Gas System Specifications.pdf

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Attached to
RFI - Gas System Federal contract opportunity
Solicitation number
N00173-25-RFI-GF32
Issued by
Department of the Navy Secretary of the Navy Office of Naval Research

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RFI Sources Sought Instructions - Gas System.pdf PDF

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6/29/2025 Rev 1

1 Gas Cabinets GAS FLOW GAS FLOW

a. Two cylinder automatic gas cabinet NH3 Nitrogen Purge

b. Three cylinder automatic gas cabinet H2S H2Se Nitrogen Purge

c. Three cylinder automatic gas cabinet H2 CH4 Nitrogen Purge

2 Gas Panels

a. Argon UHP Three valve gas panel Argon

b. Nitrogen UHP three valve gas panel Nitrogen

3 Hazardous Gas Detection System

a. Fully Installed and validated system

b. 16 gas detectors

c. Central PLC system with touchscreen

d. Two light trees-one in room-one outside e Remote display outside room

f. Wired interfaces to tool, gas cabinets and facility

g. Low voltage signal and power wiring

Connect to facility as required Supply power by others

4 Ultra-high Purity Piping

a. All interconnect 316 L Electro-polished

b. Piping as defined on attached quotation

5 Analytical testing

a. All systems pressure tested-4 hours

b. All systems helium leak tested to

1.0 x 10-8 atm-cc/sec

c. Purity testing including particles, Moisture and Oxygen trace testing optional

Naval Research Laboratory- B3 Room 230 MOCVD Laboratory

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