NB647050-19-01938_SOW.pdf

Statement of Work

ULTRA-HIGH VACUUM COMPATIBLE SCANNING ELECTRON MICROSCOPY COLUMN

AND SECONDARY DETECTOR

BACKGROUND

The National Institute of Standards and Technology (NIST) Applied Chemicals and Materials Division has a program to develop a next-generation atom probe tomograph that uses femtosecond pulsed extreme ultraviolet radiation to trigger field ion emission in a sample. As part of this effort, NIST will incorporate in situ scanning electron microscope (SEM) capabilities into the ultra-high vacuum (UHV) analysis chamber of an existing CAMECA LEAP3000X-Si atom probe tomograph for real-time specimen shape imaging and sample and electrode alignment.

SPECIFIC REQUIREMENTS:

(1) SEM capabilities shall consist of: A fully UHV-compatible field emission (Schottky) electron source. Such an SEM source (colloquially known as an electron “gun”) is required to be fully compatible with the existing CAMECA LEAP3000X-Si atom probe tomograph UHV chamber.

The gun must be fully bakeable to at least 120 °C. A variable working distance of at least 14 mm to accommodate the existing contents of the UHV chamber is required. The accelerating voltage shall be variable between 0.5 kV and 30 kV. The spatial resolution shall be at least 15 nm at 14 mm working distance and 30 kV. The source shall have motorized apertures, a gun valve, beam blanker, Faraday cup for directly measuring the beam current.

(2) SEM capabilities shall consist of: A port aligner for the electron source must be compatible with the CAMECA LEAP3000X-Si atom probe tomograph, and that gives the ability to obtain the required working distance when installed. The port aligner is required because the specimen location is not fixed in space.

(3) SEM capabilities shall consist of: A UHV-compatible, bakeable secondary electron detector that fits on a CF 35 port and is fully compatible with the CAMECA LEAP3000X-Si atom probe tomograph UHV analysis chamber.

(4) All high-voltage supplies, control electronics, acquisition software, scan generators, equipment racks, bake heaters and controllers, vacuum pumps, user interface, computers, electron control panel, and any additional hardware or software that is not specifically mentioned here that is required to operate the UHV-compatible scanning electron source as a standard SEM microscope for secondary electron image collection.

(5) Documentation: The vendor shall provide a complete set of installation instructions for all of the components that are installed and/or required for the operation of the instrument and associated hardware. Electronic format (Word, PDF) and/or paper copies are acceptable.

(6) Documentation: The vendor shall provide a complete set of operating and maintenance instructions for all of the components that are installed and/or required for the operation of the instrument and associated hardware. Electronic format (Word, PDF) and/or paper copies are acceptable.

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(7) Software: Any computers for control of hardware or interfacing with hardware that require network connectivity to operate (e.g., require internet access for updates) will be Windows 10 operating system. If the computer does not require internet access for operation or updates, other operating systems are acceptable.

(8) Delivery: The vendor shall coordinate, oversee, and pay for delivery (FOB or Origin) to the NIST Boulder campus.

(9) Installation: The vendor shall install the instrument onto/in the CAMECA LEAP3000 as described above. The vendor will coordinate and oversee any riggers or rigging hardware (e.g., crane) that is required for installation. Any 3rd party contractors must be approved by NIST.

NIST can provide a list of pre-approved riggers upon request. NIST can provide access to pallet jacks and a freight elevator upon request.

(10) Site access for non-US Citizens or non-permanent U.S. residents (e.g., “green card holders”) for times longer than three days requires 90 days prior notice. Site access by foreign citizens for three days or less requires one-week advance notice. Names, birthdates, passport numbers, and any other personally identifiable information (e.g., “PII”) as required by law to access the federal campus shall not be provided to NIST by phone.

(11) Coordination: If a site survey is required (for room measurements, environmental assessment, etc.) the vendor shall coordinate with NIST 30 days in advance. NIST may be able to provide some information by telephone or with photographs or technical drawings upon request.

(12) Operations training: Upon installation, the vendor must coordinate with NIST to provide three NIST personnel with on-site operations training. The training shall provide a thorough demonstration of all equipment functions, maintenance, data administration, and basic troubleshooting. The training shall also include basic installation training should the need to install this equipment on a different LEAP microscope that arises in the future. The training may be completed at NIST immediately following installation and demonstration of performance specifications, but no later than 30 days after installation and acceptance.

OTHER

(1) The RFP response shall include estimated freight charges.

(2) The RFP response shall include a warranty of at least one year from the date of acceptance. The RFP response should include a full description of the terms and coverage provided by the warranty.

(3) The RFP response shall include a service agreement for the first year (if this is not already covered by the warranty). The RFP response shall include a full description of the terms and coverage provided by the service agreement. The terms “service agreement” and “service contract” are variously used, have the same meaning, and are interchangeable.

(4) All equipment shall be new.

(5) The system shall meet conventional standards for safety, including those related to electrical components, mechanical components, and optical components.

(6) The vendor’s RFP response shall include a list of multiple, U.S.-based references of similar systems previously sold, suitable for the evaluation of past performance, system reliability, user experience, and customer support.

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PRE-SHIPMENT REQUIREMENT

Before shipping the SEM, the vendor shall provide the Government with a factory acceptance report demonstrating that the SEM source performs according to specifications. This should include quantitative data that demonstrate that it meets all technical specifications. The Government reserves the right to be present during the factory acceptance test. The SEM source must meet the above requirements before it is shipped to NIST.

ACCEPTANCE

Within one week of the completion of the work, the vendor shall provide the TPOC a report of the work done, the results of the test before and after installation, and any issues encountered

WARRANTY

The initial warranty for all instruments and related equipment shall be for a period of no less than one year after NIST acceptance. Warranty shall include unlimited telephone/email support, during the warranty period, for questions regarding operation. This warranty shall cover non-consumable parts and travel/labor on site should this become necessary within the warranty period. The system purchase must include a guarantee of service support on-site within 1 week during the warranty period.

TRAVEL

The vendor shall be responsible for all travel expenses

VENDOR SUPPLIED MATERIALS

The vendor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

DELIVERY DATE

Within two years and six months of the initial award, NIST will specify a required delivery date for the instrument. NIST will provide the vendor with 180 days prior written notice (via email) of request for on-site delivery. On-site installation shall commence no more than 60 days after instrument delivery, and training shall commence no more than 30 days after installation and acceptance.

GOVERNMENT FURNISHED PROPERTY

Not applicable.

PERIOD OF PERFORMANCE

See Clause 1352.270-70, Period of Performance. Warranty is 1 year after written acceptance of the system.

COMPLIANCE WITH NIST RULES AND REGULATIONS

While on the NIST campus, the Contractor’s representative(s) shall abide by all NIST rules and regulations. The Contractor shall provide all information necessary for the TPOC to authorize entrance to the NIST campus in accordance with NIST Security Policy and Procedures.

OPTIONS (SEPARATELY PRICED) :

(a) Warranty extension 1: The cost of one additional year of warranty following the initial warranty expiration date.

(b) Warranty extension 2: The cost of one cost of one additional year of warranty following the

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(c) Warranty extension 3: The cost of one cost of one additional year of warranty following the second warranty extension expiration date.

(d) Future hardware and/or software upgrades: NIST shall have the option to purchase future upgrades on the system hardware and/or software that might become available within two years of acceptance.

(e) Factory installation training for two NIST personnel: At the discretion of NIST, we may opt for additional installation training for the instrument and hardware at the vendor site.

(f) Factory acceptance testing for two NIST personnel: At the discretion of NIST, we may opt to perform factory acceptance testing of the instrument and hardware at the vendor site. Subsequent delivery to NIST would be within 30 days of factory acceptance; on-site installation (by the vendor as described above) shall commence no more than 60 days after acceptance, and training shall commence no more than 30 days after installation.

(g) Installation of the equipment on a different LEAP or another system within 5 years of the award.

CONFIDENTIALITY

The information developed under this contract is the property of the U.S. Government and shall be kept in strict confidence