NB686090-19-02965_Specs.pdf

SPECIFICATIONS

NON-CONTACT MM-WAVE PROBE STATION

The Quantitative Nanostructure Characterization group in PML seeks to acquire a non-contact, two-port probe station for mm-wave (~100 GHz to ~1.0 THz) measurements of on-wafer devices. The probe station must be compatible with existing mm-wave test platform components, including a vector network analyzer, mm-wave extension modules, and diagonal feed horns. The probe station will support ongoing NIST programs in mm-wave device and materials characterization for a wide variety of applications, including biological sensing, measurement calibration, and wireless communications.

Conventional on-wafer characterization at mm-wave frequencies is performed by use of probes that make physical contact with the device (e.g. ground-signal-ground probes). Recently, probe stations have been developed that do not require physical contact with the sample. Rather, they couple electromagnetic waves from free space into the device via on-wafer antenna structures, thereby eliminating contact probes that suffer from mechanical wear. The Quantitative

Nanostructure Characterization group seeks a non-contact probe station as an alternative approach that will complement NIST’s existing contact-probe-based systems. The waveform generator shall have the following technical specifications:

Non-contact mm-Wave Probe Station

Spec 1.1 Operating frequency range from 100 GHz to 1 THz or better

Spec 1.2 Supports two-port measurements

Spec 1.3 Transmits and receives mm-Wave signals to/from on-wafer devices without any physical contact between probing elements and the device.

Spec 1.4 Includes all mm-Wave optics (including mirrors and lens) for guided transmission of mm-Wave signals.

Spec 1.5 Includes all hardware necessary for proper manual alignment and focusing of the mm-

Wave signal onto on-wafer devices.

Spec 1.6 Must be compatible with NIST supplied mm-Wave test equipment (see “Government-furnished material / equipment below).

Spec 1.7. Sample stage should be compatible with sample sizes up to and including 4-inch (200

mm) wafers.

Spec 1.8 Includes mechanical stage for adjusting the lateral and rotational position of on-wafer devices under test relative to the mm-Wave signal path.

Spec 1.9 Includes optical microscope for optical monitoring of sample position. The optical microscope should interface with a laptop or desktop computer via a standard interface (e.g.

USB). Corresponding software and/or device drivers should be included.

Spec 1.10 Vendor will provide layouts for appropriate on-wafer antennas and/or baluntennas that are required for the measurements, e.g., as a GDS file.

Government-furnished material / equipment

The government will provide the following test platform components:

a. Two-Port Vector Network Analyzer (e.g., Agilent/Keysight E8361 or equivalent)

b. mm-wave Extension Modules (e.g., Virginia Diodes Inc VNA extension module or equivalent)

c. Diagonal feed horns

NIST can provide a desktop or laptop computer (e.g., Windows 10 PC) for operating software.

NIST lab space includes conventional U. S. power outlets, i.e. 60 Hz, 120 V, which are available for use with the system.