Specifications_Document.pdf

UNITED STATES DEPARTMENT OF COMMERCE

National Institute of Standards and Technology

Acquisition Management Division

325 Broadway

Boulder, CO 80305-3328

Specifications Document

Soda-Lime Reticle Blanks

March 19, 2018

Background: The Boulder Micro-Fabrication Facility (BMF), along with the National Institute of

Standards and Technology (NIST) patterns and utilizes master reticle blanks (AKA: Masks) to fabricate microelectronics circuits. These reticles are patterned “in-house” using an optical pattern generator, and then are used in the optical wafer stepper to transfer the pattern onto the wafer being processed.

Purpose: To acquire 6” reticle blanks made to exacting semiconductor standards (SEMI Spec SEMI P1-

0708). These reticles consist of a 6” square transparent substrate (soda-lime glass) coated with a Chromium

(Cr) based opaque material and photoresist. BMF requires quantity 800 plates.

Technical Specifications: The contractor shall meet following technical specifications:

• Material: Soda lime glass.

• Size: Min 151.6 mm / Max 152.4 mm (nominal 6”).

• Thickness: 3.05 +/- 0.1 mm (nominal 0.12”).

• Squareness: < 8 parts/thousand.

• The following must be met in a circle of quality of 100 mm diameter.

• Flatness: 15 m or better.

• Cr nominal thickness: 95 nm -115 nm.

• Cr thickness variation: < 10 nm.

• Optical density: > 3 @ 365 nm.

• Pinholes: 0 > 5 m.

• Photoresist: AZ1350 or equivalent – 500 nm thick.

• Surface particles: 0 > 10 m.

Technical Considerations: Must conform to SEMI Spec SEMI P1-0708: “Specifications for hard surface photomask substrates.”

Deliverable Schedule: Delivery shall be required in multiple shipments, that is, Initial shipment of 400 reticles, and subsequent reticles (in lots of 80) delivered within 14 days of request by NIST Technical Point of Contact (TPOC). Period of Performance (POP) as follows:

Line Item Item Description Periods of Performance

Base Year Soda-Lime Reticle Blanks 6/1/2018 - 5/31/2019

Opt I Soda-Lime Reticle Blanks 6/1/2019 - 5/31/2020

Opt II Soda-Lime Reticle Blanks 6/1/2020 - 5/31/2021

Opt III Soda-Lime Reticle Blanks 6/1/2021 - 5/31/2022

Opt IV Soda-Lime Reticle Blanks 6/1/2022 - 5/31/2023

Delivery Location: The contractor shall deliver to Department of Commerce, National Institute of

Standards and Technology Building 22, Shipping and Receiving, 325 Broadway, Boulder, CO 80305-3328.

Inspection and Acceptance: The equipment will be inspected and tested to ensure it meets all technical specifications prior to acceptance.