5000 Plus Electron Beam Lithography system onsite at the ARL Cleanroom (situated on the 3rd Floor of Zahl Building (Z3B-38 to Z3B-57)) located in Adelphi, Maryland as outlined in the Requirements (C.3) below.
C.3 Requirements C.3.1 The Contractor shall upgrade the existing EBPG 5000 Plus system in the Cleanroom to production standards providing all necessary electronics hardware and firmware including deflection power amplifiers and electronic DAC (Digital to Analog Converter) boards.
C.3.2 The Contractor shall upgrade existing GPG (Generic Pattern Generator) hardware to UPG (Universal Pattern Generator) hardware. This shall include latest generation pattern generator architecture with increased memory and firmware which supports structure shape library.
C.3.3 The Contractor shall install a 125 megahertz (MHz) Pattern Generator Clock speed upgrade which is much faster than the current 50 MHz Pattern Generator allowing users to work on a wider spectrum of sensitive resists with higher beam currents.
C.3.4 System control Software BEAMS: The Contractor shall provide all update releases of the System control Software BEAMS and verify seamless operation with the system upgrades listed in C.3.1 to C.3.3.
C.3.5 The Contractor shall deliver all components to Government point of contact (POC) within 11 months after contract award.
C.3.6 The Contractor shall schedule installation, testing and training within four (4) weeks of the parts being delivered to the Cleanroom at a mutually agreeable date with the Government POC. The period of installation, testing and training shall be completed within two (2) weeks of the start date.
C.3.7 The Contractor shall perform testing after the installation to make sure everything is in working order. The testing shall consist of a full calibration and making sure it passes the tool specification published by Raith America (Original Equipment Manufacturer).
C.3.8 The Contractor shall provide user training following successful installation and testing. The Contractor shall provide a two (2) hour training session for at least ten (10) users that shall address the capabilities of the upgraded system and the advanced parameters available during pattern preparation software. The entire system shall be covered by a maintenance contract which allows users access to technical support on an as needed basis.
C.4 ANTI-TERRORISM/OPERATIONAL SECURITY (AT/OPSEC)
C.4.1 Access and general protection/security policy and procedures. This standard language is for contractor employees with an area of performance within Army controlled installation, facility, or area. Contractor and all associated sub-contractors employees shall provide all information required for background checks to meet installation access requirements to be accomplished by installation Provost Marshal Office, Director of Emergency Services or Security Office. Contractor workforce must comply with all personal identity verification requirements (FAR clause 52.204-9, Personal Identity Verification of Contractor Personnel) as directed by DOD, HQDA and/or local policy. In addition to the changes otherwise authorized by the changes clause of this contract, should the Force Protection Condition (FPCON) at any individual facility or installation change, the Government may require changes in contractor security matters or processes.
Contracting Officer:
_1748874234.pdf
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