Revised_SOW.pdf

Statement of Work

BMF Tystar Furnace Service Contract

NB6871000-19-02188

1. Background Information:

a. NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett

Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is the Tystar MiniTytan 4600 furnace. This tool is a critical piece of the BMF infrastructure used to deposit high-quality dielectric films onto substrates. In order to keep a high tool uptime, the BMF requires a service contract to maintain this tool and offer support if the tool becomes inoperable.

2. Scope of Work:

a. Objectives:

i. The goal of this contract is to provide a service contract for the BMF’s

Tystar MiniTytan 4600 furnace for atmospheric and Low-Pressure Chemical Vapor Deposition (LPCVD) tube changes, an annual Preventative Maintenance (PM), and emergency maintenance visits.

b. General:

i. The contractor shall:

1. Provide personnel that have been factory trained in the service and maintenance of a Tystar MiniTytan 4600 by the original manufacturer (Tystar). This condition shall be supported by appropriate documentation.

2. Provide personnel that pass required government background checks to be issued badges for work on site.

3. Provide a bid proposal which details all planned materials, consumables, travel, labor, equipment, and expenses.

ii. Specifications for the Work:

1. All staff from selected vendor must be badged by NIST Security.

No one may enter the site without a badge.

2. The work shall be scheduled with the TPOC prior to arrival to do the work.

c. Specific Requirements:

i. At a date to be coordinated after award of contract, the contractor shall provide a PM service to ensure that the Tystar MiniTytan 4600 furnace is operating according to OEM specifications.

1. The contractor shall provide a PM service according to OEM specifications using OEM parts. Exact requirements are listed in the attached document: “Tytan Preventive Maintenance Procedure.” The contractor shall perform every task listed in this document for each tube and the furnace as a whole except rebuilding or replacing the vacuum pumps. In addition, the contractor shall provide a backup of the configuration and recipe files.

2. The PM service shall be performed in a method that is compatible with an ISO class 5 cleanroom.

3. The contractor shall be responsible for providing all parts and labor required for this PM service.

4. The contractor shall be responsible for all travel expenses.

5. After completion of the PM service, the tool must be able to operate according to OEM specifications or better.

ii. For a period of a year, the contractor shall provide the following optional services on the BMF’s Tystar MiniTytan 4600 furnace at the Governments request:

1. Tube Replacements:

a. Replacement of an Atmospheric Tube:

i. The contractor shall replace the process tube according to OEM guidelines including replacing the process tube and all gaskets and o-rings with OEM parts.

b. Replacement of an LPCVD Tube:

i. The contractor shall replace the process tube according to OEM guidelines including replacing the process tube and all gaskets and o-rings with OEM parts.

c. Any parts, labor and travel required for these tube replacements will be charged to a separate, not to exceed dollar amount, tube replacement line item.

d. The tube replacements service shall be performed in a method that is compatible with an ISO class 5 cleanroom.

e. After completion of the PM service, the tool must be able to operate according to OEM specifications or better.

2. If the Tystar MiniTytan 4600 furnace no longer operates according to OEM specifications, the contractor shall perform emergency maintenance on the furnace in order to repair the tool to OEM specifications.

a. Any parts, labor and travel required for this emergency maintenance will be charged to a separate, not to exceed dollar amount, emergency maintenance line item.

b. The emergency maintenance shall be performed in a method that is compatible with an ISO class 5 cleanroom.

c. After completion of the emergency service, the tool must be able to operate according to OEM specifications or better.

d. If it is determined that the most cost-effective way to repair the tool is for the Government to purchase a replacement part from the contractor and install it with Government personnel, this optional line item can be used to procure spare parts.

3. Within one week of each service visit, the contractor shall provide a report detailing all of the services that were performed.

3. Period of Performance:

a. 1-year ARO with the option for four additional years.

4. Place of Performance:

a. All work shall be performed at the 325 Broadway, Boulder, Colorado location.

b. Access to Building 81 shall be granted to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel will be the sole responsibility of the contractor.

5. Government Furnished Property:

a. N/A

6. Deliverables

a. Within one week of each service visit, the contractor shall provide a report detailing all of the services that are performed.

b. The contractor shall provide a backup of the configuration and recipe files.

7. Attachments:

a. Tytan Preventive Maintenance Procedure.pdf

8. Performance Requirement Summary

Task Performance

Indicators Performance Standards

Acceptable Quality Level

Surveillance Method

The contractor shall provide a service contract to the BMF’s Tystar MiniTytan 4600 furnace according to the specifications in Section 2.

The BMF’s Tystar MiniTytan 4600 operates at OEM specifications or better and if the tool is inoperable, the contractor provides emergency maintenance in accordance with the guidelines in section 2.c.

The technical requirements defined in the statement of work section 2 are performed in a timely manner as defined in section 2.c.

The BMF’s Tystar MiniTytan 4600 furnace operates at OEM specifications or better.

Repairs or replacements are completed with OEM parts by factory trained staff.

Visual verification of the completed work and the Tystar MiniTytan 4600 furnace operates at OEM specifications or better.

9. Travel:

a. The contractor shall cover all travel expenses.

10. Contractor Supplied Materials

a. The contractor shall supply all materials required for the service and maintenance of the Tystar MiniTytan 4600 furnace.

11. Contractor’s Minimum Qualifications

a. The contractor shall:

i. Provide personnel that have been factory trained in the service and maintenance of a Tystar MiniTytan 4600 furnace by the original manufacturer (Tystar).

ii. Provide personnel that pass required government background checks to be issued badges for work on site.