Hardware Specifications.pdf

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Hardware for High Temperature (1200°C) Thermco Brand Furnace
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N00173-23-Q-0703
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Hardware for High Temperature (1200°C) Thermco Brand Furnace Specifications

The High Temperature Thermco (1200°C) Brand Furnace processes up to 6" silicon and silicon carbide wafers (substrates). The "hardware" needed for this procurement consists of the following:

• Silicon carbide 6" boat that can withstand 1200°C and hold up to 50 substrates

• Silicon carbide tube for 6" substrates that can withstand 1200°C

• Lifting fork to lo load the 6" boat into the furnace

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