Reflectometer souces sought figures.pdf
PDF 550 KB Posted
- Solicitation number
- NIST-FY25-CHIPS-0070
About this file
This is a set of technical diagrams and figures related to a sources sought notice for an EUV Reflectometer system for NIST's SURF III facility. The figures illustrate the laboratory space layout and key technical requirements for the reflectometer system.
The figures include: 1) A sketch showing the laboratory space layout with a 183cm thick radiation wall and raised floor details, 2) Sample positioning diagrams showing normal incidence (0° pitch) and grazing incidence (90° pitch) configurations, 3) Empty platen specifications showing a minimum 290mm clearance below the incoming EUV beam, 4) Detector turret design specifications showing AXUV-100 detectors, quadrant detector, and scintillator components with 63.5mm width and 48.9mm height dimensions, and 5) Detector motion range requirements including 350mm to 150mm radius adjustment and pitch range of +185° to -5° with ±5° yaw adjustment capability. The diagrams provide detailed technical specifications to support potential vendors in understanding the physical and operational requirements for the reflectometer system.
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Text version
Reflectometer solicitation figures
Figure 1: Sketch of laboratory space location
Figure 2: Sample normal incidence (pitch nominally 0°)
Figure 3: Sample at grazing incidence (pitch nominally 90°)
Figure 4: Empty platen at grazing incidence (pitch nominally 90°) and Z axis at end of range
Figure 5: Detector turret (mass ~300 g)
AXUV-100
ScintillatorQuadrant detector on rear
Figure 6: Detector motion
| Slide 1: Reflectometer solicitation figures |
| Slide 2: Figure 1: Sketch of laboratory space location |
| Slide 3: Figure 2: Sample normal incidence (pitch nominally 0°) |
| Slide 4: Figure 3: Sample at grazing incidence (pitch nominally 90°) |
| Slide 5: Figure 4: Empty platen at grazing incidence (pitch nominally 90°) and Z axis at end of range |
| Slide 6: Figure 5: Detector turret (mass ~300 g) |
| Slide 7: Figure 6: Detector motion |
File details come from the government source that posted it. Updated .