NIST-SS26-CHIPS-58 - HAST.pdf

General Information Document Type: Sources Sought Notice Solicitation Number:

FAAPS No.

Title: Source Sought Notice for Two (2) Highly Accelerated Stress Test (HAST) Chamber

Posted Date:

Archive Date:

Original Response Date:

Current Response Date: Classification Code: 66 -- Instruments & laboratory equipment Set Asides:

NAICS Code: 334515 – Semiconductor test equipment manufacturing

Requirements:

NIST intends to purchase two (2) HAST chambers per the below specifications. NIST is looking for vendors who can provide one or both types of chambers. In response to the sources sought notice vendors must indicate which chambers they can provide:

HAST Chamber 1 Specifications:

BACKGROUND

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899.

The National Institute of Standards and Technology (NIST), Division 305 at Engineering Laboratory, seeks information on commercial vendors that can provide a Highly Accelerated Stress Test (HAST) equipment that can simultaneously applying high temperature, high humidity, and high pressure. By simultaneously applying high temperature, high humidity, and high pressure, the HAST chamber accelerates moisture-induced failures. This system will add new capability and productivity to produce defects in semiconductor devices that will be used for defect characterization and failure analysis. This system, in support of NISTs mission, will be used for non-destructive defect detection metrology development. This instrument will be in Building 220 in Gaithersburg, MD, and managed by the Engineering Laboratory.

The CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem. This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas. For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program.

GENERAL DESCRIPTION

Line Item 0001:

Description: HAST Chamber Quantity: 1

As described above, the HAST (Highly Accelerated Stress Test) is a reliability testing method that uses high temperature, high humidity, and increased atmospheric pressure to force moisture into electronic components. This process simulates years of environmental aging in just a few days, allowing researchers to quickly identify potential failures like corrosion, delamination, or insulation breakdown.

1. Tool configuration:

The system must be equipped with following components:

1) Single chamber.

2) Multi-mode capability to control humidity even during heat-up and cool-down.

3) Touch-screen controller with temperature, humidity and count-down display and

Ethernet interface.

4) Minimum interior volume 21 liters.

5) Minimum interior space: 11.5 inch x 11.6 inch (diameter x depth).

6) Temperature range: 105 °C to 162 °C.

7) Humidity control range: 75 -100 % RH (without live load).

8) Pressure range: 0.020 - 0.392 MPa.

9) Standard Bias Pins: 12 terminals.

10) Automatic water supply.

11) Power supply source: 208V, 1 phase, 60Hz, 15 Service Amps.

12) Emergency stop switch.

2. Safey Features:

1) The system shall have overheat protector.

2) The system shall have over pressure protectors.

3) The system shall have door lock safety mechanism to prevent opening of the door while the chamber is pressurized.

4) The system shall have contract relay for external alarm.

5) The system shall have specimen power control terminal to shut down the product power in the event of an alarm.

6) The system shall have status indicator light.

3. Training:

a. The vendor shall provide one onsite startup training to up to five people.

HAST Chamber 2 Specifications:

The National Institute of Standards and Technology (NIST) Infrastructure and Materials Group within the Engineering Laboratory is seeking a Highly Accelerated Stress Test (HAST) Chamber capable of meeting the JESD22A11E standard to perform accelerated aging experiments as part of a study of long-term reliability of materials used in advanced packaging of semiconductor chips. This work is in support of the CHIPS Metrology program.

The CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem. This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas. For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program.

The Infrastructure and Materials Group requires the acquisition of a highly accelerated stress test (HAST) chamber. This HAST chamber is essential to our CHIPS project focused on reliability of advanced packaging in heterogeneously integrated semiconductor devices. This capability directly supports the CHIPS R&D Metrology Program’s Grand Challenge to enable metrology for long-term aging studies of integrating components in advanced packaging. By providing the semiconductor industry with an accurate material property database of polymeric packaging components throughout long-term aging and a new, more accurate reliability model, long-term reliability design efficiency (both time and cost savings) will be greatly improved.

This HAST chamber will allow for accelerated aging at variable temperature, humidity, and pressure to study the effect of thermal environment, including direct in-situ temperature and resistance monitoring throughout samples, of polymeric components (e.g., underfills, redistribution layers, and thermal interface materials) used in advanced packaging of heterogeneously integrated semiconductors. This is a critical requirement to study the impact of different long-term aging environment (e.g. the impact of different thermal history) experienced by real-world semiconductor devices. This will allow for material properties to be measured throughout the aging process. The measured material properties will be provided as part of an open-source database and will also be used as inputs for developing a new reliability model, both of which will be provided to industry stakeholders.

Line Item 0001:

Description: HAST Chamber Quantity: 1

A. Technical Specifications

a. Size

i. Must accommodate multiple samples up to 300 mm in diameter (i.e., 300 mm wafers).

ii. Must have a minimum of two shelves (not including bottom shelf).

iii. Minimum of 21 L interior volume.

b. Accelerated Stress Testing

i. Temperature

1. Minimum temperature of 105 °C or lower.

2. Maximum temperature of 142 °C or higher.

ii. Pressure

1. Minimum testing pressure of 0.020 MPa or lower.

2. Maximum testing pressure of 0.392 MPa or higher.

iii. Humidity

1. Minimum relative humidity of 75% RH or lower.

2. Maximum relative humidity of 100% RH.

c. Must have built in water supply tank. Size must be provided.

d. Must comply with JESD22A11E standard testing, including terminal bias panel.

i. Specify number of terminals provided. Preference will go to higher number of terminals.

ii. Terminal bias panel must be located on oven side (not the rear) to provide wire access.

iii. Provide current and bias limits to allow for in-situ bias application during testing.

Power requirements, required receptacle, and plug (if required) must be provided.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION.

Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.

• Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).

• Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government’s requirement, provide the following:

o Manufacturer name o Model number o technical specifications o If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s)

• Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements. Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response.

o Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.

• Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why.

Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive.

• State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.

• Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline.

• For the NAICS code listed in this notice:

o Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.

o If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.

• Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.

• Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order;

FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.

• State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested in inspecting the intended installation site during the market research phase.

• State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.

• If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information.

• Identify any customers in the public or private sectors to which you provided the recommended or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.

• Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.

• State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

IMPORTANT NOTES

This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.

After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).

The responses shall not exceed [Add number of pages] pages including all attachments, charts, etc.

Thank you for taking the time to submit a response to this request!

1) Single chamber.