FINAL REQUIREMENTS.docx

Requirements Document Dicing Saw And Accessories

I. BACKGROUND

The National Institute of Standards and Technology (NIST) requires a Dicing Saw and Accessories to support nanofabrication in the nanotechnology user facility. The Dicing Saw and Accessories will be sited and used in the CNST NanoFab as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies.

In support of the CHIPS Act, the National Institute of Standards and Technology is acquiring nano fabrication and nano characterization equipment that will address the major metrology research and development grand challenges for the reliable production of next-generation microelectronic devices

II. GENERAL DESCRIPTION

A dicing saw is a stand-alone piece of equipment used to divide wafers or pieces of wafers into individual chips. It is used once the wafer-level processing steps have been completed. Its accessories consist of a wafer mounter system to affix the wafer to a film of dicing tape.

All items must be new. Prototypes, first articles, demonstration models, used, refurbished or otherwise developmental systems, will not be considered for award.

III. MINIMUM REQUIREMENTS

Contract Line Item Number (CLIN) 0001: The Contractor shall provide one (1) diciing saw and accessories in accordance with the following specification:

1. DICING SAW SPECIFICATIONS

a. The tool shall be floor mounted (i.e. not table-top).

b. The tool shall accept wafers up to 300 mm in diameter.

c. The tool shall be capable at a minimum of dicing standard wafers of silicon, various glasses, fused silica, quartz, sapphire, silicon carbide, lithium niobate, as well as pieces of wafers.

d. The tool shall be equipped with a touchscreen based graphical user interface (GUI).

e. The GUI shall be user friendly and allow the user to create dicing recipes, stored for later reuse.

i. Provision to automatically save the dicing recipes to a USB drive as backups.

ii. Software for circle cuts and muti angle cuts

f. Computer

i. Industrial PC

ii. Windows 10 operating system

iii. 17” LCD touchscreen monitor

iv. Keyboard and mouse

g. Chuck

i. The chuck shall be held in place by vacuum suction.

ii. The wafer shall be held on the chuck by vacuum suction

iii. The chuck shall be made of porous ceramic

iv. The chuck shall be of the quick-change type

v. One chuck for 12” wafers

vi. A second chuck for 8” and smaller wafers.

h. Spindle: single spindle

i. Size: 2” in diameter

ii. Front mounted for optimum stability/minimum vibration

iii. Power: equal to or greater than 1.8 kW at 60,000 rpm

iv. Air bearing

v. Equipped with locking mechanism for changing blades.

i. X-axis

i. Closed loop

ii. Ceramic air bearing to optimize cut quality and ensure low maintenance

iii. Travel: 400 mm

iv. Allows to move optics from one edge of a 300 mm wafer to the opposite end

j. Y-axis

i. Closed loop with 1 um index accuracy

ii. Travel: 310 mm

k. Z-axis

i. Closed loop with 1 um movement accuracy

ii. Z travel: 50 mm

iii. Programmable plunge cut

iv. Programmable movement of Z-axis down

l. Theta

i. Closed loop with 360° + rotation

ii. Air bearing for no maintenance

iii. 6 arc second accuracy

iv. Allows to dice programmable circle sizes

m. Vision system

i. LED illumination with variable intensity

ii. Vertical and oblique illumination

iii. Digital camera

iv. Digital zoom

v. Auto focus

vi. Pattern recognition system

vii. Kerf check: manual and automatic

viii. Wafer alignment: manual and automatic.

n. Dicing modes

i. Manual and automatic

ii. Chopping/plunge cut capable

iii. Programmable entry, cutting and exit speeds.

o. Blade height system

i. Non-contact height sensor when installing blade

ii. Integrated blade dressing station to keep the blade square

iii. Manual dressing mode

iv. Automatic dressing mode during cutting controlled by the dicing recipe

p. Monitoring

i. Spindle motor load monitoring displaying motor current

ii. Broken blade detector

iii. Blade wear monitoring

q. Deionized water system

i. Adjustable jet spraying water at the entry point of the blade

ii. Side spray bars running parallel to the front and back of the blade to remove any slurry along the sides of the cut

iii. Fan jets spraying water across the part being diced to keep it clean

iv. An automatic means of spraying water across the entire cutting chuck to keep the part being diced wet until it is unloaded from the chuck

v. Water separator: a means of drawing the cutting water out of the vacuum system during dicing

r. Cooling water system

i. Particle filter on incoming water line: typically 100 um

s. Air filter on incoming air line to protect air bearings: typically 5 um.

t. Miscellaneous

i. Service maintenance window

ii. Status light tower

iii. Fully visible cut chamber

iv. Transparent ESD covers

v. Air gun

vi. Universal wheel mount and lock nut

2. ACCESSORIES SPECIFICATIONS

a. Shaft-lock blade change tool and torque meter

b. Flange handling tool

c. 2” Broken Blade Detector flange, O.D. 2.05”

d. Dressing boards: minimum 5 pcs

e. Wafer mounting system

i. Supports up to 12” wafer

ii. Programmable chuck temperature controller

iii. Closed loop temperature-controlled platen

iv. UV tape backing removal system

v. Internal vacuum pump

vi. Adjustable roller pressure

vii. Anti-static roller

viii. Supports 12” standard film frames

ix. Static eliminator for 12”

x. 12” round grooved chuck

xi. Chuck adaptor 12” to 8”

xii. 8” round grooved chuck

xiii. 8” shim set

xiv. 12” film frame

xv. Frame for 8” and smaller wafers

IV. SAFETY

The system shall meet all SEMI S2 safety standards.

V. DELIVERY

Delivery shall be FOB DESTINATION, or equivalent Incoterms, such as Delivered Duties Paid (DDP) and shall take place no later than 12 weeks after contract award.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 (prior to ultimate delivery and installation in Building 215)

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 8 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 215.) All installation requirements are identified below:

a. NIST will be responsible for providing all necessary utilities, locating the system in its final position and the final integration and interconnection.

b. The coordination between the vendor and NIST will include, but is not limited to, participating in meetings in person or via conference call and providing information regarding electrical supply, exhaust, drain and water requirements.

c. The vendor shall provide footprint and facility requirement information within 7 days ARO.

VII. INSPECTION AND ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 14 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. TRAINING

The vendor shall provide on-site training immediately following installation, consisting at a minimum of 3 business days of application engineering and basic operation. The vendor shall provide a detailed maintenance manual.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one (1) year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

1. Phone support within 1 business day

2. On-site support within 2 business days.