NIST_Requirements1.docx

NIST Requirements Document A custom vacuum chamber

I. Background

The requirement is for a custom vacuum chamber that has been designed to enable experiments at the NIST SURF-III synchrotron in the extreme- and violet-ultraviolet (EUV, VUV) wavelengths of light. The project being pursued will allow the measurement of nanoscale semiconductor patterns by shining EUV and VUV light onto such samples and measuring the reflected, diffracted, and scattered light to determine the dimensions of these patterned features. Such projects have been carried out at longer wavelengths at NIST but this requirement is necessary to reduce the wavelength of light used to provide better information about nanoscale dimensions especially as semiconductor dimensions continue to decrease. As EUV and VUV light are absorbed by air, our experimental apparatus including samples, stages, and cameras must be operated in a vacuum and this custom chamber will encapsulate these. The custom chamber will allow the efficient usage of EUV and VUV light as generated at the NIST SURF-III synchrotron source.

Scope

This custom vacuum chamber is required to provide a vacuum environment for experimental equipment at wavelengths in the extreme and vacuum ultraviolet (10 nm through 150 nm) so that we can meet our mission of determining nanoscale dimensions of patterned wafers from reflected, scattered, and diffracted light, in support of the US Semiconductor Industry.

II. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following (1) Custom vacuum chamber that meet the following minimum specifications:

1) The “custom vacuum chamber” required is comprised of three components: a top endpiece, a chamber body, and a bottom endpiece.

2) The top and bottom endpieces are to be made from aluminum. The chamber body is to be made from stainless steel (SS 304).

3) Specifications for the designs of the three component parts are outlined in the documents “Barnes Chamber Drawings.pdf” and illustrated as computer-aided drawings (CAD) files “top flange.stp”, “bottom flange.stp”, “chamber.stp”.

4) Industry practices will require the generation of highly detailed three-dimensional CAD drawings beyond those provided in S03 above. Approval by NIST of these detailed supplier-generated CAD drawings will be required prior to manufacturing components.

5) These three components shall be tested as a single vacuum vessel prior to shipment. Two large o-ring gaskets and bolts to connect the endplates to the chamber are to be included.

6) The base pressure of the single vacuum vessel must be less than P = 10-7 Torr without single points of failure (i.e. leaks). This shall be achieved with use of no vacuum grease(s) of any kind.

7) Industry-standard practices for maintaining vacuum cleanliness of these parts must be maintained through delivery.

Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 6 months ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 217 E116 Gaithersburg, MD 20899-1640 III. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance test consists of visual inspection upon arrival for signs of contamination of the three components (S07). Tests include inspection of the chamber and end pieces (S01), their materials composition (S02), and dimensions relative to agreed-upon drawings provided by supplier and pre-approved by NIST (S04). NIST shall assemble the chamber using contractor-provided gaskets, flanges, and bolts for the one port per endpiece and NIST-provided gaskets, flanges, and bolts for the twelve ports for the chamber body in addition to the supplier-provided o-rings and bolts for connecting the endpieces to the chamber body (S05). NIST will verify the base pressure of the system (S06).

The Government will test, inspect, and accept the equipment onsite within 7 days business days of the receipt of the vacuum system. A visual inspection of the vacuum system will be performed by the NIST TPOC to identify surface defects or any form of indication that the vacuum system was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the camera system due to defects and/or nonconformance.

IV. Warranty The contractor shall warrant the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

V. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed