PWS 24-4D0 - POU Abatement.pdf

Performance Work Statement (PWS)

DMEA 24-4D0

27 March 2024

Project Engineer:

Contract Officer Representative:

1.0 SCOPE:

1.1 TITLE: Edwards Atlas Hybrid Kronis-Etch Point-of-Use Abatement

1.2 PURPOSE: Purchase of Edwards Atlas Hybrid Kronis-Etch point of use abatement system for abating waste stream chemicals from a semiconductor multi-chambered cluster tool

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:

2.1 GOVERNMENT DOCUMENTS:

Document No. Date Title eB 100714 ARMS Cleanroom Protocol

2.2 GOVERNMENT FURNISHED EQUIPMENT:

None.

2.3 GOVERNMENT FURNISHED FACILITIES/ACCESS:

Facility/Access Date DMEA 4234 54th Street, McClellan, CA 95652-2100 Upon installation

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

a. Include all items (e.g. hardware, software, and other documentations) as listed in the tool purchase package

b. Provide User Manuals (softcopy and/or hardcopy)

c. Provide full system installation including connection to system facilities and hardware validation with marathon run

d. Correct or fix any hardware or software problems encountered during initial installation and testing

e. Be operational and functional in accordance with tool vendor specifications

f. Provide DMEA with User Licenses and License Agreement

g. Provide DMEA personnel with training (including but not limited to operational, routine maintenance, upkeep, and other pertinent functions) to effectively use the tool

h. Provide DMEA with 1 year tool warranty and support clause

i. The tool shall not be a refurbished, remanufactured, or used unit.

j. The contractor shall verify that only genuine hardware and software shall be provided with no non-OEM or counterfeit items substituted. A written guarantee and corresponding paperwork shall be provided to DMEA at contract award. The contractor shall provide full-service support, upgrades, replacement guarantees, a valid software license and full warranty.

k. Include all items as listed in Appendix A of the PWS

3.2 PROGRAM MANAGEMENT: None

3.3 TASK REQUIREMENTS: DMEA is tasked with installation of tool but vendor will perform checks to guarantee tool is operational, according to vendor specs, and also provide tool training. Travel for Field Service Engineer to perform tool checks post installation and tool training is included in quote.

3.3.1 Travel: The vendor will travel to DMEA to perform testing of the tool onsite. The vendor performing the testing onsite shall provide proof of US citizenship. The vendor is required to check in with DMEA Security to obtain appropriate badge upon arrival.

3.4 TOOL REQUIREMENT: The abatement tool/system shall be a turn-key COTS product capable of abating the effluent waste stream from six or more semiconductor cluster processing tool chambers of differing process types at efficiency ratings sufficient to meet Sacramento County air district requirements.

a. The tool shall have six or more inlet ports.

b. The tool shall be able to have its combustion/burner chamber fired on-demand based on a signal from the connected semiconductor processing tool so that minimal fuel, water, and oxygen gas consumption is used while idling.

c. The tool shall be able to reach operating temperature within 60 seconds of the on-demand signal.

d. The tool’s combustion/burner chamber shall be able to toggle between different “fire” modes on-demand based on a signal from the processing tool so that the abatement tool maintains optimal temperatures for the respective chemistry being abated while also not using additional fuel and oxygen when unnecessary.

e. The tool shall be able to toggle the above-mentioned fire modes on a per-inlet basis so that only the additional fuel and oxidizer necessary for that individual inlet is consumed and to maximize efficiency for each individual stream while minimizing additional emissions.

f. The tool shall be able to toggle between different fire modes and reach their respective operating temperatures within 3 seconds of receiving a signal.

g. The tool shall use natural gas as a fuel source.

h. The tool shall use ambient air as the oxidizer source to maintain the base operating temperature of the tool.

An additional oxidizer such as pure O2 may be used in conjunction with additional fuel to maintain an elevated temperature when necessary for destruction of specific gasses.

i. The tool shall be of a design that only requires front-side access to service the tool.

j. The front-side service access for the tool shall not exceed a clearance requirement of 36 inches.

k. The tool shall not require backside access after installation.

l. The tool shall fit within floor space dimensions of 58 inches wide by 28 inches deep with the width dimension being the front face of the tool and not exceed 96 inches in height.

m. Appendix B lists the approximate process gases that may be expected to need to be abated in each input stream.

3.5 PROGRAM SUMMARY: None

4.0 POINTS OF CONTACT:

DMEA/ MEBA/ PE:

Address:

Voice:

E-Mail:

DMEA/ MEBA/ COR:

Address:

Voice:

E-Mail:

APPENDIX A – Required Item Options

Item Description Qty. Unit 1 TPU/TCS Bypass Bellow Conn Kit 6 2 Abatement Commissioning Support 1

APPENDIX B – Anticipated Gas List

Inlet 1 Inlet 2 Inlet 3 Inlet 4 Inlet 5 Inlet 6

Gas 1 N2 - 10000 sccm

HBr -sccm

O2 -sccm

O2 -sccm

N2 -sccm

N2 - 10000 sccm

Gas 2 O2 -sccm

Cl2 -sccm

Ar -sccm

Ar -sccm

Ar -sccm

O2 -sccm

Gas 3 N2O -sccm

He -sccm

He -sccm

He -sccm

O2 -sccm

O3 -sccm

Gas 4 SiH4 -sccm

O2 -sccm

H2 -sccm

H2 -sccm

CF4 -

sccm

TEOS -

mgm

Gas 5

NH3 -

sccm

Ar -sccm

CF4 -

sccm

CF4 -

sccm

C4F8 -sccm

C3F8 -sccm

Gas 6 C3F8 -sccm

N2 -sccm

CHF3 -

sccm

CHF3 -

sccm

SF6 -

sccm

C2F6 -sccm

Gas 7 C2F6 -sccm

SF6 -

sccm

C4F8 -sccm

C4F8 -sccm

NF3 -

sccm

Gas 8

NF3 -

sccm

CF4 -

sccm

SF6 -

sccm

SF6 -

sccm

Pump N2 40 slm 40 slm 40 slm 40 slm 40 slm 40 slm