Two Magnetically levitated 300 l-s turbo Specifications.docx

Specifications for Magnetically levitated turbo-molecular pump (TMP)

General Description:

NIST requires 2 identical, oil-free magnetically levitated turbo-molecular pumps (TMPs) for use on an ultra high vacuum (UHV) deposition chamber. The TMPs must be rated with a pumping speed of at least 300 L/s with a molecular drag stage to accommodate high foreline pressures.

Specifications:

This description if for both magnetically levitated turbomolecular vacuum pumps that will be used for a UHV process/deposition vacuum chamber.

1. The TMPs must have an ultimate pressure rating less than or equal to 10^-10 Torr. (this is the operating pressure of the system)

2. Must be lubricant free (oil free) with completely magnetically levitated bearings.

3. Must have a self contained protection mechanism that powers the magnetically levitated bearing and allows the TMP to spin down safely in the event the external power is cut-off to the controller/pump (e.g. during a power failure). Preference is given a systems that do not use or rely on battery backup.

4. Must have a pumping speed of at least 300 L/s.

5. Must have a molecular drag stage to accommodate high foreline pressures (up to 1 Torr preferable). This translates to a compression ratio for nitrogen greater than 10^10

6. Must connect to a 6 inch UHV conflat (CF).

7. Must be able to operate and mount in any geometry/orientation (especially in both a horizontal and vertical position).

8. Must include the controller/power supply and all necessary cables/hardware needed to operate the TMP.

9. The TMP must be water cooled versus fan cooled. Fan cooling is okay on the controller.

10. Both units must be new and identical models. Used or rebuilt systems will not be considered.

11. Must have at least a 1 year warranty.