00510_SOW.doc

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Sources Sought Electrogrip Electrostatic Chuck
Solicitation number
NB686020-12-00510
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SOW Electrostatic Chuck

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STATEMENT OF WORK

PURPOSE:

To obtain a spare electrostatic chuck for our PlasmaQuest ECR Vacuum Depositon System to prevent an extended research delay of dozens of scientists using the NIST-Boulder Fabrication facility if the current chuck fails.

TECHNICAL SPECIFICATIONS:

Rebuild for 76mm wafer size Electrogrip CP series chuck puck with sapphire surface. Must grip silicon wafers with more than 10 Torr He backpressure and less than 0.2 sccm leak rate and be suitable for operation without loss of grip in a high-density ECR deposition system.

Requested Delivery Date: 1/27/2012

File details come from the government source that posted it. Updated .