PWS 20-0F3 POApproved 13May2020_Redacted.pdf

PERFORMANCE WORK STATEMENT (PWS)

DMEA 20-0F3

13 May 2020

Project Engineer:

1.0 SCOPE:

1.1 TITLE: Excillum MetalJet D2+ Recommissioning, Dynamic Adaptation Upgrade, Exit window and Preventative Maintenance Service Contract. Nanotube N1 Preventative Maintenance Service Contract.

1.2 APPLICABILITY: Defense Microelectronics Activity (DMEA), Semiconductor Assurance Forensics Engineering (SAFE)

1.3 BACKGROUND: The Excillum X-Ray Sources are used with the X-Ray Microscopes by the SAFE group for Failure Analysis (FA) and Reverse Engineering (RE) of semiconductors. The source is composed of various complex components that need to be in precise calibration at all times. MEBE has two (2) sources for their two X- Ray microscopes, the MetalJet D2+ and the NanoTube N1. The D2+ is currently in a crate, needing to be recommission. Also, the D2+ Dynamic Adaptation Upgrade will reduce the maintenance and consumables costs.

1.4 PURPOSE: To purchase a service contract to recommission and upgrade the D2+ with Dynamic Adaptation. To purchase a preventative maintenance service contract to ensure the proper function and maximum accuracy and precision of both the MetalJet D2+ and the NanoTube N1 tools to minimize downtime. The purchase shall include one (1) base year and four (4) option years of the services listed in Paragraph 3.3 through 3.7.

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:

2.5 GOVERNMENT FURNISHED FACILITIES/ACCESS:

Facility/Access Date

ARO

Excillum MetalJet D2+ (Serial EXH 01064) ARO Excillum NanoTube N1 (Serial EXH 01118) ARO

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

3.2 PROGRAM MANAGEMENT: None

3.2.1 TRAVEL: Travel may be required during the conduct of this PWS. Negotiated travel shall be approved upon task award. Additional travel shall be authorized only upon written approval of the PCO.

3.3 TASK REQUIREMENTS:

3.3.1 RECOMMISSIONING REQUIREMENT: The contractor shall perform recommissioning service of the D2+ identified above in Paragraph 2.3, including travel, uncrating and re-installing the Excillum MetalJet D2+ in DMEA’s X-ray microscopy laboratory.

3.3.1.1 HARDWARE SPECIFICATIONS: The Excillum MetalJet D2+ shall meet the specifications listed below:

Specification Required Value Power 0-250W Target Material Liquid Metal 95% Gallium 5% Indium by weight Voltage 21-70kV

Maximum Current 4.3mA Minimum Focal Spot Size 5µm Emission Stability <1% Position Stability <1µm

3.3.1.2 RECOMMISSIONING: The contractor shall perform all installation, alignment and calibration in order to ensure the MetalJet D2+ is fully operational.

3.3.1.3 TESTING: The contractor shall submit a Performance Validation Test Plan. The contractor shall perform Performance Validation Testing necessary to qualify the installation, and shall validate the performance to the required specifications as described in Paragraphs 3.3.1.1.

(A001 – Performance Validation Test Plan) (A002 – Performance Validation Test Results)

3.3.2 DYNAMIC ADAPTATION UPGRADE: The contractor shall upgrade services on DMEA’s MetalJet D2+, enabling the MetalJet D2+ to Dynamically Adapt the Electron Beam to the natural aging of the Cathode.

3.3.3 PREVENTATIVE MAINTENANCE: The contractor shall provide at least one (1) preventative maintenance (PM) visit, at a time agreed upon by the contractor and DMEA. During the PM visit, the contractor shall ensure that the system is back to full operational condition meeting Original Equipment Manufacturer (OEM) specifications.

(A003 – Service Report)

3.3.4 ON-SITE HARDWARE SUPPORT: The contractor shall provide on-site visits to DMEA to provide support and repair any normal operation malfunctions to return the tool to full operational condition meeting OEM specifications. The contractor shall replace any parts or component needing to be replaced with equivalent or better quality parts. Components to be covered shall include, but are not limited to:

MetalJet D2+ MetalJet D2+ X-Ray Source High Voltage Control Unit High Voltage Generator Jet Pump Uninterruptible Power Supply Water Chiller

NanoTube NanoTube X-Ray Source High Voltage Control Unit High Voltage Generator Uninterruptible Power Supply Water Chiller

The contractor shall provide service reports for any on-site support provided. Travel for On-site Hardware Support shall be approved by per Paragraph 3.2.1.

(A003 – Service Report)

3.3.5 REMOTE TECHNICAL SUPPORT: The contractor shall provide email and telephone support for the X-Ray sources. If DMEA contacts the contractor regarding support, the contractor shall respond to DMEA within one (1) business day. If a site visit is required to return the tool to full operational condition meeting OEM specifications, the contractor shall report to DMEA within ten (10) business days of the reported issue.

3.3.6 SOFTWARE: The contractor shall update the software to the latest version, when released. The updated software shall be compatible with the latest Windows Operating System (OS) version. The contractor shall provide software updates on a CD and send to DMEA five (5) business days prior to the scheduled visit for installing the software update

3.3.7 CONSUMABLES: The contractor shall deliver consumables as ordered by DMEA. The contractor shall ship consumables within two (2) business days of receipt of order. Consumables shall include but is not limited to Cathode Assemblies, Particle Filters, Nozzle Assemblies, Exit Windows, Jet Pump Check Valves, Top-off Alloy, and Small Items Boxes.

3.4 PROGRAM SUMMARY: None

4.0 DATA ITEMS: The following CDRLs apply to this SOW/PWS and shall be submitted as described below.

Indicate on the cover of all delivered data the contract number, SOW/PWS number, SOW/PWS title, and the current DMEA Project Engineer name and office symbol.

For CDRLs requiring Status Report:

1. Sequence Number A001

2. Title Acceptance Test Plan

3. Subtitle Performance Validation Test Plan

4. Authority DI-QCIC-80553

5. Contract Reference Paragraph 3.3.1.3

6. Requiring Office MEBE

7. DD 250 Req LT

8. App Code A

9. Distribution Statement Req’d Distribution Statement B, Distribution authorized to US Government agencies only Critical Technology (11 May 2020). Other requests for this document shall be referred to DMEA/MEBE.

10. Frequency OTIME/R

11. As of N/A

12. Date of First Submission 5 days after contract award

13. Date of Subsequent Submission N/A

14. Distribution See 4.1 Distribution List

15. Total See 4.1 Distribution List

16. Remarks Contractor format acceptable. Shall contain, at least, all of the validation tests performed previously on Ultra system during performance validation following PM visits.

Block 7: LT – Letter of transmittal Only Block 8 – A – Approval. DMEA will review and provide comments within 5 business days of receipt of the document. The revised document is due back to DMEA within 5 business days following receipt of DMEA comments.

Block 10: OTIME/R – One time with revisions as necessary.

1. Sequence Number A002

2. Title Test/Inspection Report

3. Subtitle Performance Validation Test Results Report

4. Authority DI-NDTI-80809

5. Contract Reference Paragraph 3.3.1.3

6. Requiring Office MEBE

7. DD 250 Req LT

8. App Code N/A

9. Distribution Statement Req’d Distribution Statement B, Distribution authorized to US Government agencies only Critical Technology (11 May 2020). Other requests for this document shall be referred to DMEA/MEBE.

10. Frequency OTIME

11. As of N/A

12. Date of First Submission 5 days after the Performance Validation Test

13. Date of Subsequent Submission N/A

14. Distribution See 4.1 Distribution List

15. Total See 4.1 Distribution List

16. Remarks Contractor format acceptable. Shall contain, at least, all of the validation tests performed previously on Ultra system during performance validation following PM visits.

Block 7: LT – Letter of transmittal Only Block 10: OTIME – One Time

1. Sequence Number A003

2. Title Maintenance Service Report

3. Subtitle Maintenance Service Report

4. Authority DI-MGMT-80995A

5. Contract Reference Paragraph 3.3.3, 3.3.4

6. Requiring Office MEBE

7. DD 250 Req LT

8. App Code N/A

9. Distribution Statement Req’d Distribution Statement B, Distribution authorized to US Government agencies only Critical Technology (11 May 2020). Other requests for this document shall be referred to DMEA/MEBE.

10. Frequency ASREQ

11. As of N/A

12. Date of First Submission See Block 16

13. Date of Subsequent Submission See Block 16

14. Distribution See 4.1 Distribution List

15. Total See 4.1 Distribution List

16. Remarks Contractor format acceptable

Block 7: LT – Letter of transmittal Only Block 10: ASREQ – As required. Each PM or On-site Service visit requires a Service Report Block 12: Delivery of Service Report due no later than 5 business after completion of first service visit Block 13: Delivery of subsequent Service Report due no later than 5 business after completion of subsequent service visits

4.1 DISTRIBUTION LIST: The contractor shall deliver electronic copies to DMEA via e-mail in Microsoft Office products or in Adobe PDF format to the address indicated. The subject block shall contain the contract number, PWS number, CDRL title, and date. If this task involves classified data, the contractor shall deliver classified data in an appropriate manner to only those recipients specifically indicated in the distribution list below. For all other recipients, the contractor shall send only a cover letter in lieu of the classified data. The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

Code Copies (regular/reproducible/electronic) Address

DMEA/MEBE All deliverables: 0/0/1

If this task involves classified data, the contractor shall deliver classified data in an appropriate manner to this recipient. The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

Attn: Michael Sutherland (PE) 4234 54th Street McClellan, CA 95652-2100 michael.r.sutherland7.civ@mail.mil

Attn: Philip Comer (Branch Chief) 4234 54th Street McClellan, CA 95652-2100 philip.a.comer.civ@mail.mil

Attn: Daric Matthew Guimary (COR) 4234 54th Street McClellan, CA 95652-2100 daric.m.guimary.civ@mail.mil

DMEA/MEEC

All deliverables: 0/0/1

If this task involves classified data, the contractor shall NOT deliver classified data to this recipient.

Deliver only cover letters in lieu of classified data.

The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

Attn: Matthew Duane (PCO) 4234 54th Street McClellan, CA 95652-2100 matthew.b.duane.civ@mail.mil

Attn: Julieta Barrera-Garcia (PCS) 4234 54th Street McClellan, CA 95652-2100 julieta.e.barrera-garcia.civ@mail.mil

5.0 POINTS OF CONTACT:

DMEA/MEBE Project Engineer:

Michael Sutherland Address: 4234 54th Street, McClellan, CA 95652-2100 Voice: (916) 999-2744 E-Mail: michael.r.sutherland7.civ@mail.mil

DMEA/MEBE COR:

Daric Matthew Guimary Address: 4234 54th Street, McClellan, CA 95652-2100 Voice: (916) 999-2731 E-Mail: daric.m.guimary.civ@mail.mil

DMEA/MEBE Branch Chief Philip Comer Address: 4234 54th Street, McClellan, CA 95652-2100 Voice: (916)999-2944 E-Mail: philip.a.comer.civ@mail.mil