MEMs_-_SOW_rev6.doc

STATEMENT OF WORK

Microelectromechanical Systems (MEMS) Fabrication Support Services 1.0

GENERAL

1.1 Introduction

The Naval Surface Warfare, Indian Head Explosive Ordnance Disposal Technology Division (NSWC IHEODTD) requires microelectromechanical systems (MEMS) fabrication at the Army Research Laboratory (ARL) cleanroom facility in Adelphi, MD. The Government requires support from a company that has a Cooperative Research and Development Agreement (CRADA) in place and accepts external designs and process flows as well as allows Government employees to shadow Contractor employees through the manufacturing processes.

1.2 Scope

The Contractor shall fabricate, inspect and deliver Silicon-on-Insulator (SOI) MEMS devices designed by the Government in accordance with specified drawings for each fabrication, as listed in the applicable documents section 2.0.

2.0

APPLICABLE DOCUMENTS

Drawings will be provided by the Government on a task order basis.

3.0

REQUIREMENTS

3.1 The Contractor shall provide the necessary base Silicon wafers required for completion of microelectromechanical systems fabrication after the existing government supply of (6) 150mm Silicon-on-Insulator are exhausted. Any unused wafers shall be transferred at no cost to the Government at completion of contract. The Contractor shall allow a 4-6 week lead time for ordering the wafers.

3.2 The Contractor shall review the mask designs and provide advice as needed for step inspections, mask alignment or fabrication. Once the photolithography mask designs are approved, the Contractor will make the masks.

3.3 The Contractor shall develop processing sequences matching the desired tool set for the fabrication of the device(s) in consultation with the Government. The majority of these tools will reside at the ARL cleanroom.

3.4 The Contractor shall perform MEMS fabrication processing steps including one-sided strip of thick low-stress Silicon Nitride (SiN) film, aligned shadow mask, conformal deposition of a metal, low-impact dicing (or alternative methods), and Hydrofluoric Acid vapor release.

3.5 The Contractor shall process the number of wafers detailed in the task orders issued under this contract.

3.6 The Contractor shall inspect the wafers after the critical steps and the results shall be posted by the Contractor on a secure webpage visible to the Government only. Requirements for inspection derive from the drawing package.

3.7 The Government requires approval rights after critical processing steps before proceeding. Critical steps include Deep Reactive Ion Etching (DRIE), Silicon Nitride deposition, metal deposition, Hydrofluoric Acid vapor release and dicing.

4.0

DELIVERABLES

4.1 The Contractor shall provide the completed inspected wafers to the Government according to the individual task orders.

4.2 The Contractor shall prepare and submit monthly progress reports (CDRL A001).

4.3 The Contractor shall provide a final report after completion of the fabrication summarizing the collected data and findings (CDRL A002).

4.4 The Contractor shall verbally provide additional progress summaries during regularly scheduled bi-weekly teleconference calls.

5.0

SECURITY

Personnel associated with this contract are not required to have a DoD security clearance. All deliverables associated with this SOW shall only contain “UNCLASSIFIED” information and materials.

6.0 Enterprise-wide Contractor Manpower Reporting Application (ECMRA)

The contractor shall report contractor labor hours (including subcontractor labor hours) required for performance of services provided under this contract for the MEMS fabrication support services via a secure data collection site. Contracted services excluded from reporting are based on Product Service Codes (PSCs). The excluded PSCs are:

(1) W, Lease/Rental of Equipment;

(2) X, Lease/Rental of Facilities;

(3) Y, Construction of Structures and Facilities;

(4) D, Automatic Data Processing and Telecommunications, IT and Telecom- Telecommunications Transmission (D304) and Internet (D322) ONLY;

(5) S, Utilities ONLY;

(6) V, Freight and Shipping ONLY.

The contractor is required to completely fill in all required data fields using the following web address https://doncmra.nmci.navy.mil.

Reporting inputs will be for the labor executed during the period of performance during each Government fiscal year (FY), which runs October 1 through September 30. While inputs may be reported any time during the FY, all data shall be reported no later than October 31 of each calendar year. Contractors may direct questions to the help desk, linked at https://doncmra.nmci.navy.mil.