1333ND19QNB680688_SPECS.pdf
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- Attached to
- BMF CALIBRATION RETICLES Federal contract opportunity
- Solicitation number
- NB687100-19-03350
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SPECS
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| File | Type | Posted |
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| 1333ND19QNB680688_RFQ.pdf |
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SPECIFICATIONS
BMF CALIBRATION RETICLES
The Boulder MicroFabrication Facility (BMF) provides access to microelectronic fabrication capabilities for the entire NIST-Boulder research community. One of the most critical fabrication tools in the BMF is the ASML 5500/80 wafer stepper. The wafer stepper is the primary fabrication tool for patterning microelectronic circuits: it is used many times per day. In order to properly operate, the wafer stepper requires calbriation that requires specific calibration reticles.
Item 1: Quanity one (1) overlay matrix 21/6” reticle for ASML 5500/80 wafer stepper: ASML part number 9428.999.63210 or equivalent
Specifications:
- The size of the reticle shall be consistent with a SEMI spec 6” photomask. The reticle must be quartz and be free from any any chips, cracks, or other defects.
-The reticle shall be an overlay matrix 21/6” reticle for ASML 5500/80 wafer stepper: ASML part number 9428.999.63210 or equivalent.
- The reticle shall be able to be used as the reticle required for the standard overlay calibration for an ASML 5500/80 wafer stepper. The BMF’s ASML 5500/80 wafer stepper must be able to run its internal overlay calibration with the reticle that is supplied by the contractor without any modification to the reticle, the ASML 5500/80 stepper, or any software.
Item 2: Quanity one (1) focal – 80 reticle for ASML 5500/80 wafer stepper. ASML part number
9428.999.64470 or equivalent.
Specifications:
- The size of the reticle shall be consistent with a SEMI spec 6” photomask. The reticle must be quartz and be free from any chips, cracks, or other defects.
-The reticle shall be a focal – 80 reticle for ASML 5500/80 wafer stepper: ASML part number
9428.999.64470 or equivalent.
- The reticle shall be able to be used as the reticle required for the standard focus calibration for an ASML 5500/80 wafer stepper. The BMF’s ASML 5500/80 wafer stepper must be able to run its internal focus calibration with the reticle that is supplied by the contractor without any modification to the reticle, the ASML 5500/80 stepper, or any software.
SHIPPING & DELIVERY
The two reticles shall be packed in a method that is compatible for the reticles to be delivered to an ISO class 5 cleanroom.
INSPECTION AND ACCEPTANCE
Within 30 days of receipt of the reticles, the Government will run a test overlay and focus calibration with the supplied reticles to ensure that they can be properly used by the ASML 5500/80 wafer stepper to perform its required calibration.
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