Statement_of_Work.doc

STATEMENT OF WORK

PURPOSE:

NIST requires an upgrade to ion-beam-etch ion-beam-deposition system that is installed in the NIST Boulder cleanroom. The 3 cm ion source and power supply needs to be upgraded to provide a more stable more highly focused beam for more reliable deposition.

TECHNICAL SPECIFICATIONS:

1. NIST requires removal and disposal of existing 3cm ion source and power supply.

2. NIST requires a focused filamentless 4 cm ion gun compatible with the existing system geometry and associated power supply and cabling. The new 4 cm gun must mount on the existing 10 inch conflat flange and must be position to be aligned with the deposition targets and not infer with the rotating sample stage. The gun design must demonstrate that the ion beam can be fully contained on the 4 inch targets.

3. The 4 cm ion gun must include a filamentless neutralizer and associated power supply and cabling. The neutralizer must be consistent with the existing deposition geometry

4. The upgrade must include a software upgrade to allow the new ion gun to work with the control software.

5. The upgrade must include two gas flow channels required for the ion gun and neutralizer.

6. The upgrade must include electrical connection of the new gun, ionizer and gas flow systems.

7. The installation must be done on site in the NIST Boulder clean room.

8. The upgrade must include a 12 month warrantee on parts.

DELIVERABLE SCHEDULE:

12 weeks after placement of order