NIST-SS26-69.pdf
PDF 132 KB Posted
- Attached to
- Sources Sought Reticle Blanks
- Solicitation number
- NIST-SS26-69
About this file
This is a Sources Sought notice issued by the National Institute of Standards and Technology (NIST) seeking information about potential suppliers for reticle blanks (Notice ID: NIST-SS26-69). NIST's Biomaterials and Fabrication (BMF) facility requires 6-inch square reticle blanks that meet SEMI Spec SEMI P1-0708 standards for use in their optical wafer steppers during microelectronics circuit fabrication. The required annual volume is approximately 400 to 1,500 units. The reticle blanks must be composed of soda lime glass or quartz with a nominal thickness of either 0.12 inches or 0.25 inches, and must include a chromium-based opaque coating and photoresist. All dimensional specifications including squareness, rounding, and lateral dimensions must comply with SEMI P1-0708 standards.
To be considered for award, suppliers must demonstrate established experience providing SEMI P1-0708 compliant reticle blanks as a standard catalogue item; one-off prototypes, sample parts, or custom fabrications will not be considered. NIST reserves the right to receive or purchase a sample blank to verify compatibility with its steppers and conformance to specifications. This sources sought notice is intended to identify qualified suppliers capable of meeting the government's requirements for this critical component used in semiconductor manufacturing processes.
View the file
On GovTribe
Work with this file
- Download the original file
- Contacts named in this file
- Similar government files
- Ask GovTribe AI about this file
Text version
Notice ID Number NIST-SS26-69
Sources Sought Reticle Blanks
The BMF patterns and utilizes master reticles blanks (also called masks) to fabricate microelectronics circuits. These reticles are patterned in-house using our optical pattern generator and then are used in the optical wafer stepper to transfer the pattern onto the wafer being processed. Our current steppers require 6” reticle blanks made to exacting semiconductor standards (SEMI Spec SEMI P1-0708). These reticles consist of a 6” square transparent substrate coated with a chromium (Cr) based opaque material and photoresist.
The BMF requires a supplier that can supply between roughly 400 to 1500 of these reticle blanks a year.
Additionally, to protect the service contract and the mechanical health of the stepper, the Government requires that the contractor has demonstrated experience providing reticle blanks that meet SEMI Spec SEMI P1-0708 as a standard catalogue item part. One off, prototypes, sample parts, etc. will not be considered for award. The Government reserves the right to receive or purchase a sample blank to ensure that it works with its steppers and meets SEMI Spec SEMI P1- 0708.
Specific Requirements for the reticle blanks are:
• Reticle blanks that meet SEMI Spec SEMI P1-0708 o This includes all dimension including but not limited to squareness, rounding, lateral dimensions, etc.
must be met.
• Material: Soda lime glass or quartz
• Thickness: nominal 0.12” or 0.25”
• Size: 6” x 6”
File details come from the government source that posted it. Updated .