1333ND19QNB680688_SPECS.pdf

SPECIFICATIONS

BMF CALIBRATION RETICLES

The Boulder MicroFabrication Facility (BMF) provides access to microelectronic fabrication capabilities for the entire NIST-Boulder research community. One of the most critical fabrication tools in the BMF is the ASML 5500/80 wafer stepper. The wafer stepper is the primary fabrication tool for patterning microelectronic circuits: it is used many times per day. In order to properly operate, the wafer stepper requires calbriation that requires specific calibration reticles.

Item 1: Quanity one (1) overlay matrix 21/6” reticle for ASML 5500/80 wafer stepper: ASML part number 9428.999.63210 or equivalent

Specifications:

- The size of the reticle shall be consistent with a SEMI spec 6” photomask. The reticle must be quartz and be free from any any chips, cracks, or other defects.

-The reticle shall be an overlay matrix 21/6” reticle for ASML 5500/80 wafer stepper: ASML part number 9428.999.63210 or equivalent.

- The reticle shall be able to be used as the reticle required for the standard overlay calibration for an ASML 5500/80 wafer stepper. The BMF’s ASML 5500/80 wafer stepper must be able to run its internal overlay calibration with the reticle that is supplied by the contractor without any modification to the reticle, the ASML 5500/80 stepper, or any software.

Item 2: Quanity one (1) focal – 80 reticle for ASML 5500/80 wafer stepper. ASML part number

9428.999.64470 or equivalent.

Specifications:

- The size of the reticle shall be consistent with a SEMI spec 6” photomask. The reticle must be quartz and be free from any chips, cracks, or other defects.

-The reticle shall be a focal – 80 reticle for ASML 5500/80 wafer stepper: ASML part number

9428.999.64470 or equivalent.

- The reticle shall be able to be used as the reticle required for the standard focus calibration for an ASML 5500/80 wafer stepper. The BMF’s ASML 5500/80 wafer stepper must be able to run its internal focus calibration with the reticle that is supplied by the contractor without any modification to the reticle, the ASML 5500/80 stepper, or any software.

SHIPPING & DELIVERY

The two reticles shall be packed in a method that is compatible for the reticles to be delivered to an ISO class 5 cleanroom.

INSPECTION AND ACCEPTANCE

Within 30 days of receipt of the reticles, the Government will run a test overlay and focus calibration with the supplied reticles to ensure that they can be properly used by the ASML 5500/80 wafer stepper to perform its required calibration.