P_W_ S_Probe_Procurement_and_ Installation.docx

PERFORMANCE WORK STATEMENT

FOR THE INSTALLATION OF A MANUAL VACUUM PROBE STATION

AT THE UNITED STATES NAVAL ACADEMY, ANNAPOLIS, MD

1.0 BACKGROUND:

The Electrical Engineering curriculum at the United States Naval Academy has a number of courses that involve understanding the electrical responses of fabricated semiconductor devices to applied voltages and currents. These courses may involve short laboratory experiments or longer research projects with a focus on how specific devices react to electrical stimuli. A probe system is an arrangement of tools that allows a student or researcher the ability to make electrical contact with semiconductor devices that have been fabricated on wafers or pieces of wafers. The experiments and projects require the ability to make up to 4 electrical contacts with microscopic features (requiring 100X magnification) on semiconductor wafers; the ability to source potential differences between these contacts in the range from 0 V to 10 kV without atmospheric breakdown, the ability to source currents up to 10 A, the ability to measure voltages down to 1 mV, the ability to measure currents down to 1 nA, and the ability to source and measure electrical signals up to microwave frequencies.

2.0 OBJECTIVES:

A probe system is required by the electrical and computer engineering department for use in Electrical Engineering major courses related to semiconductor devices such as EE344, Solid State Power Electronics, and EE451, Electronic Properties of Semiconductors. In addition, capstone projects on device characterization of uniquely fabricated semiconductor structures and device characterization of structures fabricated with unique materials and processes. This work shall be completed in accordance with the performance standards detailed below.

3.0 SCOPE:

The contractor shall provide a manual vacuum probe station (to include install) in accordance with the requirements detailed in this Performance Work Statement (PWS).

4.0 REQUIREMENT:

The contractor shall provide all labor, travel, parts, materials, and services to install the probe station in accordance with the specifications below and ensure that all associated equipment is in proper functional operating condition.

4.1 Physical Specifications:

· Maximum Dimensions:

· Length: 1.6 m

· Width: 1 m

· Height 2 m

· Test Area: minimum 200 mm diameter disk

4.2 Other Specifications:

· System shall permit device testing at potentials up to 10 kV.

· System shall be upgradable to permit device testing at currents up to 10 A.

· System shall permit sensing of signals down to the 1 mV range and the 1 nA range.

· System shall be able to contact at least 4 different electrical contacts at the same time.

· System shall permit electrical signal sourcing and measurement through the stage to the bottom of the device under test.

· System shall permit movement of the stage/probes to accommodate electrical contact to devices that are located on different locations on the surface of the wafer at different times.

· System shall be upgradable to permit temperature variation on the thermal sample stage from ~50 Kelvin to 500 Kelvin.

· System shall interface with triaxial, coaxial, BNC, and banana plug connectors for interfacing to external sourcing and measurement systems.

· System shall have at least 100X magnification capability.

· System shall be upgradable to permit radio frequency and microwave frequency signal testing on devices.

· System shall be upgradeable to permit measurements with the device under test shielded from ambient room light.

· System shall be upgradeable to permit detection of light emanated from the device under test.

4.3 Additional Integrated Systems:

· System shall be able to interface with the Keysight Technologies 1505A Power Device Analyzer/Curve Tracer with a B1511B-FG Medium Power Source Monitor Unit Module, a B1512A-FG High Current Source Monitor Unit Module, a B1513C-FG High Voltage Source Monitor Unit Module, and a B1514A-FG Medium Current Source Monitor Unit Module.

· System shall be able to interface with the Keysight Technologies 1500A Semiconductor Device Analyzer.

4.4 Installation and Integration Requirements: The contractor will provide installation and integration of the complete system to include the following:

4.4.1 Installation of the vibration isolation table.

4.4.2 Installation of a complete 200 mm semiautomatic vacuum probing system which includes a vacuum prober, control electronics, and a 200 mm programmable X, Y, Z, and theta stage.

4.4.3 Installation of a 300 mm triaxial chuck (ambient pressure) used for DC requirements, a 200 mm 10 kV triaxial chuck for vacuum testing (ambient temperature), and a probe card holder.

4.4.4 Installation and integration of a vacuum pumping system and accessories.

4.4.5 Installation and demonstation of a large microscope bridge, a microscope movement and adapter kit, a zoom tube with motorized zoom, and a CCTV system.

4.4.6 Installation of a PC, monitor, keyboard, mouse, and PILOT software suite. The PILOT software suite (or equivalent) shall be configured to operate all test equipment in both the ambient pressure and the vacuum pressure configurations.

4.4.7 Installation of wiring and placement of four programmable manipulators.

4.4.8 Setup and demonstration of the system in the ambient pressure configuration using standard samples of semiconductor devices.

4.4.9 Setup and demonstration of the system in the vacuum configuration at 10^-5 torr using standard samples of semiconductor devices.

4.4.10 Setup and testing of all the manipulators, probe arms, and tips.

4.4.11 Two to three days of on-site installation, verification, and operational training for three technical personnel for the entire system including all system configurations and installed options.

4.5 Delivery Times: The probe station shall be completely installed and in working order by November 1, 2020.

5.0 QUALITY CONTROL:

Upon completion of the installation and the contractor’s testing of the equipment installed, representatives from the ECE department will ensure the performance standards of this PWS are met within the quality levels, delivery, and other standards of the contract. If performance is within acceptable levels, it will be considered satisfactory. If not, overall performance may be considered unsatisfactory.

The contractor’s failure to achieve satisfactory performance under the contract/task order may result in termination of the contract/task order and may also result in the loss of future Government contracts/task orders. The contractor’s failure to achieve satisfactory performance under the contract may result in the non-exercise of available options. For each item that does not meet acceptable levels, the Government may issue a Contract Discrepancy Report (CDR). CDRs will be forwarded to the Contracting Officer with a copy sent to the contractor. The contractor must reply in writing within five days of receipt identifying how future occurrences of the problem will be prevented. Based upon the contractor’s past performance and plan to solve the problem, the Contracting Officer will determine if any further action will be taken.

6.0 PLACE OF PERFORMANCE:

The contractor shall install the probe station in the Rapid Prototyping Lab in Hopper Hall, Room 37 at the United States Naval Academy in Annapolis, Maryland.

7.0 Combatting Trafficking in Person (CTIP):

The Department of Defense (DOD) has a zero tolerance policy regarding trafficking in persons. FAR Subpart 22.17: Prescribes overall federal regulation implementing 22 U.S.C. 7104 which applies to all acquisitions. Requires government contracts to (a) Prohibit contractors, contractor employees, subcontractors, and subcontractor employees from engaging in trafficking in persons during the period of performance of the contract. See FAR Provision 52.222-56 and FAR Clause 52.222-50.

8.0 Enterprise-wide Contractor Manpower Reporting Application (ECMRA):

The CONTRACTOR SHALL report CONTRACTOR labor hours (including Sub-Contractor labor hours) required for performance of services provided under this contract via a secure data collection site.

Contracted services excluded from reporting are based on Product Service Codes (PSCs). The excluded PSCs are:

· W, Lease/Rental of Equipment;

· X, Lease/Rental of Facilities;

· Y, Construction of Structures and Facilities

· D, Automatic Data Processing and Telecommunications, IT and Telecom-

· Telecommunications Transmission (D304) and Internet (D322) only;

· S, Utilities ONLY;

· V, Freight and Shipping ONLY.

The Contractor is required to completely fill in all required data fields using the following web address https://www.ecmra.mil